公开(公告)号：US3521018A

公开(公告)日：1970-07-21

申请号：US3521018D

申请日：1968-09-26

Applicant: IBM

Inventor： BOERGER FRANK E ,  WHITE WILLIAM H JR

IPC: G01K7/02 ,  F27D11/06 ,  G01K1/08 ,  G01K1/14 ,  G01K7/00 ,  H05B6/02 ,  H05B5/00 ,  H05B5/04

CPC classification number: G01K1/08 ,  F27D11/06

公开(公告)号：US3583685A

公开(公告)日：1971-06-08

申请号：US3583685D

申请日：1968-09-26

Applicant: IBM

Inventor： BOERGER FRANK E ,  WHITE WILLIAM H JR

IPC: H01L21/31 ,  C23C8/16 ,  H01L23/29 ,  B01F3/04

CPC classification number: C23C8/16 ,  H01L23/291 ,  H01L2924/0002 ,  Y10S203/11 ,  H01L2924/00

Abstract: The quantity of a liquid vapor in a gas is controlled by mixing a first stream of gas saturated with the liquid vapor and a second stream of dry gas. The flow rate of each of the streams of gas and/or the temperature of the liquid vaporized into the gas determine the percent of the liquid vapor in the mixed stream of gas.