LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
    2.
    发明申请
    LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD 审中-公开
    激光加工设备和激光加工方法

    公开(公告)号:US20160138127A1

    公开(公告)日:2016-05-19

    申请号:US14940474

    申请日:2015-11-13

    摘要: One embodiment of the laser processing apparatus is for surface treatment by supplying liquid to a surface of the target member and irradiating pulsed laser light to the surface of the target member via the liquid. The apparatus includes a laser oscillator and a liquid supply. The laser oscillator irradiates the laser light to the surface through the liquid via an optical window. The liquid supply is configured to supply the liquid to the surface of the target member via a flow path passing on an outer surface of the optical window. When the liquid is in contact with a laser light emission surface of the optical window, the laser light emission surface transmits the laser light. When the liquid is not in contact with the laser light emission surface, the laser light emission surface reflects the laser light.

    摘要翻译: 激光加工装置的一个实施例是通过向目标构件的表面供应液体并经由液体将脉冲激光照射到目标构件的表面来进行表面处理。 该装置包括激光振荡器和液体供应。 激光振荡器通过光学窗口通过液体将激光照射到表面。 液体供应构造成经由在光学窗口的外表面上通过的流路将液体供应到目标构件的表面。 当液体与光学窗口的激光发射表面接触时,激光发射表面透射激光。 当液体不与激光发射表面接触时,激光发射表面反射激光。