- 专利标题: Substrate testing cartridge and method for manufacturing same
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申请号: US16652174申请日: 2018-08-21
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公开(公告)号: US11226367B2公开(公告)日: 2022-01-18
- 发明人: Kyung Tae Nam , Sang Moo Lee , Seung Joon Lee , Kwang Hee Lee , Sung Won Choo
- 申请人: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
- 申请人地址: KR Cheonan-si
- 专利权人: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
- 当前专利权人: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
- 当前专利权人地址: KR Cheonan-si
- 代理机构: Cantor Colburn LLP
- 优先权: KR10-2017-0126318 20170928
- 国际申请: PCT/KR2018/009595 WO 20180821
- 国际公布: WO2019/066256 WO 20190404
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R1/04 ; G01R1/067 ; G01R1/073
摘要:
The present invention relates to a substrate testing cartridge provided for simultaneously testing multiple substrates for which a substrate treatment process has been finished, and a method for manufacturing same. According to an embodiment of the present invention, a substrate testing cartridge comprises: a chuck member on which a substrate is placed; a probe card which contacts and tests the substrate and is positioned to face the chuck member with reference to the substrate; and coupling members which couple the substrate, the chuck member, and the probe card, wherein each coupling member comprises: a substrate coupling part which couples the substrate and the chuck member; and a chuck coupling part which couples the probe card and the chuck member.
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