公开(公告)号：US20150013481A1

公开(公告)日：2015-01-15

申请号：US14374110

申请日：2012-01-26

Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.

Inventor： James Elmer Abbott, JR. ,  John L. Williams ,  Pavel Kornilovich

IPC: G01C19/06 ,  G03F7/40 ,  C23C16/40

CPC classification number: G01C19/065 ,  C23C16/40 ,  G01C19/5656 ,  G03F7/40 ,  Y10T74/1296

Abstract: A micro-scale pendulum structure. The structure includes a membrane having a peripheral support portion and an inner portion, and a micro-scale pendulum carried by the inner portion of the membrane.

Abstract translation: 微型摆式结构。 该结构包括具有周边支撑部分和内部部分的膜和由膜的内部部分承载的微尺度摆锤。

公开(公告)号：US20170210616A1

公开(公告)日：2017-07-27

申请号：US15328315

申请日：2014-07-30

Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.

Inventor： James Elmer Abbott, JR. ,  Zhizhang CHEN ,  John L. Williams

IPC: B81B3/00 ,  B41J2/14

CPC classification number: B81B3/0075 ,  B41J2/14 ,  B81B7/0061 ,  B81B2201/0242 ,  B81B2203/01 ,  B81B2203/0118 ,  B81B2203/0127

Abstract: An elastic device may comprise an amorphous metal comprising at least one refractory metal, at least two elements selected from periods, 4, 5, 6, 9, and 10, and at least one metalloid. A membrane may comprise a layer of silicon dioxide and a layer of amorphous metal. A MEMS device may comprise a layer of amorphous metal comprising at least one refractory metal, at least two elements selected from periods, 4, 5, 6, 9, and 10, and a metalloid. In one example, the amorphous material comprises Tantalum (Ta), Tungsten (W), and Silicon (Si). In another example, the metalloid is Silicon. In yet another example, the refractory metals comprise Niobium, Molybdenum, Tantalum, Tungsten, Rhenium, or combinations thereof.