公开(公告)号：US09703036B2

公开(公告)日：2017-07-11

申请号：US15041103

申请日：2016-02-11

Applicant: GLOBALFOUNDRIES INC.

Inventor： Zhong-Xiang He ,  Qizhi Liu ,  Ronald G. Meunier ,  Steven M. Shank

IPC: G02B6/12 ,  G02B6/42 ,  G02B6/122 ,  G02B6/136 ,  G02B6/132

CPC classification number: G02B6/12002 ,  G02B6/122 ,  G02B6/132 ,  G02B6/136 ,  G02B6/42 ,  G02B2006/121 ,  G02B2006/12119

Abstract: Disclosed are structures with an optical waveguide having a first segment at a first level and a second segment extending between the first level and a higher second level and further extending along the second level. Specifically, the waveguide comprises a first segment between first and second dielectric layers. The second dielectric layer has a trench, which extends through to the first dielectric layer and which has one side positioned laterally adjacent to an end of the first segment. The waveguide also comprises a second segment extending from the bottom of the trench on the side adjacent to the first segment up to and along the top surface of the second dielectric layer on the opposite side of the trench. A third dielectric layer covers the second segment in the trench and on the top surface of the second dielectric layer. Also disclosed are methods of forming such optoelectronic structures.

公开(公告)号：US20160170140A1

公开(公告)日：2016-06-16

申请号：US15041103

申请日：2016-02-11

Applicant: GLOBALFOUNDRIES INC.

Inventor： Zhong-Xiang He ,  Qizhi Liu ,  Ronald G. Meunier ,  Steven M. Shank

IPC: G02B6/12 ,  G02B6/132 ,  G02B6/122 ,  G02B6/136

CPC classification number: G02B6/12002 ,  G02B6/122 ,  G02B6/132 ,  G02B6/136 ,  G02B6/42 ,  G02B2006/121 ,  G02B2006/12119

Abstract: Disclosed are structures with an optical waveguide having a first segment at a first level and a second segment extending between the first level and a higher second level and further extending along the second level. Specifically, the waveguide comprises a first segment between first and second dielectric layers. The second dielectric layer has a trench, which extends through to the first dielectric layer and which has one side positioned laterally adjacent to an end of the first segment. The waveguide also comprises a second segment extending from the bottom of the trench on the side adjacent to the first segment up to and along the top surface of the second dielectric layer on the opposite side of the trench. A third dielectric layer covers the second segment in the trench and on the top surface of the second dielectric layer. Also disclosed are methods of forming such optoelectronic structures.