公开(公告)号：US20240146011A1

公开(公告)日：2024-05-02

申请号：US18408777

申请日：2024-01-10

Applicant: Gigaphoton Inc.

Inventor： Koji ASHIKAWA ,  Shinichi MATSUMOTO

IPC: H01S3/034 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/225

CPC classification number: H01S3/034 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/225

Abstract: A gas laser device includes a chamber device including electrodes at an inside thereof to be filled with laser gas and configured to output, through a window to an outside thereof, light generated from the laser gas when a voltage is applied to the electrodes; a mirror arranged at the outside of the chamber device and configured to reflect at least a part of the light output through the window; a holding portion holding the mirror; a support member configured to support the holding portion to be movable along a plane perpendicular to an optical axis of the light output through the window; a moving mechanism configured to move the holding portion with respect to the support member along the plane; and an angle maintaining mechanism configured to maintain an inclination angle of the holding portion with respect to the support member at a predetermined angle.

公开(公告)号：US20190252846A1

公开(公告)日：2019-08-15

申请号：US16396072

申请日：2019-04-26

Applicant: National University Corporation Nagaoka University of Technology ,  Gigaphoton Inc.

Inventor： Weihua JIANG ,  Hiroshi UMEDA ,  Hakaru MIZOGUCHI ,  Takashi MATSUNAGA ,  Hiroaki TSUSHIMA ,  Tomoyuki OHKUBO

IPC: H01S3/097 ,  H01S3/041 ,  H01S3/225 ,  H01S3/134 ,  H01S3/038

CPC classification number: H01S3/09702 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/0971 ,  H01S3/10069 ,  H01S3/134 ,  H01S3/225

Abstract: A high-voltage pulse generator may include a number “n” (n is a natural number of not less than 2) of primary electric circuits connected in parallel to one another on the primary side of a pulse transformer, and a secondary electric circuit of the pulse transformer, which is connected to a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus. The “n” primary electric circuits may include a number “n” of primary coils connected in parallel to one another, a number “n” of capacitors respectively connected in parallel to the “n” primary coils, and a number “n” of switches respectively connected in series to the “n” capacitors. The “n” primary electric circuits may be connected to a number “n” of chargers for charging the “n” capacitors, respectively. The secondary electric circuit may include a number “n” of secondary coils connected in series to one another, and a number “n” of diodes each connected to opposite ends of each of the “n” secondary coils, to prevent a reverse current flowing from the pair of discharge electrodes toward the secondary coils.

公开(公告)号：US20180212397A1

公开(公告)日：2018-07-26

申请号：US15746730

申请日：2015-07-22

Applicant: Academy of Opto-Electronics, Chinese Academy of Sciences

Inventor： Yu WANG ,  Yi ZHOU ,  Xingliang SONG ,  Pengfei SHA ,  Yuanyuan FAN ,  Jiangshan ZHAO ,  Haiyan SHI ,  Hui LI ,  Jinbin DING ,  Yaoying SHAN ,  Qian WANG ,  Qianwei CAI ,  Zhuojun PENG

IPC: H01S3/23 ,  H01S3/11 ,  H01S3/034 ,  H01S3/038 ,  H01S3/083 ,  H01S3/081

CPC classification number: H01S3/2308 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/034 ,  H01S3/038 ,  H01S3/076 ,  H01S3/0816 ,  H01S3/0835 ,  H01S3/1127 ,  H01S3/225 ,  H01S3/23 ,  H01S3/235

Abstract: The present disclosure provides an excimer laser system. A master oscillator chamber may generate laser pulses with a narrowed line width and a small energy by means of a line width narrowing module, as a seed light. The seed light is refracted by a master oscillator wavefront engineering box and then incident into a power amplifier chamber through a beam splitting system. The beam splitting system, a first high reflectance mirror, a second high reflectance mirror and a third high reflectance mirror may constitute a quadrilateral annular optical path, The power amplifier chamber may have a first pair of Brewster windows and a second pair of Brewster windows, wherein the first pair of Brewster windows is located in a first optical path of the annular optical path along with a discharging electrode of the power amplifier chamber, and the second pair of Brewster windows is located in a second optical path of annular optical path which is parallel to a first amplification optical path. The present disclosure reduces the length of a ring cavity of an excimer laser system with a ring cavity structure, increasing the amplification times and achieving a deeper gain saturation amplification than a traditional structure, thereby improving the output characteristic of the excimer laser system.

公开(公告)号：US20170338616A1

公开(公告)日：2017-11-23

申请号：US15671580

申请日：2017-08-08

Applicant: Gigaphoton Inc.

Inventor： Akihiko KUROSU ,  Fumio KAWAMATA

IPC: H01S3/036 ,  F16C32/04 ,  H01S3/038

CPC classification number: H01S3/036 ,  F16C32/0446 ,  F16C32/0455 ,  F16C32/0485 ,  F16C32/0489 ,  F16C2360/46 ,  H01S3/038 ,  H01S3/08009 ,  H01S3/1305 ,  H01S3/1306 ,  H01S3/225

Abstract: A discharge excitation gas laser device may include a laser chamber in which a laser gas containing a halogen gas is encapsulated, a pair of discharge electrodes disposed to face each other inside the laser chamber, a fan disposed inside the laser chamber to make the laser gas flow between the pair of discharge electrodes, a motor for rotating the fan, a motor power supply for supplying power to the motor, a magnetic bearing configured to levitate the rotary shaft of the fan magnetically, a displacement sensor for detecting the position of the rotary shaft through a can, and a controller configured to measure the rotational speed of the fan on the basis of a detection signal from the displacement sensor and control the motor power supply in such a manner that the measured rotational speed becomes a target rotational speed.

公开(公告)号：US20170222389A1

公开(公告)日：2017-08-03

申请号：US15493106

申请日：2017-04-20

Applicant: Huazhong University of Science and Technology

Inventor： Hanyuan CHEN ,  Yingxiong QIN ,  Hao PENG ,  Chenhao WAN ,  Sichen LONG ,  Xiangxi WU ,  Xiahui TANG

IPC: H01S3/032 ,  H01S3/0943 ,  H01S3/22 ,  H01S3/04 ,  H01S3/036 ,  H01S3/034 ,  H01S3/038 ,  H01S3/0941

CPC classification number: H01S3/0323 ,  H01S3/034 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0388 ,  H01S3/0404 ,  H01S3/0405 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/094084 ,  H01S3/0941 ,  H01S3/09415 ,  H01S3/0943 ,  H01S3/09713 ,  H01S3/0975 ,  H01S3/2207

Abstract: A gas laser, including: a semiconductor laser, an optical beam-shaping system, a pair of electrodes, a discharge tube, a rear mirror, and an output mirror. The pair of electrodes includes two electrodes. The electrodes are symmetrically disposed at an outer layer of the discharge tube in parallel. The electrodes are connected to a radio-frequency power supply via a matching network, and the electrodes operate to modify working gas in the discharge tube through radio-frequency discharge. The rear mirror and the output mirror are disposed at two end surfaces of the discharge tube, respectively. The rear mirror, taken together with the output mirror and the discharge tube, form a resonant cavity. The output mirror is configured to output a laser beam.

公开(公告)号：US20160254634A1

公开(公告)日：2016-09-01

申请号：US15150800

申请日：2016-05-10

Applicant: Gigaphoton Inc.

Inventor： Takeshi ASAYAMA ,  Osamu WAKABAYASHI ,  Kouji KAKIZAKI

IPC: H01S3/036 ,  H01S3/134 ,  H01S3/225

CPC classification number: H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/225

Abstract: The excimer laser apparatus may include a laser chamber configured to contain gas, a pair of electrodes provided in the laser chamber, a power source unit configured to supply a pulse voltage between the pair of electrodes, a gas supply unit configured to supply gas into the laser chamber, a gas exhaust unit configured to partially exhaust gas from within the laser chamber, and a gas control unit configured to control the gas supply unit and the gas exhaust unit, where a replacement ratio of gas to be replaced from within the laser chamber increases as deterioration of the pair of electrodes progresses, the deterioration being represented by a deterioration parameter of the pair of electrodes.

Abstract translation: 准分子激光装置可以包括配置为容纳气体的激光室，设置在激光室中的一对电极，配置为在一对电极之间提供脉冲电压的电源单元，被配置为将气体供应到 激光室，构成为从激光室内部分地排出气体的排气单元，以及气体控制单元，其配置为控制气体供给单元和排气单元，在所述气体供给单元和所述排气单元中， 随着一对电极的劣化进一步增加，劣化由一对电极的劣化参数表示。

公开(公告)号：US20150270679A1

公开(公告)日：2015-09-24

申请号：US14221718

申请日：2014-03-21

Applicant: Honeywell International Inc.

Inventor： Rodney Harold Thorland ,  Douglas Paul Mortenson ,  Bruce A. Seiber

IPC: H01S3/097 ,  H01S3/038

CPC classification number: H01S3/09702 ,  G01C19/661 ,  H01S3/034 ,  H01S3/038

Abstract: Systems and methods for fabricating capacitive discharge electrodes for a ring laser gyroscope are disclosed. In one example, a laser block for generating a laser in a closed loop path comprises a laser block, wherein an optically closed loop path is formed within the laser block. Additionally, at least two electrodes are formed on the laser block, wherein the at least two electrodes are used in conjunction with a radio frequency power supply to create an electric potential in the laser block which generates at least one laser beam in the closed loop path. The at least two electrodes are manufactured by placing a paste composition on the laser block and securing the paste composition to the laser block. The paste composition also includes a conductive material.

Abstract translation: 公开了一种用于制造用于环形激光陀螺仪的电容放电电极的系统和方法。 在一个示例中，用于在闭环路径中产生激光的激光器块包括激光器块，其中在激光器块内形成光闭环路径。 另外，在激光器块上形成至少两个电极，其中至少两个电极与射频电源结合使用，以在激光器块中产生电位，在闭环路径中产生至少一个激光束 。 通过将糊剂组合物放置在激光器块上并将糊剂组合物固定到激光块来制造至少两个电极。 糊料组合物还包括导电材料。

公开(公告)号：US20140334510A1

公开(公告)日：2014-11-13

申请号：US14276595

申请日：2014-05-13

Applicant: Synrad, Inc.

Inventor： Jason W. Bethel ,  Melvin J. Lima ,  Yakov L. Litmanovich

IPC: H01S3/038

CPC classification number: H01S3/038 ,  H01S3/0315 ,  H01S3/0385 ,  H01S3/2232

Abstract: The tube includes a first electrode having a first electrode inner surface and a second electrode having a second electrode inner surface. The first electrode is separated, in a first transverse direction, from the second electrode thereby defining a gap region having a gap thickness between the first electrode inner surface and the second electrode inner surface. The tube further includes a first and a second elongated baffle member, each having a respective elongated central channel formed in an inner surface thereof.

Abstract translation: 该管包括具有第一电极内表面的第一电极和具有第二电极内表面的第二电极。 第一电极在第一横向方向上与第二电极分离，从而限定了在第一电极内表面和第二电极内表面之间具有间隙厚度的间隙区域。 管还包括第一和第二细长挡板构件，每个具有形成在其内表面中的相应的细长中心通道。

公开(公告)号：US20130235894A1

公开(公告)日：2013-09-12

申请号：US13824432

申请日：2011-08-26

Applicant: Tatsuya Yamamoto ,  Naoki Miyamoto ,  Junichi Nishimae ,  Shuichi Fujikawa

Inventor： Tatsuya Yamamoto ,  Naoki Miyamoto ,  Junichi Nishimae ,  Shuichi Fujikawa

IPC: H01S3/038

CPC classification number: H01S3/038 ,  H01S3/036 ,  H01S3/2232 ,  H01S2301/203

Abstract: A tri-axially orthogonal gas laser device in which an optical axis of an optical resonator, a direction in which a laser gas is supplied into the optical resonator, and a direction of discharge for exciting the laser gas are mutually orthogonal to one another, the device including: an exciting unit including a blower supplying the laser gas in −X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis; and an exciting unit including a blower for supplying the laser gas in +X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis

Abstract translation: 将光谐振器的光轴，向光谐振器供给激光气体的方向以及使激光气体激发的方向相互正交的三轴正交气体激光装置相互正交， 该装置包括：激励单元，其包括向所述光学谐振器的光轴向-X方向供给激光气体的鼓风机;以及在相对于所述光轴的气体上游侧移动的放电电极对; 以及激励单元，其包括用于将激光气体沿+ X方向供给到光谐振器的光轴的鼓风机，以及在相对于光轴的气体上游侧移动的放电电极对

公开(公告)号：US20130223468A1

公开(公告)日：2013-08-29

申请号：US13857372

申请日：2013-04-05

Applicant: Komatsu ltd. ,  Ushio Denki

Inventor： Shinji NAGAI ,  Kouji KAKIZAKI ,  Tsukasa HORI ,  Satoshi TANAKA

IPC: H01S3/034

CPC classification number: H01S3/034 ,  H01S3/005 ,  H01S3/038 ,  H01S3/08 ,  H01S3/0971 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2308 ,  H01S3/2325 ,  H01S3/2333 ,  H01S3/2341

Abstract: An excimer laser device capable of suppressing deterioration of optical elements provided in a laser chamber even if output energy per pulse is increased more than the conventional level, in which a width of a laser beam applied to the optical elements provided in the laser chamber is enlarged so as to reduce the energy density of the laser beam within such a range that a laser output of no less than a desired level is obtained.

Abstract translation: 能够抑制设在激光室内的光学元件的劣化的准分子激光器装置，即使每脉冲输出能量比现有技术水平提高，其中施加到设置在激光室中的光学元件的激光束的宽度被扩大 以便在获得不低于期望水平的激光输出的范围内降低激光束的能量密度。