公开(公告)号：US08018677B1

公开(公告)日：2011-09-13

申请号：US11923043

申请日：2007-10-24

申请人： Ki Sup Chung ,  Kyusik Sin ,  Danning Yang ,  Yingjian Chen ,  Brant Nease

发明人： Ki Sup Chung ,  Kyusik Sin ,  Danning Yang ,  Yingjian Chen ,  Brant Nease

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for manufacturing a pole for a magnetic recording head. The method and system include providing an insulator and fabricating at least one hard mask on the insulator. The at least one hard mask has an aperture therein. The method and system also include removing a portion of the insulator to form a trench within the insulator. The trench is formed under the aperture. The method and system further include depositing at least one ferromagnetic material. The pole includes a portion of the ferromagnetic material within the trench.

摘要翻译： 一种用于制造用于磁记录头的磁极的方法和系统。 该方法和系统包括提供绝缘体并在绝缘体上制造至少一个硬掩模。 至少一个硬掩模在其中具有孔。 该方法和系统还包括去除绝缘体的一部分以在绝缘体内形成沟槽。 沟槽形成在孔下面。 所述方法和系统还包括沉积至少一种铁磁材料。 极包括沟槽内的铁磁材料的一部分。

公开(公告)号：US07444740B1

公开(公告)日：2008-11-04

申请号：US11047401

申请日：2005-01-31

申请人： Ki Sup Chung ,  Kyusik Sin ,  Danning Yang ,  Yingjian Chen ,  Brant Nease

发明人： Ki Sup Chung ,  Kyusik Sin ,  Danning Yang ,  Yingjian Chen ,  Brant Nease

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for manufacturing a pole for a magnetic recording head. The method and system include providing an insulator and fabricating at least one hard mask on the insulator. The at least one hard mask has an aperture therein. The method and system also include removing a portion of the insulator to form a trench within the insulator. The trench is formed under the aperture. The method and system further include depositing at least one ferromagnetic material. The pole includes a portion of the ferromagnetic material within the trench.

摘要翻译： 一种用于制造用于磁记录头的磁极的方法和系统。 该方法和系统包括提供绝缘体并在绝缘体上制造至少一个硬掩模。 至少一个硬掩模在其中具有孔。 该方法和系统还包括去除绝缘体的一部分以在绝缘体内形成沟槽。 沟槽形成在孔下面。 所述方法和系统还包括沉积至少一种铁磁材料。 极包括沟槽内的铁磁材料的一部分。

公开(公告)号：US08149536B1

公开(公告)日：2012-04-03

申请号：US11871672

申请日：2007-10-12

申请人： Danning Yang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

发明人： Danning Yang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3169 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for manufacturing a perpendicular magnetic recording head is disclosed. The method and system include providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein and forming a perpendicular magnetic recording pole within the aperture. The CMP uniformity structure may include a CMP barrier layer. The method and system further include fabricating an insulator after formation of the perpendicular magnetic recording pole and performing a CMP to remove a portion of the insulator, expose a portion of the perpendicular magnetic recording pole and planarize an exposed surface of the perpendicular magnetic recording head.

摘要翻译： 公开了用于制造垂直磁记录头的方法和系统。 该方法和系统包括提供其中具有孔的化学机械平面化（CMP）均匀性结构，并在孔内形成垂直的磁记录极。 CMP均匀性结构可以包括CMP阻挡层。 所述方法和系统还包括在形成垂直磁记录极之后制造绝缘体，并执行CMP以去除绝缘体的一部分，暴露垂直磁记录极的一部分并平面化垂直磁记录头的暴露表面。

公开(公告)号：US08424192B1

公开(公告)日：2013-04-23

申请号：US11199281

申请日：2005-08-08

申请人： Danning Yang ,  Lei Wang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

发明人： Danning Yang ,  Lei Wang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3169 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for manufacturing a pole on a recording head is disclosed. The method and system include sputtering at least one ferromagnetic layer and fabricating a hard mask on the ferromagnetic layer. The method and system also include defining the pole and depositing a write gap on the pole. A portion of the pole is encapsulated in an insulator.

摘要翻译： 公开了一种在记录头上制造磁极的方法和系统。 该方法和系统包括溅射至少一个铁磁层并在铁磁层上制造硬掩模。 该方法和系统还包括限定极点并在极上沉积写入间隙。 极的一部分被封装在绝缘体中。

公开(公告)号：US07296339B1

公开(公告)日：2007-11-20

申请号：US10936921

申请日：2004-09-08

申请人： Danning Yang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

发明人： Danning Yang ,  Yingjian Chen ,  Brant Nease ,  Kyusik Sin

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3169 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for manufacturing a perpendicular magnetic recording head is disclosed. The method and system include providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein and forming a perpendicular magnetic recording pole within the aperture. The CMP uniformity structure may include a CMP barrier layer. The method and system further include fabricating an insulator after formation of the perpendicular magnetic recording pole and performing a CMP to remove a portion of the insulator, expose a portion of the perpendicular magnetic recording pole and planarize an exposed surface of the perpendicular magnetic recording head.

摘要翻译： 公开了用于制造垂直磁记录头的方法和系统。 该方法和系统包括提供其中具有孔的化学机械平面化（CMP）均匀性结构，并在孔内形成垂直的磁记录极。 CMP均匀性结构可以包括CMP阻挡层。 所述方法和系统还包括在形成垂直磁记录极之后制造绝缘体，并执行CMP以去除绝缘体的一部分，暴露垂直磁记录极的一部分并平面化垂直磁记录头的暴露表面。

公开(公告)号：US07419891B1

公开(公告)日：2008-09-02

申请号：US11352652

申请日：2006-02-13

申请人： Benjamin Chen ,  Hongping Yuan ,  Danning Yang ,  Wei Zhang ,  Hugh C. Hiner ,  Lei Wang ,  Yingjian Chen ,  Brant Nease

发明人： Benjamin Chen ,  Hongping Yuan ,  Danning Yang ,  Wei Zhang ,  Hugh C. Hiner ,  Lei Wang ,  Yingjian Chen ,  Brant Nease

IPC分类号： H01L21/20

CPC分类号： H01L43/12 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/3906 ,  G11B5/3909

摘要： The method and system for providing a magnetic element are disclosed. The method and system include providing a magnetic element stack that includes a plurality of layers and depositing a stop layer on the magnetic element stack. The method and system also include providing a dielectric antireflective coating (DARC) layer on the stop layer, forming a single layer mask for defining the magnetic element on a portion of the DARC layer, and removing a remaining portion of the DARC layer not covered by the single layer mask. The portion of the DARC layer covers a portion of the stop layer. The method further includes removing a remaining portion of the stop layer and defining the magnetic element using at least the portion of stop layer as a mask.

摘要翻译： 公开了用于提供磁性元件的方法和系统。 该方法和系统包括提供包括多个层的磁性元件堆叠并在磁性元件堆叠上沉积停止层。 该方法和系统还包括在停止层上提供介电抗反射涂层（DARC）层，形成用于在DARC层的一部分上限定磁性元件的单层掩模，以及去除DARC层未覆盖的DARC层的剩余部分 单层面膜。 DARC层的一部分覆盖停止层的一部分。 该方法还包括使用停止层的至少一部分作为掩模去除停止层的剩余部分并限定磁性元件。

公开(公告)号：US08081403B1

公开(公告)日：2011-12-20

申请号：US12170619

申请日：2008-07-10

申请人： Benjamin Chen ,  Hongping Yuan ,  Danning Yang ,  Wei Zhang ,  Hugh C. Hiner ,  Lei Wang ,  Yingjian Chen ,  Brant Nease

发明人： Benjamin Chen ,  Hongping Yuan ,  Danning Yang ,  Wei Zhang ,  Hugh C. Hiner ,  Lei Wang ,  Yingjian Chen ,  Brant Nease

IPC分类号： G11B5/39

CPC分类号： H01L43/12 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/3906 ,  G11B5/3909

摘要： A magnetic element includes a pinned layer, a nonferromagnetic spacer layer, and a free layer. The nonferromagnetic spacer layer resides between the pinned layer and the free layer. The free layer has a track width of not more than 0.08 micron.

摘要翻译： 磁性元件包括钉扎层，非铁磁隔离层和自由层。 非铁磁间隔层位于被钉扎层和自由层之间。 自由层的轨道宽度不大于0.08微米。

公开(公告)号：US07289303B1

公开(公告)日：2007-10-30

申请号：US09828635

申请日：2001-04-05

申请人： Kyusik Sin ,  Ningjia Zhu ,  Yingjian Chen

发明人： Kyusik Sin ,  Ningjia Zhu ,  Yingjian Chen

IPC分类号： G11B5/39

CPC分类号： G11B5/3932 ,  B82Y25/00 ,  G01R33/093 ,  H01F10/3272 ,  Y10T428/1107 ,  Y10T428/1121 ,  Y10T428/1143

摘要： Magnetoresistive (MR) sensors are disclosed having mechanisms for reducing edge effects such as Barkhausen noise. The sensors include a pinned layer and a free layer with an exchange coupling layer adjoining the free layer, and a ferromagnetic layer having a fixed magnetic moment adjoining the exchange coupling layer. The exchange coupling layer and ferromagnetic layer form a synthetic antiferromagnetic structure with part of the free layer, providing bias that reduces magnetic instabilities at edges of the free layer. Such synthetic antiferromagnetic structures can provide a stronger bias than conventional antiferromagnetic layers, as well as a more exactly defined track width than conventional hard magnetic bias layers. The synthetic antiferromagnetic structures can also provide protection for the free layer during processing, in contrast with the trimming of conventional antiferromagnetic layers that exposes if not removes part of the free layer.

摘要翻译： 公开了具有减小诸如巴克豪森噪声等边缘效应的机构的磁阻（MR）传感器。 传感器包括钉扎层和具有邻接自由层的交换耦合层的自由层，以及具有与交换耦合层邻接的固定磁矩的铁磁层。 交换耦合层和铁磁层形成具有部分自由层的合成反铁磁结构，提供降低自由层边缘的磁性不稳定性的偏压。 这种合成反铁磁结构可以提供比常规反铁磁层更强的偏压，以及比常规硬磁偏置层更精确地定义的轨道宽度。 合成反铁磁性结构也可以在加工过程中为自由层提供保护，与如果不除去部分自由层的常规反铁磁层的修整相反。

公开(公告)号：US08455119B1

公开(公告)日：2013-06-04

申请号：US13118218

申请日：2011-05-27

申请人： Hai Jiang ,  Kyusik Sin ,  Yingjian Chen

发明人： Hai Jiang ,  Kyusik Sin ,  Yingjian Chen

IPC分类号： G11B5/66

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/1278 ,  G11B5/313 ,  G11B5/3967 ,  G11B2005/3996 ,  Y10T428/12465

摘要： A magnetic disk includes a substrate, a soft magnetic underlayer disposed over the substrate, and a media layer disposed over the underlayer. The underlayer includes a plurality of magnetic layers each containing FeCoN having an atomic concentration of iron that is greater than an atomic concentration of cobalt, and has an atomic concentration of nitrogen that is less than the atomic concentration of cobalt. The atomic concentration of nitrogen is less than eight percent. The underlayer includes a plurality of nonmagnetic layers that are interleaved with the magnetic layers. Each of the nonmagnetic layers has a thickness that is less than one-tenth that of an adjoining layer of the magnetic layers. The media layer contains a magnetically hard material having an easy axis of magnetization oriented substantially perpendicular to both the media layer and the underlayer.

摘要翻译： 磁盘包括衬底，设置在衬底上的软磁性底层，以及设置在衬底上的介质层。 底层包括多个磁性层，每个磁性层含有铁原子浓度大于钴的原子浓度的FeCoN，并且其原子浓度小于钴的原子浓度。 原子浓度低于8％。 底层包括与磁性层交错的多个非磁性层。 每个非磁性层的厚度小于磁性层相邻层的十分之一。 介质层包含磁性硬的材料，其易磁化轴定向成基本垂直于介质层和底层。

公开(公告)号：US07968219B1

公开(公告)日：2011-06-28

申请号：US12033991

申请日：2008-02-20

申请人： Hai Jiang ,  Kyusik Sin ,  Yingjian Chen

发明人： Hai Jiang ,  Kyusik Sin ,  Yingjian Chen

IPC分类号： G11B5/66

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/1278 ,  G11B5/313 ,  G11B5/3967 ,  G11B2005/3996 ,  Y10T428/12465

摘要： A magnetic disk includes a substrate, a soft magnetic underlayer disposed over the substrate, and a media layer disposed over the underlayer. The underlayer includes a first plurality of layers each containing NiFe having an atomic concentration of iron that is at least about thirty percent. The underlayer further includes a second plurality of layers that is interleaved with the first plurality of layers. The second plurality of layers each contain FeCoN having an atomic concentration of iron that is greater than an atomic concentration of cobalt, and having an atomic concentration of nitrogen that is less than the atomic concentration of cobalt. The atomic concentration of nitrogen is less than eight percent. The media layer contains a magnetically hard material having an easy axis of magnetization oriented substantially perpendicular to both the media layer and the underlayer.

摘要翻译： 磁盘包括衬底，设置在衬底上的软磁性底层，以及设置在衬底上的介质层。 底层包括第一多个层，每个层含有原子浓度为至少约百分之三十的铁的NiFe。 底层还包括与第一多个层交错的第二多个层。 第二多个层各自含有铁原子浓度大于钴的原子浓度并且氮原子浓度小于钴的原子浓度的FeCoN。 原子浓度低于8％。 介质层包含磁性硬的材料，其易磁化轴定向成基本垂直于介质层和底层。