METHODS OF ENVIRONMENTAL PROTECTION FOR SILICON MEMS STRUCTURES IN CAVITY PACKAGES

    公开(公告)号:US20220369042A1

    公开(公告)日:2022-11-17

    申请号:US17660239

    申请日:2022-04-22

    Abstract: A sound transducer device includes a multilayer component board having a first side and an opposite second side, and a sound port extending between the first and second sides of the multilayer component board. The sound transducer also includes a MEMS sound transducer die including a suspended membrane structure, wherein the MEMS sound transducer die is arranged at the first side of the multilayer component board such that the suspended membrane structure is in fluid communication with the sound port. The sound transducer also includes a mesh structure for providing an environmental barrier, the mesh structure covering the sound port from either one of the first and second sides of the multilayer component board.

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