公开(公告)号：US07194793B2

公开(公告)日：2007-03-27

申请号：US10844940

申请日：2004-05-13

申请人： Michio Kadota ,  Yasunori Takakuwa ,  Seigo Hayashi ,  Junya Ago ,  Hideya Horiuchi ,  Mamoru Ikeura

发明人： Michio Kadota ,  Yasunori Takakuwa ,  Seigo Hayashi ,  Junya Ago ,  Hideya Horiuchi ,  Mamoru Ikeura

IPC分类号： H04R31/00

CPC分类号： H03H9/6483 ,  H03H9/02669 ,  H03H9/14552 ,  H03H9/6436 ,  H03H9/6463 ,  Y10T29/42 ,  Y10T29/49004 ,  Y10T29/49005 ,  Y10T29/49011 ,  Y10T29/4908 ,  Y10T29/49128 ,  Y10T29/4913

摘要： A method for adjusting a frequency characteristic of an edge reflection type surface acoustic wave device includes the step of obtaining a frequency characteristic of an edge reflection type surface acoustic wave device having a piezoelectric substrate. The edge reflection type surface acoustic wave device has a pair of edges of the piezoelectric substrate which define a predetermined distance therebetween. The piezoelectric substrate is cut at a position which defines a distance that is shorter than the predetermined distance when a final frequency characteristic of the edge reflection type surface acoustic wave device is to be higher than the obtained frequency characteristic. The piezoelectric substrate is cut at a position which defines a distance that is longer than the predetermined distance when a final frequency characteristic of the edge reflection type surface acoustic wave device is to be lower than the obtained frequency characteristic.

摘要翻译： 用于调整边缘反射型声表面波装置的频率特性的方法包括获得具有压电基片的边缘反射型声表面波装置的频率特性的步骤。 边缘反射型弹性表面波器件具有在其间限定预定距离的压电基片的一对边缘。 当边缘反射型弹性表面波器件的最终频率特性要比所获得的频率特性高时，将压电基片切割成限定比预定距离短的距离的位置。 当边缘反射型弹性表面波器件的最终频率特性要低于所获得的频率特性时，压电基片被切割在限定比预定距离长的距离的位置处。

公开(公告)号：US06637087B1

公开(公告)日：2003-10-28

申请号：US09528467

申请日：2000-03-17

申请人： Hideya Horiuchi ,  Michio Kadota ,  Junya Ago ,  Seigo Hayashi ,  Yasunori Takakuwa

发明人： Hideya Horiuchi ,  Michio Kadota ,  Junya Ago ,  Seigo Hayashi ,  Yasunori Takakuwa

IPC分类号： H04R1700

CPC分类号： H03H9/25 ,  H03H3/08 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908 ,  Y10T29/49133 ,  Y10T29/49135

摘要： A method of manufacturing an edge reflection type surface acoustic wave device includes the step of preparing a surface acoustic wave mother substrate having a plurality of interdigital transducers formed on one main surface thereof. A cut groove is formed in the substrate by cutting the surface acoustic wave mother substrate beginning from the one main surface side thereof. This step of forming a cut groove is repeated so as to produce a plurality of cut grooves so that the first reflection edge of the respective surface acoustic wave devices are sequentially formed. Next, similarly, cut grooves are sequentially formed on the surface acoustic wave mother substrate from the one main-face side thereof so as not to reach the other main surface thereof, whereby the second reflection edges of the respective surface acoustic wave devices are sequentially formed.

摘要翻译： 制造边缘反射型声表面波装置的方法包括制备具有形成在其一个主表面上的多个叉指换能器的表面声波母基板的步骤。 通过从其一个主表面侧开始切割声表面波母基板，在基板中形成切槽。 重复形成切割槽的步骤，以便产生多个切割槽，使得各声表面波器件的第一反射边缘顺序地形成。 接下来，类似地，在表面声波母体基板上从其一个主面侧依次形成切槽，以便不到达其另一个主表面，由此各声表面波装置的第二反射边缘被顺序地形成 。

公开(公告)号：US06527884B1

公开(公告)日：2003-03-04

申请号：US09708204

申请日：2000-11-07

申请人： Yasunori Takakuwa ,  Kouji Tometsuka

发明人： Yasunori Takakuwa ,  Kouji Tometsuka

IPC分类号： C21D126

CPC分类号： C21D1/773 ,  C21D1/76 ,  H01L21/321

摘要： An apparatus for selectively implementing a depressurized or an atmospheric hydrogen annealing process comprises a reaction chamber, a hydrogen gas introduction line for feeding hydrogen gas into the reaction chamber and an atmospheric exhaust line and a depressurized exhaust line, which are connected to the reaction chamber. By selectively switching the atmospheric exhaust line and the depressurized exhaust line, the depressurized hydrogen annealing process and the atmospheric annealing process are selectively implemented. A device for performing deoxidization process or a device for removing impurities may be further included.

摘要翻译： 用于选择性地实施减压或大气氢退火处理的装置包括反应室，用于将氢气进入反应室的氢气引入管线和连接到反应室的大气排气管线和减压排气管线。 通过选择性地切换大气排气管线和减压排气管路，选择性地实施减压氢退火处理和大气退火处理。 还可以包括用于进行脱氧过程的装置或用于除去杂质的装置。