公开(公告)号：US10234500B2

公开(公告)日：2019-03-19

申请号：US14689088

申请日：2015-04-17

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Weihong Gao ,  Xuefeng Zeng ,  Yan Pan ,  Peter Lin ,  Hoang Nguyen ,  Ho Young Song

IPC: G01R31/04 ,  G01R31/305

Abstract: A method and apparatus for separating real DVC via defects from nuisance based on Net Tracing Classification of eBeam VC die comparison inspection results are provided. Embodiments include performing an eBeam VC die comparison inspection on each via of a plurality of dies; determining DVC vias based on the comparison; performing a Net Tracing Classification on the DVC vias; determining S/D DVC vias based on the Net Tracing Classification; and performing a die repeater analysis on the S/D DVC vias to determine systematic design-related DVC via defects.

公开(公告)号：US20180143248A1

公开(公告)日：2018-05-24

申请号：US15355256

申请日：2016-11-18

Applicant: GLOBALFOUNDRIES INC.

Inventor： Rao Desineni ,  Atul Chittora ,  Yan Pan ,  Sherwin Fernandes ,  Thomas Herrmann

IPC: G01R31/317 ,  G01R31/3177

CPC classification number: G01R31/31703 ,  G01R31/31718 ,  G01R31/3177

Abstract: Disclosed are embodiments of a method that provides for pre-production run development of a fail signature database, which stores fail signatures for systematic defects and corresponding root causes. The fail signatures in the database is subsequently accessed and used for a variety of purposes. For example, the fail signatures are evaluated and, based on the results of the evaluation, actions are taken to prevent specific systematic defects from occurring during production runs and/or to allow for early detection of specific systematic defects during production runs. In some embodiments, following production runs, new fail signatures from failing production chips are developed and compared against the fail signatures in the fail signature database. In some embodiments, when a signature match indicates that a particular production chip has a same systematic defect with a same root cause as a particular prototype chip in-line advanced process control (APC) is performed.

公开(公告)号：US10191112B2

公开(公告)日：2019-01-29

申请号：US15355256

申请日：2016-11-18

Applicant: GLOBALFOUNDRIES INC.

Inventor： Rao Desineni ,  Atul Chittora ,  Yan Pan ,  Sherwin Fernandes ,  Thomas Herrmann

IPC: G01R31/00 ,  G01R31/317 ,  G01R31/3177

Abstract: Disclosed are embodiments of a method that provides for pre-production run development of a fail signature database, which stores fail signatures for systematic defects and corresponding root causes. The fail signatures in the database is subsequently accessed and used for a variety of purposes. For example, the fail signatures are evaluated and, based on the results of the evaluation, actions are taken to prevent specific systematic defects from occurring during production runs and/or to allow for early detection of specific systematic defects during production runs. In some embodiments, following production runs, new fail signatures from failing production chips are developed and compared against the fail signatures in the fail signature database. In some embodiments, when a signature match indicates that a particular production chip has a same systematic defect with a same root cause as a particular prototype chip in-line advanced process control (APC) is performed.