Abstract:
A showerhead is provided. The showerhead includes a body and a plurality of first dispersion pins. The body has one side having a plurality of injection holes penetrated therethrough and the other side facing the one side. The plurality of first dispersion pins protruding from the plurality of spray holes of the one side to the other side such that end portions thereof support the other side. The first dispersion holes have first gas inlet holes on one side and first passages connected to the first gas inlet holes therein. Gas introduced between the one side and the other side is immediately discharged to the outside of the body through the plurality of spray holes by passing the first gas inlet holes and the first passages.