NANOGAP-BASED HYDROGEN SENSOR AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20250003912A1

    公开(公告)日:2025-01-02

    申请号:US18746488

    申请日:2024-06-18

    Abstract: The object of the present invention is to provide a nanogap-based hydrogen sensor in which a nanogap is formed on a substrate and a trace amount of hydrogen gas leakage can be detected in a non-contact manner using the nanogap, and a method of manufacturing the same. In order to achieve the above object, the present invention is characterized by including: a metamaterial manufactured by forming a metal nanoslot pattern on a wafer; a catalyst layer deposited on the surface of the metamaterial to form a nanogap inside the metal nanoslot; and a protective layer formed on the catalyst layer to protect the catalyst layer.

    HIGH EFFICIENCY AND HIGH SENSITIVITY PARTICLE CAPTURE TYPE TERAHERTZ SENSING SYSTEM

    公开(公告)号:US20210389228A1

    公开(公告)日:2021-12-16

    申请号:US17138919

    申请日:2020-12-31

    Abstract: Provided is a high efficiency and high sensitivity particle capture type terahertz sensing system. The particle capture type terahertz sensing system includes a sensing substrate to capture particles, and a terahertz sensor to emit terahertz electromagnetic waves to the sensing substrate to sense the particles, wherein the sensing substrate includes a base substrate and a particle capture structure layer formed on the base substrate, the particle capture structure layer includes a plurality of slits for focusing the terahertz electromagnetic waves, the particle capture structure layer captures the particles in the plurality of slits using dielectrophoresis, and an area in which the terahertz electromagnetic waves converge to the plurality of slits matches an area in which the particles are captured in the plurality of slits through the dielectrophoresis.

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