公开(公告)号：US20190196520A1

公开(公告)日：2019-06-27

申请号：US15853850

申请日：2017-12-25

Applicant: Industrial Technology Research Institute

Inventor： Chien-Nan Yeh ,  Chung-Yuan Su ,  Chih-Yuan Chen ,  Chao-Ta Huang ,  Yu-Wen Hsu

IPC: G05D15/00 ,  B41K3/62 ,  G05G5/02

CPC classification number: G05D15/00 ,  B41K3/62 ,  G05G5/02

Abstract: An apparatus with two anchors including a housing, a movable element, and a rotary element is provided. The housing includes a first expansion unit, a second expansion unit, and a linkage. First alignment structures are disposed in the movable element and anti-rotation structures are disposed in the linkage. When the movable element and the rotary element enter the housing from two ends and are coupled along an axis, the movable element and the rotary element can approach each other to expand the first expansion unit and the second expansion unit to fonn two anchors. The apparatus :with two anchors secures a sensor in a variety of environments such as walls or machines. When the apparatus with two anchors fixes a sensor in a hole of a stamping machine, the impact force does not cause stress concentration on the sensor so as to improve the reliability of the sensor.

公开(公告)号：US11543312B2

公开(公告)日：2023-01-03

申请号：US17234263

申请日：2021-04-19

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chien-Nan Yeh ,  Pei-Yu Chang ,  Shih-Ting Lin ,  Chao-Ta Huang

IPC: G01L3/10 ,  H02K21/22 ,  B62J45/42 ,  B62J45/411

Abstract: A spindle shaft device including a shaft, a first torque sensor, and a second torque sensor. The shaft extends along an axial direction and comprises a first side portion, a second side portion, and a central portion located between the first side portion and the second side portion. The central portion has a central torsional rigidity with respect to the axial direction. The first side portion has a first torsional rigidity with respect to the axial direction. The second side portion has a second torsional rigidity with respect to the axial direction. The first torsional rigidity is smaller than the central torsional rigidity. The second torsional rigidity is smaller than the central torsional rigidity. The first torque sensor is disposed on the first side portion. The second torque sensor is disposed on the second side portion.

公开(公告)号：US10914368B2

公开(公告)日：2021-02-09

申请号：US16221615

申请日：2018-12-17

Applicant: Industrial Technology Research Institute

Inventor： Chih-Yuan Chen ,  Chung-Yuan Su ,  Chien-Nan Yeh ,  Chao-Ta Huang ,  Yu-Wen Hsu

IPC: F16H25/22 ,  F16H57/01 ,  G01L5/00

Abstract: A ball screw with force sensor in radial direction including a screw rod, a screw nut, a plurality of balls, and a force sensor is provided. The screw nut has a cavity. The cavity is extended along a radial direction from an outer surface of the screw nut. The force sensor is disposed in the cavity of the screw nut, and the force sensor includes a stationary base and an elastic component. The stationary base includes a displacement restraint, and the elastic component includes a contact end and a fixed end. The displacement restraint is coupled to the cavity to prevent the stationary base from being displaced in the radial direction for fixing stationary base firmly in the cavity. The fixed end is connected to the stationary base, and the contact end contacts a bottom surface of the cavity in order to sense a force along the radial direction.

公开(公告)号：US10962992B2

公开(公告)日：2021-03-30

申请号：US15853850

申请日：2017-12-25

Applicant: Industrial Technology Research Institute

Inventor： Chien-Nan Yeh ,  Chung-Yuan Su ,  Chih-Yuan Chen ,  Chao-Ta Huang ,  Yu-Wen Hsu

IPC: G05D15/00 ,  G01L5/00 ,  G05G5/02 ,  B41K3/62 ,  B41F33/02

Abstract: An apparatus with two anchors including a housing, a movable element, and a rotary element is provided. The housing includes a first expansion unit, a second expansion unit, and a linkage. First alignment structures are disposed in the movable element and anti-rotation structures are disposed in the linkage. When the movable element and the rotary element enter the housing from two ends and are coupled along an axis, the movable element and the rotary element can approach each other to expand the first expansion unit and the second expansion unit to form two anchors. The apparatus with two anchors secures a sensor in a variety of environments such as walls or machines. When the apparatus with two anchors fixes a sensor in a hole of a stamping machine, the impact force does not cause stress concentration on the sensor so as to improve the reliability of the sensor.

公开(公告)号：US09236275B2

公开(公告)日：2016-01-12

申请号：US13661690

申请日：2012-10-26

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chien-Nan Yeh ,  Chin-Hung Wang ,  Hsin-Li Lee ,  Jien-Ming Chen ,  Tzong-Che Ho ,  Li-Chi Pan

IPC: H01L29/84 ,  H01L21/56 ,  B81B7/00 ,  H04R31/00 ,  H04R19/00

CPC classification number: H01L21/56 ,  B81B7/0061 ,  B81B2201/0257 ,  B81B2207/012 ,  B81B2207/096 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/73265 ,  H01L2924/1461 ,  H01L2924/3025 ,  H04R19/005 ,  H04R31/006 ,  H04R2499/11 ,  H04R2499/15 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A MEMS acoustic transducer is provided, which includes a substrate, a MEMS chip, and a housing. The substrate has a first opening area and a lower electrode layer disposed over a surface of the substrate, wherein the first opening area includes at least one hole allowing acoustic pressure to enter the MEMS acoustic transducer. The MEMS chip is disposed over the surface of the substrate, including a second opening area and an upper electrode layer partially sealing the second opening area, wherein the upper electrode layer and the lower electrode layer, which are parallel to each other and have a gap therebetween, form an induction capacitor. The housing is disposed over the MEMS chip or the surface of the substrate creating a cavity with the MEMS chip or the substrate. In addition, a method for fabricating the above MEMS acoustic transducer is also provided.

Abstract translation: 提供了一种MEMS声换能器，其包括基板，MEMS芯片和壳体。 衬底具有设置在衬底的表面上的第一开口区域和下部电极层，其中第一开口区域包括允许声压进入MEMS声学换能器的至少一个孔。 MEMS芯片设置在基板的表面上，包括第二开口区域和部分地密封第二开口区域的上电极层，其中上电极层和下电极层彼此平行并且具有间隙 之间形成感应电容器。 壳体设置在MEMS芯片或衬底的表面上，从而产生具有MEMS芯片或衬底的空腔。 此外，还提供了一种用于制造上述MEMS声换能器的方法。

公开(公告)号：US11131340B2

公开(公告)日：2021-09-28

申请号：US16870439

申请日：2020-05-08

Applicant: Industrial Technology Research Institute

Inventor： Chien-Nan Yeh ,  Chung-Yuan Su ,  Chao-Ta Huang

IPC: F16C29/06 ,  F16C41/00 ,  G01B7/16

Abstract: A linear guideway with an embedded sensor includes a track, a slider, a plurality of rolling members, and a sensing module. The track extends in a first direction and has a first recess. The slider can move in the first direction and include a second recess, a channel, at least one hole, and a deforming region. The channel is formed by coupling the first recess and the second recess, and extends in the first direction. The hole extends from the surface of the slider along the insertion axis and into the slider. The rolling members are disposed in the channel. The sensing module is disposed in the hole, and contacts the deforming region to detect the amount of deformation.

公开(公告)号：US10703625B1

公开(公告)日：2020-07-07

申请号：US16369542

申请日：2019-03-29

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chien-Nan Yeh ,  Yu-Wen Hsu ,  Chao-Ta Huang

IPC: H01L29/84 ,  B81B3/00

Abstract: A MEMS apparatus with adjustable spring includes a central portion, a peripheral portion and at least one spring. The peripheral portion surrounds the central portion and is spaced apart from the central portion. The spring includes a peripheral section, an outward extension section and a central section. The peripheral section is connected to the outward extension section. An amount of thermal expansion per unit temperature change of the outward extension section is greater than that of the peripheral section or greater than that of the central section.

公开(公告)号：US20200025281A1

公开(公告)日：2020-01-23

申请号：US16221615

申请日：2018-12-17

Applicant: Industrial Technology Research Institute

Inventor： Chih-Yuan Chen ,  Chung-Yuan Su ,  Chien-Nan Yeh ,  Chao-Ta Huang ,  Yu-Wen Hsu

IPC: F16H57/01 ,  F16H25/22

Abstract: A ball screw with force sensor in radial direction including a screw rod, a screw nut, a plurality of balls, and a force sensor is provided. The screw nut has a cavity. The cavity is extended along a radial direction from an outer surface of the screw nut. The force sensor is disposed in the cavity of the screw nut, and the force sensor includes a stationary base and an elastic component. The stationary base includes a displacement restraint, and the elastic component includes a contact end and a fixed end. The displacement restraint is coupled to the cavity to prevent the stationary base from being displaced in the radial direction for fixing stationary base firmly in the cavity. The fixed end is connected to the stationary base, and the contact end contacts a bottom surface of the cavity in order to sense a force along the radial direction.