公开(公告)号：US11226367B2

公开(公告)日：2022-01-18

申请号：US16652174

申请日：2018-08-21

Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY

Inventor： Kyung Tae Nam ,  Sang Moo Lee ,  Seung Joon Lee ,  Kwang Hee Lee ,  Sung Won Choo

IPC: G01R31/28 ,  G01R1/04 ,  G01R1/067 ,  G01R1/073

Abstract: The present invention relates to a substrate testing cartridge provided for simultaneously testing multiple substrates for which a substrate treatment process has been finished, and a method for manufacturing same. According to an embodiment of the present invention, a substrate testing cartridge comprises: a chuck member on which a substrate is placed; a probe card which contacts and tests the substrate and is positioned to face the chuck member with reference to the substrate; and coupling members which couple the substrate, the chuck member, and the probe card, wherein each coupling member comprises: a substrate coupling part which couples the substrate and the chuck member; and a chuck coupling part which couples the probe card and the chuck member.