公开(公告)号：US10243668B2

公开(公告)日：2019-03-26

申请号：US15395344

申请日：2016-12-30

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chien-Wen Chen ,  Fu-Cheng Yang ,  Pei-Wen Yen ,  Shu-Ping Dong

IPC: H04B10/60 ,  G01D5/347 ,  G02B5/18 ,  H04L7/00

Abstract: A positioning measurement device is provided. The device includes a light source, a grating, and plural light sensors. A periodic light field is generated by light emitted by the light source and passes through the grating to. The plural light sensors are periodically spaced. The light sensors are used to sense the periodic light field for generating a plurality of positioning measurement signals.

公开(公告)号：US09360436B2

公开(公告)日：2016-06-07

申请号：US14079568

申请日：2013-11-13

Applicant: Industrial Technology Research Institute

Inventor： Yi-Chen Hsieh ,  Chih-Jung Chiang ,  Fu-Cheng Yang

IPC: G01N21/88 ,  G01N21/21 ,  G02B5/30 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/8848 ,  G02B5/3066

Abstract: The disclosure provides an inspection device including a light source module, an image receiving module and a processing unit. The light source module emits a first incident light and a second incident light to a device under test (DUT). The image receiving module receives a first image corresponding to the DUT irradiated by the first incident light, and receives a second image corresponding to the DUT irradiated by the second incident light. The processing unit calculates the contrast ratio of the first image and the second image to obtain a high-contrast image for inspection.

Abstract translation: 本发明提供一种包括光源模块，图像接收模块和处理单元的检查装置。 光源模块向待测器件（DUT）发射第一入射光和第二入射光。 图像接收模块接收与由第一入射光照射的DUT对应的第一图像，并且接收与由第二入射光照射的DUT对应的第二图像。 处理单元计算第一图像和第二图像的对比度，以获得用于检查的高对比度图像。

公开(公告)号：US09857314B1

公开(公告)日：2018-01-02

申请号：US15392713

申请日：2016-12-28

Applicant: Industrial Technology Research Institute

Inventor： Fu-Cheng Yang ,  Chia-Liang Yeh ,  Wei-Hsiung Tsai ,  Keng-Li Lin ,  Yeou-Sung Lin ,  Mao-Sheng Huang

IPC: G01J3/00 ,  G01N21/958 ,  G01N21/47 ,  G01N21/95

CPC classification number: G01N21/958 ,  G01N21/4788 ,  G01N2021/9513

Abstract: A device and method for detecting crystal quality of a low temperature poly-silicon (LTPS) backplane are provided, the method including: projecting narrowband light to the LTPS backplane; performing image capturing of each position on a surface of the LTPS backplane at a first angle in a first axial direction to obtain a first diffraction image, the first angle being an angle of maximum diffraction light intensity in the first axial direction; performing another image capturing of each position on the surface of the LTPS backplane at a second angle in a second axial direction to obtain a second diffraction image, the second angle being an angle of maximum diffraction light intensity in the second axial direction; and determining the crystal quality of the LTPS backplane based on a diffraction light intensity distribution obtained from the first and second diffraction images.

公开(公告)号：US08982346B2

公开(公告)日：2015-03-17

申请号：US13784947

申请日：2013-03-05

Applicant: Industrial Technology Research Institute

Inventor： Chih-Shang Liu ,  Fu-Cheng Yang

IPC: G01J4/00 ,  G01B9/00 ,  A61B5/145 ,  A61B5/1455 ,  G01N21/21 ,  G01J4/04 ,  A61B5/00 ,  A61B3/10

CPC classification number: G01B9/00 ,  A61B3/10 ,  A61B5/14532 ,  A61B5/14558 ,  A61B5/6821 ,  G01J4/04 ,  G01N21/21

Abstract: A system for measuring the rotation angle of optical active substances has a light source, a polarization generation unit; a polarization analyzing unit; a signal generating unit, respectively and electrically coupled to the polarization generation unit and the polarization analyzing unit; a signal processing unit, electrically coupled to the electric signal generating unit; wherein the light source is enabled to emit a beam toward the polarization generation unit for enabling the beam to be polarized into an incident polarized beam while being projected and traveled in an optical path passing through an optical active substance so as to be converted into a emerging beam; and the polarization analyzing unit is positioned to receive and analyze the emerging beam so as to generate a signal to be received and processed by the signal processing unit.

Abstract translation: 用于测量光学活性物质的旋转角度的系统具有光源，极化发生单元; 极化分析单元; 信号产生单元，分别电耦合到偏振产生单元和偏振分析单元; 信号处理单元，电耦合到所述电信号产生单元; 其中所述光源能够向所述偏振产生单元发射光束，以使得所述光束能够在通过光学活性物质的光路中被投影和行进时被偏振成入射偏振光束，以便被转换为新兴的 光束; 并且偏振分析单元被定位成接收和分析出射的光束，以便产生要由信号处理单元接收和处理的信号。

公开(公告)号：US20140168417A1

公开(公告)日：2014-06-19

申请号：US14079568

申请日：2013-11-13

Applicant: Industrial Technology Research Institute

Inventor： Yi-Chen Hsieh ,  Chih-Jung Chiang ,  Fu-Cheng Yang

IPC: G01N21/88 ,  G02B5/30

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/8848 ,  G02B5/3066

Abstract: The disclosure provides an inspection device including a light source module, an image receiving module and a processing unit. The light source module emits a first incident light and a second incident light to a device under test (DUT). The image receiving module receives a first image corresponding to the DUT irradiated by the first incident light, and receives a second image corresponding to the DUT irradiated by the second incident light. The processing unit calculates the contrast ratio of the first image and the second image to obtain a high-contrast image for inspection.

Abstract translation: 本发明提供一种包括光源模块，图像接收模块和处理单元的检查装置。 光源模块向待测器件（DUT）发射第一入射光和第二入射光。 图像接收模块接收与由第一入射光照射的DUT对应的第一图像，并且接收与由第二入射光照射的DUT对应的第二图像。 处理单元计算第一图像和第二图像的对比度，以获得用于检查的高对比度图像。

公开(公告)号：US11248903B2

公开(公告)日：2022-02-15

申请号：US16717425

申请日：2019-12-17

Applicant: Industrial Technology Research Institute

Inventor： Chia-Hung Cho ,  Po-Yi Chang ,  Yi-Sha Ku ,  Kai-Ping Chuang ,  Chih-Hsiang Liu ,  Fu-Cheng Yang

IPC: G01B11/25 ,  G06K9/32 ,  G06T7/521

Abstract: A three-dimension measurement device includes a moving device, a projecting device, a surface-type image-capturing device and a processing device. The moving device carries an object, and moves the object to a plurality of positions. The projecting device generates a first light to the object. The surface-type image-capturing device senses a second light generated by the object in response to the first light to generate a phase image on each of the positions. The processing device is coupled to the surface-type image-capturing device and receives the phase images. The processing device performs a region-of-interest (ROI) operation for the phase images to generate a plurality of ROI images. The processing device performs a multi-step phase-shifting operation for the ROI images to calculate the surface height distribution of the object.

公开(公告)号：US20170314972A1

公开(公告)日：2017-11-02

申请号：US15395344

申请日：2016-12-30

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chien-Wen Chen ,  Fu-Cheng Yang ,  Pei-Wen Yen ,  Shu-Ping Dong

IPC: G01D5/347 ,  G02B5/18

CPC classification number: H04B10/60 ,  G01D5/34746 ,  G01D5/34792 ,  G02B5/1861 ,  H04L7/0075 ,  H04L7/0079

Abstract: A positioning measurement device is provided. The device includes a light source, a grating, and plural light sensors. A periodic light field is generated by light emitted by the light source and passes through the grating to. The plural light sensors are periodically spaced. The light sensors are used to sense the periodic light field for generating a plurality of positioning measurement signals.