公开(公告)号：US11512407B2

公开(公告)日：2022-11-29

申请号：US17617005

申请日：2021-07-12

Applicant: Jiangsu University

Inventor： Zhaoyang Zhang ,  Yucheng Wu ,  Kun Xu ,  Xueren Dai ,  Shuai Yang ,  Sheng Guo ,  Douyan Zhao

IPC: C25D5/18 ,  C25D5/02 ,  C25D13/00 ,  C25D17/12

Abstract: The present invention discloses a method and a device for laser-assisted electrochemical composite deposition using a rifling-type hollow rotating electrode, which relate to the field of micro-composite processing in special processing technologies. A center of a laser beam is allowed to pass through a rifling-type hollow rotating electrode and focus onto a cathode substrate. When the rifling-type hollow rotating electrode is rotated at a constant speed, an electrodeposition solution rotates in the rifling-type hollow rotating electrode and generates a certain centripetal force to improve the precision and localization of deposition. During the process of the present invention, an internal rifling structure of the electrode is rotated at a high speed so that the deposition solution generates a centripetal force. The internal rifling structure and an external helical structure of the rifling-type hollow rotating electrode make the deposition solution move upward to form a “self-circulation” system.

公开(公告)号：US11295953B2

公开(公告)日：2022-04-05

申请号：US17257328

申请日：2019-02-28

Applicant: JIANGSU UNIVERSITY

Inventor： Hao Zhu ,  Zhi Zhang ,  Senshan Mao ,  Shuaijie Zhu ,  Zhaoyang Zhang ,  Kun Xu ,  Anbin Wang ,  Douyan Zhao

IPC: H01L21/268 ,  C23C18/12 ,  C23C14/08

Abstract: An apparatus for micromachining a semiconductor material from opposing sides through synchronous coordination of laser and electrochemistry includes an optical path system, a stable low-pressure jet generation system, and an electrolytic machining system. The optical path system includes a laser generator, a beam expander, a reflector, a galvanometer, and a lens. The electrolytic machining system includes a direct-current pulsed power supply, an adjustable cathode fixture, an electrolyte tank, a current probe, and an oscilloscope. The stable low-pressure jet generation system provides an electrolyte flow into a metal needle. The electrolyte flow forms an electrolyte layer between a semiconductor material and a cathode copper plate, such that the cathode and the anode are in electrical contact with each other. In a method employing the apparatus, a laser beam is irradiated onto the semiconductor material to form a local high-temperature region, which leads to a localized increase in electrical conductivity.