公开(公告)号：US20020006148A1

公开(公告)日：2002-01-17

申请号：US09883128

申请日：2001-06-15

Applicant: Lambda Physik AG

Inventor： Sergei Govorkov ,  Klaus Vogler ,  Rainer Paetzel

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/22 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1055 ,  H01S3/106 ,  H01S3/134 ,  H01S3/2258 ,  H01S2301/02

Abstract: A molecular fluorine laser system includes a discharge tube filled with a gas mixture including molecular fluorine and at least one buffer gas and having a total pressure of less than substantially 2500 mbar, multiple electrodes within the discharge tube, a pulsed discharge circuit connected to the electrodes for energizing the gas mixture, a line-selection optic for selecting one of multiple closely-spaced lines around 157 nm emitted from the discharge tube, and a laser resonator including the line-selection optic and the discharge tube for generating a beam of laser pulses having a wavelength around 157 nm at a bandwidth of less than 0.6 pm.

Abstract translation: 分子氟激光系统包括：填充有包括分子氟和至少一种缓冲气体并且总压力小于基本上2500mbar的气体混合物的放电管，放电管内的多个电极，连接到电极的脉冲放电电路 用于激励气体混合物，用于选择从放电管发射的157nm附近的多个紧密间隔的线之一的线选择光学器件，以及包括用于产生激光脉冲束的线选择光学器件和放电管的激光谐振器 在小于0.6μm的带宽下具有约157nm的波长。