公开(公告)号：US20030118277A1

公开(公告)日：2003-06-26

申请号：US10273628

申请日：2002-10-18

Applicant: Input/Output, Inc.

Inventor： Duli Yu ,  Arjun Selvakumar ,  Howard Goldberg ,  Taechung Yi

IPC: G02B006/26 ,  G02B006/42

CPC classification number: G02B26/0841 ,  B81B2201/047 ,  B81C1/00182 ,  B81C2201/019 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/357 ,  G02B2006/12104 ,  Y10S359/904

Abstract: The present invention provides a digital optical switch apparatus and process for manufacturing the apparatus. The apparatus includes a mirror assembly coupled to a top cap and to a bottom cap. The top and bottom caps each include one or more electrodes that, when energized with electrical energy, move a mirrored surface to one of a plurality of discrete positions. Mirror assemblies can be cascaded to create a packaged assembly having any multiple of discrete positions. The process includes planar micro-machining techniques to create isolated islands for electrical feed through. The process enables mechanical bonding of multiple tiers via a single bond region and through a bond-pad window.

Abstract translation: 本发明提供一种数字光开关装置及其制造方法。 该装置包括耦合到顶盖和底盖的反射镜组件。 顶盖和底盖各自包括一个或多个电极，当电能通电时，将镜面移动到多个离散位置中的一个。 镜子组件可以级联以创建具有任何多个离散位置的封装组件。 该过程包括平面微加工技术，以创建用于电子馈送的隔离岛。 该过程使得能够通过单键区域和键合焊盘窗口机械地结合多层。

公开(公告)号：US20020104379A1

公开(公告)日：2002-08-08

申请号：US09867286

申请日：2001-05-29

Applicant: Input/Output, Inc.

Inventor： Robert Ried ,  Arjun Selvakumar ,  Howard Goldberg ,  Martin Schmidt ,  Lianzhong Yu

IPC: G01P015/125

CPC classification number: G01V1/181 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2203/0109 ,  B81B2203/053 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125

Abstract: An accelerometer for measuring seismic data. The accelerometer includes a measurement mass assembly having top and bottom electrodes, a top capacitor electrode, and bottom capacitor electrode. One or more of the electrodes include re-entrant openings formed in the surface of the electrodes.

Abstract translation: 用于测量地震数据的加速度计。 加速度计包括具有顶部和底部电极的测量质量组件，顶部电容器电极和底部电容器电极。 一个或多个电极包括在电极的表面中形成的再入口。