公开(公告)号：US09842722B2

公开(公告)日：2017-12-12

申请号：US14964586

申请日：2015-12-10

Applicant: Industrial Technology Research Institute

Inventor： Hsin-Hung Lee ,  Cheng-Yu Lee ,  Chun-Lin Chiang ,  Kun-Chih Tsai ,  Win-Ti Lin

IPC: H01J37/18 ,  H01J37/20 ,  H01J37/28 ,  G01N35/10

CPC classification number: H01J37/20 ,  G01N35/1095 ,  H01J37/28 ,  H01J2237/18 ,  H01J2237/2004 ,  H01J2237/2065

Abstract: An electronic microscope includes a carrier, a first driving unit, a flow-buffer unit and an electron source. The carrier carries a sample. The first driving unit drives a first fluid to flow along a first flow path, wherein the first flow path passes through the sample. The flow-buffer unit is disposed on the first flow path to perform buffering on the first fluid, wherein the first fluid flows through the flow-buffer unit and the carrier in sequence. The electron source provides an electron beam to the sample.

公开(公告)号：US20160172152A1

公开(公告)日：2016-06-16

申请号：US14964586

申请日：2015-12-10

Applicant: Industrial Technology Research Institute

Inventor： Hsin-Hung Lee ,  Cheng-Yu Lee ,  Chun-Lin Chiang ,  Kun-Chih Tsai ,  Win-Ti Lin

IPC: H01J37/18 ,  H01J37/244 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/20 ,  G01N35/1095 ,  H01J37/28 ,  H01J2237/18 ,  H01J2237/2004 ,  H01J2237/2065

Abstract: An electronic microscope includes a carrier, a first driving unit, a flow-buffer unit and an electron source. The carrier carries a sample. The first driving unit drives a first fluid to flow along a first flow path, wherein the first flow path passes through the sample. The flow-buffer unit is disposed on the first flow path to perform buffering on the first fluid, wherein the first fluid flows through the flow-buffer unit and the carrier in sequence. The electron source provides an electron beam to the sample.

Abstract translation: 电子显微镜包括载体，第一驱动单元，流动缓冲单元和电子源。 载体携带样品。 第一驱动单元驱动第一流体沿着第一流动路径流动，其中第一流动路径通过样品。 流缓冲单元设置在第一流路上以对第一流体进行缓冲，其中第一流体依次流过流缓冲单元和载体。 电子源向样品提供电子束。