Isolation valve for single crystal pulling apparatus
    2.
    发明授权
    Isolation valve for single crystal pulling apparatus 失效
    单晶拉拔装置隔离阀

    公开(公告)号:US5356113A

    公开(公告)日:1994-10-18

    申请号:US125187

    申请日:1993-09-23

    CPC分类号: C30B15/00 F16K51/02

    摘要: An isolation valve for a single crystal pulling apparatus providing a good sealing performance is disclosed. The apparatus comprises a casing having two opposite valve seats, a first valve seat having a first opening communicable with the main chamber of the apparatus, a second valve seat having a second opening communicable with the pull chamber of the apparatus. The body of the isolation valve includes a first plate movable in and out of contact with the first valve seat to open and shut the first opening, a second plate movable in and out of contact with the second valve seat to open and shut the second opening, and a bellows connecting the first and second plates. The isolation valve also comprises a holder holding the first plate out of contact with the first valve seat when the first plate is opposite to the first valve seat, a passage communicable with a fluid supply and the interior of the valve body, and a controller controlling the pressure of a working fluid supplied from the fluid supply into the interior of the valve body. The controller has a first set pressure at which the first and second plates are in contact with the first and second valve seats and a second set pressure at which the first and second plates are out of contact with the first and second valve seats.

    摘要翻译: 公开了一种提供良好密封性能的单晶拉制装置的隔离阀。 该装置包括具有两个相对的阀座的壳体,具有可与该装置的主室连通的第一开口的第一阀座,具有可与该装置的拉腔连通的第二开口的第二阀座。 隔离阀的主体包括可与第一阀座接触并与第一阀座接触以打开和关闭第一开口的第一板,与第二阀座可移动和脱离接触的第二板,以打开和关闭第二开口 以及连接第一和第二板的波纹管。 隔离阀还包括保持器,当第一板与第一阀座相对时,保持第一板与第一阀座不接触,可与流体供应和阀体内部通信的通道,以及控制器 从液体供给到阀体内部的工作流体的压力。 控制器具有第一和第二板与第一和第二阀座接触的第一设定压力和第一和第二板与第一和第二阀座不接触的第二设定压力。