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公开(公告)号：US20240316536A1
公开(公告)日：2024-09-26
申请号：US18603743
申请日：2024-03-13
发明人： Jong-San Chang , Seongyun Ryu , Seungjun Lee , Joungwoo Han , Woosung Choi , Yongjae Lee , Jungje Park , Taewoo Lee , Hyunsik Han
CPC分类号： B01J23/30 , B01D53/8662 , B01J23/06 , B01J37/0201 , B01J37/0236 , B01J37/04 , B01J37/08 , B01D2255/20776 , B01D2255/20792 , B01D2255/2092 , B01D2257/2066 , B01D2258/0216
摘要： Proposed are a catalyst for decomposing perfluorocompounds (PFCs) and a method of preparing the same. The provided catalyst for decomposing PFCs and the method of preparing the same are as follows. Zinc as an active component for performance improvement and tungsten (W) as an auxiliary component are added to alumina selected from at least one of gamma alumina, aluminum trihydroxide, boehmite, and pseudo-boehmite, and a weight ratio of Al, Zn, and W is at 100:30 to 100:1 to 11. The catalyst for decomposing PFCs not only has an effect of having durability against fluorine generated by decomposition of PFCs but also has a synergistic effect of improving reaction activity. Furthermore, the catalyst decomposes PFCs at a lower temperature than conventional catalysts for decomposing PFCs. Thus, it is possible to reduce operating costs and secure the durability of the system during continuous operation.
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公开(公告)号：US20230158453A1
公开(公告)日：2023-05-25
申请号：US18046495
申请日：2022-10-13
发明人： Kyeongmin Baek , Sungmin Jang , Seongkeun Kang , Taehyun Kim , Seongyun Ryu , Byungku Yoo , Seungjun Lee , Woosung Choi , Haeyong Choi , Joungwoo Han
IPC分类号： B01D53/86
CPC分类号： B01D53/8631 , B01D2253/104 , B01D2253/108 , B01D2253/102 , B01D2253/3425 , B01D2255/9022 , B01D2257/40 , B01D2258/0216
摘要： An integrated waste gas treatment system includes an adsorption/desorption device that receives a waste gas that includes an organic compound and an organic nitrogen compound exhausted from a semiconductor manufacturing facility, where the adsorption/desorption device adsorbs the organic compound and the organic nitrogen compound and concentrates and desorbs the organic compound and the organic nitrogen compound, and a catalytic decomposition device disposed adjacent to the adsorption/desorption device, where the catalytic decomposition device includes a catalytic chamber that provides a gas passage through which a gas desorbed from the adsorption/desorption device flows and an oxidation-reduction catalyst disposed in the gas passage that removes the organic compound and the organic nitrogen compound from the desorbed gas. The organic compound and the organic nitrogen compound are subjected to an oxidation treatment by the oxidation-reduction catalyst, and nitrogen oxides generated by the oxidation treatment are removed by a selective reduction reaction.
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