公开(公告)号：US20130040448A1

公开(公告)日：2013-02-14

申请号：US13570812

申请日：2012-08-09

申请人： Joo-Hyung Yang ,  Yool Kang ,  Hyung-Rae Lee ,  Kyu-Sik Shin ,  Jae-ho Kim ,  Dong-Jun Lee

发明人： Joo-Hyung Yang ,  Yool Kang ,  Hyung-Rae Lee ,  Kyu-Sik Shin ,  Jae-ho Kim ,  Dong-Jun Lee

IPC分类号： H01L21/312 ,  H01L21/336

CPC分类号： H01L21/28123 ,  H01L21/0273 ,  H01L21/32139 ,  H01L21/76838

摘要： In a method of forming a metal or metal nitride pattern, a metal or metal nitride layer is formed on a substrate, and a photoresist pattern is formed on the metal or metal nitride layer. An over-coating composition is coated on the metal or metal nitride layer and on the photoresist pattern to form a capping layer on the photoresist pattern. The over-coating composition includes a polymer having amine groups as a side chain or a branch and a solvent. A remaining portion of the over-coating composition is removed by washing with a hydrophilic solution. The metal or metal nitride layer is partially removed using the capping layer and the photoresist pattern as an etching mask.

摘要翻译： 在形成金属或金属氮化物图形的方法中，在基板上形成金属或金属氮化物层，并且在金属或金属氮化物层上形成光刻胶图案。 在金属或金属氮化物层和光致抗蚀剂图案上涂覆过涂层组合物以在光致抗蚀剂图案上形成覆盖层。 该覆盖组合物包括具有侧基或分支和溶剂的胺基的聚合物。 通过用亲水溶液洗涤除去剩余部分的外涂层组合物。 使用覆盖层和光致抗蚀剂图案作为蚀刻掩模来部分去除金属或金属氮化物层。

公开(公告)号：US08754453B2

公开(公告)日：2014-06-17

申请号：US13814304

申请日：2011-07-21

申请人： Hak-In Hwang ,  Dae-Sung Lee ,  Kyu-Sik Shin

发明人： Hak-In Hwang ,  Dae-Sung Lee ,  Kyu-Sik Shin

IPC分类号： H01L21/48

CPC分类号： G01L9/12 ,  G01L9/0042 ,  G01L9/0073 ,  G01L19/0076 ,  H01L29/66007 ,  H01L29/84

摘要： The capacitive pressure sensor comprises: a substrate functioning as a lower electrode; a first insulating film formed on the substrate; a cavity formed on the first insulating film; a second insulating film formed on the first insulating film to have openings communicated with the cavity and to cover the cavity; a sealing film formed of a conductive material to seal the openings and to extend partially into the cavity through the openings; and an upper electrode formed on the second insulating film to be electrically separated from the sealing film and to overlap the cavity.

摘要翻译： 电容式压力传感器包括：用作下电极的基板; 形成在所述基板上的第一绝缘膜; 形成在所述第一绝缘膜上的空腔; 第二绝缘膜，形成在所述第一绝缘膜上，以具有与所述空腔连通并覆盖所述空腔的开口; 由导电材料形成的密封膜，以密封开口并通过开口部分地延伸到空腔中; 以及形成在所述第二绝缘膜上以与所述密封膜电分离并与所述腔重叠的上电极。

公开(公告)号：US20130126994A1

公开(公告)日：2013-05-23

申请号：US13814304

申请日：2011-07-21

申请人： Hak-In Hwang ,  Dae-Sung Lee ,  Kyu-Sik Shin

发明人： Hak-In Hwang ,  Dae-Sung Lee ,  Kyu-Sik Shin

IPC分类号： G01L9/12 ,  H01L29/66 ,  H01L29/84

CPC分类号： G01L9/12 ,  G01L9/0042 ,  G01L9/0073 ,  G01L19/0076 ,  H01L29/66007 ,  H01L29/84

摘要： The capacitive pressure sensor comprises: a substrate functioning as a lower electrode; a first insulating film formed on the substrate; a cavity formed on the first insulating film; a second insulating film formed on the first insulating film to have openings communicated with the cavity and to cover the cavity; a sealing film formed of a conductive material to seal the openings and to extend partially into the cavity through the openings; and an upper electrode formed on the second insulating film to be electrically separated from the sealing film and to overlap the cavity.

摘要翻译： 电容式压力传感器包括：用作下电极的基板; 形成在所述基板上的第一绝缘膜; 形成在所述第一绝缘膜上的空腔; 第二绝缘膜，形成在所述第一绝缘膜上，以具有与所述空腔连通并覆盖所述空腔的开口; 由导电材料形成的密封膜，以密封开口并通过开口部分地延伸到空腔中; 以及形成在所述第二绝缘膜上以与所述密封膜电分离并与所述腔重叠的上电极。