公开(公告)号：US20040053431A1

公开(公告)日：2004-03-18

申请号：US10459032

申请日：2003-06-11

Applicant: Industrial Technology Research Institute

Inventor： Chich Shang Chang ,  Wen-Tung Wang ,  Yuan-Tung Dai ,  Chiung-Wei Lin ,  Chi-Lin Chen ,  Tsung-Neng Liao ,  Chi-Shen Lee

IPC: H01L021/00 ,  H01L021/84

CPC classification number: H01L27/1262 ,  H01L27/1214 ,  H01L27/1218 ,  H01L29/78603

Abstract: A method of forming a flexible thin film transistor (TFT) display device. A metal foil serving as a flexible metal substrate of a display device is provided, wherein the metal foil is an aluminum alloy foil, a titanium foil or a titanium alloy foil. The thickness of the metal foil is 0.05null0.8 mm. An insulation layer is formed on the flexible metal substrate. A thin film transistor (TFT) array is formed on the insulation layer. In addition, the aluminum alloy foil can include magnesium of 0.01null1% wt and/or silicon of 0.01null1% wt and the titanium alloy foil can include aluminum of 0.01null20% wt and/or molybdenum of 0.01null20% wt.

Abstract translation: 一种形成柔性薄膜晶体管（TFT）显示装置的方法。 提供了用作显示装置的柔性金属基板的金属箔，其中金属箔是铝合金箔，钛箔或钛合金箔。 金属箔的厚度为0.05〜0.8mm。 在柔性金属基板上形成绝缘层。 在绝缘层上形成薄膜晶体管（TFT）阵列。 此外，铝合金箔可以含有0.01〜1重量％的镁和/或0.01〜1重量％的硅，钛合金箔可以含有0.01〜20重量％的铝和/或0.01〜20重量％的钼 。