公开(公告)号：US20150072482A1

公开(公告)日：2015-03-12

申请号：US14259674

申请日：2014-04-23

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Jung Ah LIM ,  Yong-Won SONG ,  Jae-Min HONG ,  Won-Kook CHOI ,  Dae Seong EOM

IPC: H01L29/16 ,  H01L21/02 ,  H01L29/66

CPC classification number: H01L29/1606 ,  C01B32/184 ,  C01B32/23 ,  H01L21/02527 ,  H01L21/02628 ,  H01L27/1292 ,  H01L29/0692 ,  H01L29/45 ,  H01L29/4908 ,  H01L29/66045 ,  H01L29/66742 ,  H01L29/66969 ,  H01L29/778 ,  H01L29/78684

Abstract: A method of manufacturing a thin-film transistor is provided, including preparing ink including a solution in which a graphene oxide, a reduced graphene oxide, or a combination thereof is dispersed, forming the ink on a substrate in the form of a pattern, and forming a source electrode and a drain electrode that are positioned at edges of the pattern and a semiconductor channel positioned between the electrodes by a coffee-ring effect in the ink by using the graphene oxide, the reduced graphene oxide, or the combination thereof within the formed pattern.

Abstract translation: 提供一种制造薄膜晶体管的方法，包括制备包括其中分散有氧化石墨烯，氧化还原石墨烯或其组合的溶液的油墨，以图案的形式在基材上形成油墨，以及 通过使用氧化石墨烯，还原型氧化石墨烯或它们的组合，在油墨中形成定位在图案边缘处的源电极和漏电极以及通过咖啡环效应位于电极之间的半导体通道 形成图案。