公开(公告)号：US10262830B2

公开(公告)日：2019-04-16

申请号：US15529281

申请日：2014-11-26

Applicant: HITACHI, LTD.

Inventor： Daisuke Bizen ,  Hideo Morishita ,  Michio Hatano ,  Hiroya Ohta

IPC: H01J37/26 ,  H01J37/147 ,  H01J37/10 ,  H01J37/285 ,  H01J37/28 ,  H01J37/05 ,  H01J37/21 ,  H01J37/244

Abstract: To provide a scanning electron microscope having an electron spectroscopy system to attain high spatial resolution and a high secondary electron detection rate under the condition that energy of primary electrons is low, the scanning electron microscope includes: an objective lens 105; primary electron acceleration means 104 that accelerates primary electrons 102; primary electron deceleration means 109 that decelerates the primary electrons and irradiates them to a sample 106; a secondary electron deflector 103 that deflects secondary electrons 110 from the sample to the outside of an optical axis of the primary electrons; a spectroscope 111 that disperses secondary electrons; and a controller that controls application voltage to the objective lens, the primary electron acceleration means and the primary electron deceleration means so as to converge the secondary electrons to an entrance of the spectroscope.

公开(公告)号：US10755396B2

公开(公告)日：2020-08-25

申请号：US15894605

申请日：2018-02-12

Applicant: HITACHI, LTD.

Inventor： Momoyo Enyama ,  Yasuhiro Shirasaki ,  Michio Hatano ,  Makoto Sakakibara

IPC: G06T5/50 ,  G06T1/00 ,  G06T5/00 ,  G06T11/60 ,  H01J37/26

Abstract: An image forming apparatus includes an observation image input section in which a plurality of observation images is input, an emphasis information input section that inputs information to be emphasized, a storage section that defines a plurality of conversion functions that converts the plurality of observation images into a converted image on the basis of a function for conversion and takes, as a parameter, a gradation value of each pixel in the plurality of observation images and a plurality of emphasis functions that takes, as a parameter, a gradation value of each pixel in the conversion functions, an image calculation section that calculates an image in which information to be emphasized is emphasized on the basis of the plurality of input observation images, the input information of the information to be emphasized, the conversion functions, and the emphasis functions, and an emphasized image output section that outputs the emphasized image.