公开(公告)号：US20230113261A1

公开(公告)日：2023-04-13

申请号：US17450324

申请日：2021-10-08

申请人： GlobalFoundries U.S. Inc.

发明人： Roderick Alan Augur ,  Yusheng Bian ,  Robert John Fox, III

IPC分类号： H01L23/532 ,  H01L23/522 ,  H01L23/552

摘要： A photonic integrated circuit (PIC) die includes a silicon nitride optical component over an active region. Multiple interconnect layers are over the silicon nitride optical component, each of the multiple interconnect layers including a metal interconnect therein. At least one optical deflector is over the multiple interconnect layers and over the silicon nitride optical component. The optical deflector(s) may also include a contact passing therethrough to the interconnect layers, but do not include any other electrical interconnects. Each optical deflector may deflect light within an ambient light range of less than 570 nanometers (nm) to protect the silicon nitride optical component from light-induced degradation.

公开(公告)号：US11837547B2

公开(公告)日：2023-12-05

申请号：US17450324

申请日：2021-10-08

申请人： GlobalFoundries U.S. Inc.

发明人： Roderick Alan Augur ,  Yusheng Bian ,  Robert John Fox, III

IPC分类号： H01L23/532 ,  H01L23/552 ,  H01L23/522

CPC分类号： H01L23/53295 ,  H01L23/5226 ,  H01L23/552

摘要： A photonic integrated circuit (PIC) die includes a silicon nitride optical component over an active region. Multiple interconnect layers are over the silicon nitride optical component, each of the multiple interconnect layers including a metal interconnect therein. At least one optical deflector is over the multiple interconnect layers and over the silicon nitride optical component. The optical deflector(s) may also include a contact passing therethrough to the interconnect layers, but do not include any other electrical interconnects. Each optical deflector may deflect light within an ambient light range of less than 570 nanometers (nm) to protect the silicon nitride optical component from light-induced degradation.

公开(公告)号：US20240272359A1

公开(公告)日：2024-08-15

申请号：US18109294

申请日：2023-02-14

申请人： GlobalFoundries U.S. Inc.

发明人： Yusheng Bian ,  Roderick Alan Augur

IPC分类号： G02B6/125 ,  G02B6/122 ,  G02B6/13

CPC分类号： G02B6/125 ,  G02B6/1228 ,  G02B6/13 ,  G02B2006/12061 ,  G02B2006/12147 ,  G02B2006/1215

摘要： Structures for an optical power splitter and methods of forming a structure for an optical power splitter. The structure comprises a spiral waveguide core having an outer perimeter. The structure further comprises a plurality of waveguide cores. Each waveguide core has a section disposed adjacent to the outer perimeter of the spiral waveguide core.