SENSOR ELEMENT FOR CAPACITIVELY MEASURING DIFFERENTIAL PRESSURE
    4.
    发明申请
    SENSOR ELEMENT FOR CAPACITIVELY MEASURING DIFFERENTIAL PRESSURE 有权
    传感器元件用于测量差压

    公开(公告)号:US20120024074A1

    公开(公告)日:2012-02-02

    申请号:US13191118

    申请日:2011-07-26

    IPC分类号: G01L9/12

    摘要: A capacitive differential pressure sensor is described which has a simple configuration, and which provides reliable measuring results even in corrosive measuring environments. The sensor element for capacitively measuring differential pressure includes a sensor diaphragm which is implemented in a layered configuration on a semiconductor substrate and spans a cavern. A pressure connection opens into the cavern. The sensor element also includes a measuring capacitor which has a movable electrode on the sensor diaphragm, and a stationary counter electrode which is situated on the base of the cavern, opposite from the movable electrode. According to the sensor, the cavern is filled with a dielectric fluid.

    摘要翻译: 描述了一种具有简单结构的电容差压传感器,即使在腐蚀性测量环境中也能提供可靠的测量结果。 用于电容式测量差压的传感器元件包括传感器隔膜,该传感器隔膜以半导体衬底上的分层结构实现并跨越洞穴。 压力连接通向洞穴。 传感器元件还包括测量电容器,该测量电容器在传感器隔膜上具有可移动电极,以及固定对置电极,其位于与可动电极相对的洞穴底部。 根据传感器,洞穴填充有介电流体。

    Micromechanical sensor element for capacitive differential pressure detection
    5.
    发明申请
    Micromechanical sensor element for capacitive differential pressure detection 有权
    用于电容差压检测的微机械传感器元件

    公开(公告)号:US20110192236A1

    公开(公告)日:2011-08-11

    申请号:US13023855

    申请日:2011-02-09

    IPC分类号: G01L1/00

    CPC分类号: G01L9/0073 G01L13/025

    摘要: A sensor concept for capacitive pressure measurement yields reliable measurement results and is for aggressive particle-bearing measuring environments. This sensor element is a micromechanical sensor element, whose structural elements are implemented in a layered structure. The sensor element includes two pressure connections separated from each other, a deflectable carrier element for at least one deflectable measuring electrode, and at least one stationary counter electrode for the measuring electrode. The carrier element spans a closed cavity in the layered structure. The carrier element is spanned by a cap structure, and is suspended on the cap structure via a suspension web functioning as a rocker bearing. The two pressure connections are connected to the carrier element's top side which is divided by the suspension web into two separated pressure connection zones. The measuring electrode is on the carrier element's underside and the counter electrode is on the cavity's opposite wall.

    摘要翻译: 用于电容式压力测量的传感器概念可以产生可靠的测量结果,并且适用于积极的颗粒承载测量环境。 该传感器元件是微机械传感器元件,其结构元件以分层结构实现。 传感器元件包括彼此分离的两个压力连接,用于至少一个可偏转测量电极的可偏转载体元件和用于测量电极的至少一个固定反电极。 载体元件跨越分层结构中的封闭空腔。 载体元件由盖结构跨越,并且通过用作摇摆轴承的悬挂腹板悬挂在盖结构上。 两个压力连接件连接到载体元件的顶侧,该悬挂网被分离成两个分离的压力连接区域。 测量电极在载体元件的下侧,反电极位于腔的相对的壁上。

    Micromechanical sensor element for capacitive pressure detection
    6.
    发明申请
    Micromechanical sensor element for capacitive pressure detection 有权
    用于电容式压力检测的微机械传感器元件

    公开(公告)号:US20110185816A1

    公开(公告)日:2011-08-04

    申请号:US12931501

    申请日:2011-02-01

    申请人: Remigius Has

    发明人: Remigius Has

    IPC分类号: G01L9/12

    摘要: A micromechanical capacitive pressure sensor has a layered structure, which includes at least one deflectable carrier element for at least one deflectable measuring electrode in a first layer plane and at least one stationary carrier structure for at least one counter electrode in a second layer plane parallel to the first layer plane. The carrier structure is suspended in a closed cavity of the layered structure between two diaphragms, which are oriented essentially perpendicularly to the layer planes and delimit the cavity on two opposite sides. At least one pressure connection aperture is provided, via which at least one of the two diaphragms may be subjected to a pressure being measured. The carrier element is connected to the two diaphragms in such a way that diaphragm deformations cause a parallel shift of the measuring electrode relative to the counter electrode.

    摘要翻译: 微机械电容式压力传感器具有层状结构,其包括用于在第一层平面中的至少一个可偏转测量电极的至少一个可偏转载体元件和用于在平行于第二层平面的第二层平面中的至少一个对电极的至少一个固定载体结构 第一层飞机。 载体结构悬挂在分层结构的封闭空腔中,两个隔膜基本上垂直于层平面定向,并在两个相对的两侧限定空腔。 提供至少一个压力连接孔,通过该至少一个压力连接孔可以使两个隔膜中的至少一个受到被测量的压力。 载体元件以这样的方式连接到两个隔膜,使得隔膜变形引起测量电极相对于对电极的平行移动。

    Micromechanical sensor element for capacitive differential pressure detection
    7.
    发明授权
    Micromechanical sensor element for capacitive differential pressure detection 有权
    用于电容差压检测的微机械传感器元件

    公开(公告)号:US08371180B2

    公开(公告)日:2013-02-12

    申请号:US13023855

    申请日:2011-02-09

    IPC分类号: G01L1/00

    CPC分类号: G01L9/0073 G01L13/025

    摘要: A sensor concept for capacitive pressure measurement yields reliable measurement results and is for aggressive particle-bearing measuring environments. This sensor element is a micromechanical sensor element, whose structural elements are implemented in a layered structure. The sensor element includes two pressure connections separated from each other, a deflectable carrier element for at least one deflectable measuring electrode, and at least one stationary counter electrode for the measuring electrode. The carrier element spans a closed cavity in the layered structure. The carrier element is spanned by a cap structure, and is suspended on the cap structure via a suspension web functioning as a rocker bearing. The two pressure connections are connected to the carrier element's top side which is divided by the suspension web into two separated pressure connection zones. The measuring electrode is on the carrier element's underside and the counter electrode is on the cavity's opposite wall.

    摘要翻译: 用于电容式压力测量的传感器概念可以产生可靠的测量结果,并且适用于积极的颗粒承载测量环境。 该传感器元件是微机械传感器元件,其结构元件以分层结构实现。 传感器元件包括彼此分离的两个压力连接,用于至少一个可偏转测量电极的可偏转载体元件和用于测量电极的至少一个固定反电极。 载体元件跨越分层结构中的封闭空腔。 载体元件由盖结构跨越,并且通过用作摇摆轴承的悬挂腹板悬挂在盖结构上。 两个压力连接件连接到载体元件的顶侧,该悬挂网被分离成两个分离的压力连接区域。 测量电极在载体元件的下侧,反电极位于腔的相对的壁上。

    Sensor element for capacitively measuring differential pressure
    8.
    发明授权
    Sensor element for capacitively measuring differential pressure 有权
    用于电容式测量压差的传感器元件

    公开(公告)号:US08511168B2

    公开(公告)日:2013-08-20

    申请号:US13191118

    申请日:2011-07-26

    IPC分类号: G01L9/12 G01L9/00

    摘要: A capacitive differential pressure sensor is described which has a simple configuration, and which provides reliable measuring results even in corrosive measuring environments. The sensor element for capacitively measuring differential pressure includes a sensor diaphragm which is implemented in a layered configuration on a semiconductor substrate and spans a cavern. A pressure connection opens into the cavern. The sensor element also includes a measuring capacitor which has a movable electrode on the sensor diaphragm, and a stationary counter electrode which is situated on the base of the cavern, opposite from the movable electrode. According to the sensor, the cavern is filled with a dielectric fluid.

    摘要翻译: 描述了一种具有简单结构的电容差压传感器,即使在腐蚀性测量环境中也能提供可靠的测量结果。 用于电容式测量差压的传感器元件包括传感器隔膜,该传感器隔膜以半导体衬底上的分层结构实现并跨越洞穴。 压力连接通向洞穴。 传感器元件还包括测量电容器,该测量电容器在传感器隔膜上具有可移动电极,以及固定对置电极,其位于与可动电极相对的洞穴底部。 根据传感器,洞穴填充有介电流体。

    Micromechanical sensor element for capacitive pressure detection
    9.
    发明授权
    Micromechanical sensor element for capacitive pressure detection 有权
    用于电容式压力检测的微机械传感器元件

    公开(公告)号:US08220337B2

    公开(公告)日:2012-07-17

    申请号:US12931501

    申请日:2011-02-01

    申请人: Remigius Has

    发明人: Remigius Has

    IPC分类号: G01L9/12

    摘要: A micromechanical capacitive pressure sensor has a layered structure, which includes at least one deflectable carrier element for at least one deflectable measuring electrode in a first layer plane and at least one stationary carrier structure for at least one counter electrode in a second layer plane parallel to the first layer plane. The carrier structure is suspended in a closed cavity of the layered structure between two diaphragms, which are oriented essentially perpendicularly to the layer planes and delimit the cavity on two opposite sides. At least one pressure connection aperture is provided, via which at least one of the two diaphragms may be subjected to a pressure being measured. The carrier element is connected to the two diaphragms in such a way that diaphragm deformations cause a parallel shift of the measuring electrode relative to the counter electrode.

    摘要翻译: 微机械电容式压力传感器具有层状结构,其包括用于在第一层平面中的至少一个可偏转测量电极的至少一个可偏转载体元件和用于在平行于第二层平面的第二层平面中的至少一个对电极的至少一个固定载体结构 第一层飞机。 载体结构悬挂在分层结构的封闭空腔中,两个隔膜基本上垂直于层平面定向,并在两个相对的两侧限定空腔。 提供至少一个压力连接孔,通过该至少一个压力连接孔可以使两个隔膜中的至少一个受到被测量的压力。 载体元件以这样的方式连接到两个隔膜,使得隔膜变形引起测量电极相对于对电极的平行移动。