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公开(公告)号:US20240064931A1
公开(公告)日:2024-02-22
申请号:US18499112
申请日:2023-10-31
Applicant: Intel Corporation
Inventor: Jimmy CHUANG , Yuehong FAN , Jing-Hua HE , Sandeep AHUJA , Jay WU , Dongrui XUE , Xiaowei LI
IPC: H05K7/20 , G06F1/20 , H01L23/473
CPC classification number: H05K7/20263 , G06F1/20 , H01L23/473 , H05K7/20236 , H05K7/20254 , H05K7/20763 , H05K7/20272
Abstract: An apparatus is described. The apparatus includes a coolant distribution unit having a first primary loop output to provide first cooled immersion liquid to an immersion chamber and a second primary loop output to provide second cooled immersion liquid to one or more cold plates within the immersion chamber.