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公开(公告)号：US3480491A
公开(公告)日：1969-11-25
申请号：US3480491D
申请日：1965-11-17
Applicant: IBM
Inventor： REISMAN ARNOLD , LEONHARDT HORST R
IPC: C23F3/04 , H01L21/306 , H01L7/00
CPC classification number: H01L21/02046 , C23F3/04 , H01L21/30621 , Y10S148/051 , Y10S148/054 , Y10S148/115 , Y10S438/909 , Y10S438/971
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