公开(公告)号：US6414978B2

公开(公告)日：2002-07-02

申请号：US82629601

申请日：2001-04-03

Applicant: LAMBDA PHYSIK AG

Inventor： BRAGIN IGOR ,  BERGER VADIM ,  STAMM UWE ,  REBHAN ULRICH

IPC: H01S3/032 ,  H01S3/036 ,  H01S3/038 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/22

CPC classification number: H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

Abstract: A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

Abstract translation: 用于准分子或分子氟激光的激光器包括与气体流动容器连接并具有一对主电极和预电离单元的电极室，每个主电极连接到放电电路。 扰流器设置在电极室内，并且被成形为提供通过主电极之间的放电区域的更均匀的气流，以便将一个预电离单元与其中一个主电极隔离，并且反射在放电中产生的声波 区域进入气流容器，用于吸收。 扰流器单元可以在放电区域的任一侧上包括一对相对的扰流器元件。 一个或两个主电极包括基部和可以是从基部突出的接头的中心部分。 中心部分基本上承载周期性放电电流，使得放电宽度可以明显小于基部的宽度。 两个主电极的曲率可以符合通过放电室的气流的曲率，以进一步提高空气动力性能。 多个低电感性导电肋连接到接地的主电极并成形为提供更均匀的气体流通过限定在相邻肋之间的开口。