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公开(公告)号：US11686762B2
公开(公告)日：2023-06-27
申请号：US17297657
申请日：2019-11-25
发明人： Kyung Tae Nam , Seung Joon Lee , Kwang Hee Lee
CPC分类号： G01R31/2865 , G01R1/07307
摘要： A multi-prober chuck assembly and channel are provided. The multi-prober chuck assembly, according to one embodiment of the present invention, comprises: a chuck for supporting a wafer; a probe card structure coupled to the top part of the chuck; a heater for heating the chuck under the chuck; a conductive guard plate spaced apart from the heater below the heater; and a body part positioned under the chuck so that the heater and the guard plate are positioned inside the body part, wherein the probe card structure and the body part are coupled mechanically to form a cartridge-type structure.
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公开(公告)号：US11226367B2
公开(公告)日：2022-01-18
申请号：US16652174
申请日：2018-08-21
发明人： Kyung Tae Nam , Sang Moo Lee , Seung Joon Lee , Kwang Hee Lee , Sung Won Choo
摘要： The present invention relates to a substrate testing cartridge provided for simultaneously testing multiple substrates for which a substrate treatment process has been finished, and a method for manufacturing same. According to an embodiment of the present invention, a substrate testing cartridge comprises: a chuck member on which a substrate is placed; a probe card which contacts and tests the substrate and is positioned to face the chuck member with reference to the substrate; and coupling members which couple the substrate, the chuck member, and the probe card, wherein each coupling member comprises: a substrate coupling part which couples the substrate and the chuck member; and a chuck coupling part which couples the probe card and the chuck member.
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