公开(公告)号：US09442482B2

公开(公告)日：2016-09-13

申请号：US13872734

申请日：2013-04-29

Applicant: GLOBALFOUNDRIES, INC.

Inventor： Stephen Bradley Miner ,  William John Fosnight ,  Ryan Gallagher

IPC: G05B19/418 ,  H01L21/67 ,  H01L21/68

CPC classification number: H01L21/67265 ,  G05B19/4184 ,  G05B19/41875 ,  G05B2219/37224 ,  G05B2219/45031 ,  H01L21/67259 ,  H01L21/67389 ,  H01L21/68 ,  H01L21/68707 ,  Y02P90/04 ,  Y10S901/02 ,  Y10S901/27

Abstract: Systems, machines, and methods for monitoring wafer handling are disclosed herein. A system for monitoring wafer handling includes a sensor and a controller. The sensor is capable of being secured to an assembled wafer handling machine. The controller is in electronic communication with the sensor and includes control logic. The control logic is configured to store a reference output of the sensor when the wafer handling machine is aligned and is configured to generate an indication signal when a difference between the reference output and a current output of the sensor exceeds a threshold.

Abstract translation: 本文公开了用于监测晶片处理的系统，机器和方法。 用于监测晶片处理的系统包括传感器和控制器。 传感器能够固定在组装的晶片处理机上。 控制器与传感器进行电子通信，并包括控制逻辑。 所述控制逻辑被配置为当所述晶片处理机对准时存储所述传感器的参考输出，并且当所述参考输出与所述传感器的当前输出之间的差异超过阈值时被配置为产生指示信号。

公开(公告)号：US20140277668A1

公开(公告)日：2014-09-18

申请号：US13833932

申请日：2013-03-15

Applicant: GLOBALFOUNDRIES, INC.

Inventor： Chinmay Oza ,  William John Fosnight

IPC: G05B11/01

CPC classification number: G05B19/41865 ,  G05B2219/32325 ,  G05B2219/32328 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67769 ,  Y02P80/40 ,  Y02P90/14 ,  Y02P90/20 ,  Y02P90/28

Abstract: Disclosed herein are methods and systems for semiconductor fabrication. In one embodiment, a method of semiconductor fabrication includes performing a process on substrates with an equipment unit to form processed substrates, communicating processing data from the equipment unit to a local scheduler and a universal scheduler, determining a priority of the processed substrates, and scheduling removal of processed substrates from the equipment unit and delivery of unprocessed substrates to the equipment unit by the local scheduler based on the processing data and the priority of the processed substrates.

Abstract translation: 这里公开了用于半导体制造的方法和系统。 在一个实施例中，一种半导体制造方法包括：在具有设备单元的基板上进行处理，以形成处理后的基板，将处理数据从设备单元传送到本地调度器和通用调度器，确定经处理的基板的优先级，以及调度 从设备单元去除已处理的基板，并且基于处理数据和处理的基板的优先级，由本地调度器将未处理的基板输送到设备单元。

公开(公告)号：US10593575B2

公开(公告)日：2020-03-17

申请号：US15223882

申请日：2016-07-29

Applicant: GLOBALFOUNDRIES, Inc.

Inventor： Stephen B. Miner ,  William John Fosnight ,  Ryan J. Gallagher

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/673 ,  G05B19/418 ,  H01L21/68

Abstract: Systems, machines, and methods for monitoring wafer handling are disclosed herein. A system for monitoring wafer handling includes a sensor and a controller. The sensor is capable of being secured to an assembled wafer handling machine. The controller is in electronic communication with the sensor and includes control logic. The control logic is configured to store a reference output of the sensor when the wafer handling machine is aligned and is configured to generate an indication signal when a difference between the reference output and a current output of the sensor exceeds a threshold.

公开(公告)号：US20160336206A1

公开(公告)日：2016-11-17

申请号：US15223882

申请日：2016-07-29

Applicant: GLOBALFOUNDRIES, Inc.

Inventor： Stephen B. Miner ,  William John Fosnight ,  Ryan J. Gallagher

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/673 ,  G05B19/418

Abstract: Systems, machines, and methods for monitoring wafer handling are disclosed herein. A system for monitoring wafer handling includes a sensor and a controller. The sensor is capable of being secured to an assembled wafer handling machine. The controller is in electronic communication with the sensor and includes control logic. The control logic is configured to store a reference output of the sensor when the wafer handling machine is aligned and is configured to generate an indication signal when a difference between the reference output and a current output of the sensor exceeds a threshold.

Abstract translation: 本文公开了用于监测晶片处理的系统，机器和方法。 用于监测晶片处理的系统包括传感器和控制器。 传感器能够固定在组装的晶片处理机上。 控制器与传感器进行电子通信，并包括控制逻辑。 所述控制逻辑被配置为当所述晶片处理机对准时存储所述传感器的参考输出，并且当所述参考输出与所述传感器的当前输出之间的差异超过阈值时被配置为产生指示信号。

公开(公告)号：US20150162180A1

公开(公告)日：2015-06-11

申请号：US14100610

申请日：2013-12-09

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Gero Grau ,  Steffen Kalisch ,  Joerg Weigang ,  William John Fosnight ,  Chinmay Oza ,  Detlef Pabst

IPC: H01L21/02

CPC classification number: H01L21/02 ,  G05B17/02 ,  G05B19/0426 ,  G05B19/41875 ,  G05B2219/23006 ,  H01L21/67727 ,  Y02P90/20 ,  Y02P90/22 ,  Y02P90/86

Abstract: A method includes processing each of a plurality of lots with at least one first equipment and moving some of the plurality of lots to a first storage. For each of a plurality of second equipments, an expected dispatch time of one or more next lots for processing by the second equipment is determined Each of the lots in the first storage is assigned to one of the plurality of second equipments on the basis of at least the determined expected dispatch times and moved to one of a plurality of second storages that is associated with one of the plurality of second equipments to which the respective lot was assigned. For each of the plurality of second equipments, each of the lots in the second storage associated with the second equipment is moved to the second equipment and are processed with the second equipment.

Abstract translation: 一种方法包括利用至少一个第一设备来处理多个批次中的每一个，并且将多个批次中的一些移动到第一存储器。 对于多个第二设备中的每一个，确定由第二设备处理的一个或多个下一批次的预期调度时间被确定基于在第一设备中的第一设备中的一个批次被分配给多个第二设备中的一个 至少所确定的预期分配时间并移动到与分配了相应批次的多个第二设备中的一个相关联的多个第二存储器之一。 对于多个第二设备中的每一个，与第二设备相关联的第二存储器中的批次中的每一个被移动到第二设备并且用第二设备进行处理。

公开(公告)号：US09748088B2

公开(公告)日：2017-08-29

申请号：US14100610

申请日：2013-12-09

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Gero Grau ,  Steffen Kalisch ,  Joerg Weigang ,  William John Fosnight ,  Chinmay Oza ,  Detlef Pabst

IPC: H01L21/02 ,  H01L21/677 ,  G05B17/02 ,  G05B19/042 ,  G05B19/418

CPC classification number: H01L21/02 ,  G05B17/02 ,  G05B19/0426 ,  G05B19/41875 ,  G05B2219/23006 ,  H01L21/67727 ,  Y02P90/20 ,  Y02P90/22 ,  Y02P90/86

Abstract: A method includes processing each of a plurality of lots with at least one first equipment and moving some of the plurality of lots to a first storage. For each of a plurality of second equipments, an expected dispatch time of one or more next lots for processing by the second equipment is determined. Each of the lots in the first storage is assigned to one of the plurality of second equipments on the basis of at least the determined expected dispatch times and moved to one of a plurality of second storages that is associated with one of the plurality of second equipments to which the respective lot was assigned. For each of the plurality of second equipments, each of the lots in the second storage associated with the second equipment is moved to the second equipment and are processed with the second equipment.

公开(公告)号：US09250623B2

公开(公告)日：2016-02-02

申请号：US13833932

申请日：2013-03-15

Applicant: GLOBALFOUNDRIES, Inc.

Inventor： Chinmay Oza ,  William John Fosnight

IPC: G06F19/00 ,  G05B19/418

CPC classification number: G05B19/41865 ,  G05B2219/32325 ,  G05B2219/32328 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67769 ,  Y02P80/40 ,  Y02P90/14 ,  Y02P90/20 ,  Y02P90/28

Abstract: Disclosed herein are methods and systems for semiconductor fabrication. In one embodiment, a method of semiconductor fabrication includes performing a process on substrates with an equipment unit to form processed substrates, communicating processing data from the equipment unit to a local scheduler and a universal scheduler, determining a priority of the processed substrates, and scheduling removal of processed substrates from the equipment unit and delivery of unprocessed substrates to the equipment unit by the local scheduler based on the processing data and the priority of the processed substrates.

Abstract translation: 这里公开了用于半导体制造的方法和系统。 在一个实施例中，一种半导体制造方法包括：在具有设备单元的基板上进行处理，以形成处理后的基板，将处理数据从设备单元传送到本地调度器和通用调度器，确定经处理的基板的优先级，以及调度 从设备单元去除已处理的基板，并且基于处理数据和处理的基板的优先级，由本地调度器将未处理的基板输送到设备单元。

公开(公告)号：US20140324208A1

公开(公告)日：2014-10-30

申请号：US13872734

申请日：2013-04-29

Applicant: GLOBALFOUNDRIES, INC.

Inventor： Stephen Bradley Miner ,  William John Fosnight ,  Ryan Gallagher

IPC: G05B19/418

CPC classification number: H01L21/67265 ,  G05B19/4184 ,  G05B19/41875 ,  G05B2219/37224 ,  G05B2219/45031 ,  H01L21/67259 ,  H01L21/67389 ,  H01L21/68 ,  H01L21/68707 ,  Y02P90/04 ,  Y10S901/02 ,  Y10S901/27

Abstract: Systems, machines, and methods for monitoring wafer handling are disclosed herein. A system for monitoring wafer handling includes a sensor and a controller. The sensor is capable of being secured to an assembled wafer handling machine. The controller is in electronic communication with the sensor and includes control logic. The control logic is configured to store a reference output of the sensor when the wafer handling machine is aligned and is configured to generate an indication signal when a difference between the reference output and a current output of the sensor exceeds a threshold.

Abstract translation: 本文公开了用于监测晶片处理的系统，机器和方法。 用于监测晶片处理的系统包括传感器和控制器。 传感器能够固定在组装的晶片处理机上。 控制器与传感器进行电子通信，并包括控制逻辑。 所述控制逻辑被配置为当所述晶片处理机对准时存储所述传感器的参考输出，并且当所述参考输出与所述传感器的当前输出之间的差异超过阈值时被配置为产生指示信号。