公开(公告)号：US12111577B2

公开(公告)日：2024-10-08

申请号：US17818916

申请日：2022-08-10

申请人： Gigaphoton Inc.

发明人： Takahito Kumazaki ,  Osamu Wakabayashi

IPC分类号： G03F7/00 ,  H01S3/08 ,  H01S3/106

CPC分类号： G03F7/70025 ,  H01S3/08009 ,  H01S3/106

摘要： A line narrowing device includes first and second prisms disposed at positions different in a wavelength dispersion direction of any of the first and second prisms, a third prism disposed on the optical path of an optical beam and through which the beam width of the optical beam is enlarged and first and second parts of the optical beam are incident on the first and second prisms, respectively, a grating disposed across the optical path of the first part having passed through the first prism and the optical path of the second part having passed through the second prism, a first actuator configured to adjust the incident angle of the first part on the grating, a second actuator configured to adjust the incident angle of the second part on the grating, and a third actuator configured to adjust an energy ratio of the first and second parts.

公开(公告)号：US20190006814A1

公开(公告)日：2019-01-03

申请号：US16123328

申请日：2018-09-06

申请人： Gigaphoton Inc.

发明人： Hirotaka MIYAMOTO

IPC分类号： H01S3/1055 ,  H01S3/038 ,  H01S5/00 ,  G03F7/20

CPC分类号： H01S3/1055 ,  G03F7/70025 ,  G03F7/70575 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/08036 ,  H01S3/08054 ,  H01S3/0971 ,  H01S3/106 ,  H01S3/2251 ,  H01S5/0064

摘要： A laser apparatus includes: a laser chamber in which a pair of discharge electrodes is provided; a first beam expander configured to expand a beam width of a beam outputted from the laser chamber at least in a first direction substantially parallel to a direction of electric discharge between the discharge electrodes; and a line narrow optical system including: a second beam expander configured to expand a beam width of the beam outputted from the laser chamber at least in a second direction substantially perpendicular to the first direction, the second beam expander including at least one optical element and a grating configured to perform wavelength dispersion of the beam expanded by the first and second beam expanders, the wavelength dispersion being performed in a plane substantially parallel to the second direction, wherein at least one of the grating and the at least one optical element is arranged so as to compensate for wavelength dispersion caused by the first beam expander.

公开(公告)号：US20180254600A1

公开(公告)日：2018-09-06

申请号：US15973896

申请日：2018-05-08

申请人： Gigaphoton Inc.

发明人： Takahito KUMAZAKI ,  Keisuke ISHIDA ,  Hiroshi FURUSATO

IPC分类号： H01S3/137 ,  G01J3/28 ,  H01S3/034 ,  H01S3/23 ,  H01S3/08 ,  H01S3/10 ,  G03F7/20

CPC分类号： H01S3/137 ,  G01J3/0205 ,  G01J3/0218 ,  G01J3/027 ,  G01J3/10 ,  G01J3/26 ,  G01J3/28 ,  G01J2003/2859 ,  G03F7/70025 ,  G03F7/70575 ,  G03F7/70725 ,  H01S3/005 ,  H01S3/0078 ,  H01S3/034 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/10038 ,  H01S3/10061 ,  H01S3/10069 ,  H01S3/106 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2308

摘要： A narrowband laser apparatus may be provided with a laser resonator including optical elements for narrowing a spectral linewidth, a spectrometer configured to detect spectral intensity distributions of multiple pulses included in a pulsed laser beam output from the laser resonator, a spectral waveform producer configured to produce a spectral waveform by adding up the spectral intensity distributions of the multiple pulses, a device function storage configured to store a device function of the spectrometer, a wavelength frequency function generator configured to generate a wavelength frequency function which represents a frequency distribution of center wavelengths of the multiple pulses, and a deconvolution processor configured to perform deconvolution processing on the spectral waveform with the device function and the wavelength frequency function.

公开(公告)号：US10038297B2

公开(公告)日：2018-07-31

申请号：US15329459

申请日：2015-07-21

申请人： Valstybinis Moksliniu Tyrimu Institutas Fiziniu Ir Technologijos Mokslu Centras

发明人： Kestutis Regelskis ,  Gediminas Raciukaitis

IPC分类号： H01S3/117 ,  H01S3/30 ,  H01S3/067 ,  H01S3/106 ,  H01S3/11 ,  H01S3/08 ,  H01S5/50

CPC分类号： H01S3/06791 ,  H01S3/0675 ,  H01S3/06754 ,  H01S3/08027 ,  H01S3/082 ,  H01S3/10092 ,  H01S3/106 ,  H01S3/1112 ,  H01S5/5018

摘要： This invention relates to the field of laser technology and more particularly to the ultra-short pulse generation methods and generators. One round trip of the ultra-short light pulse formation inside a generator optical loop comprises these steps: amplification of the light pulse, spectral broadening of the amplified light pulse due to the optical Kerr effect inside the optically transparent medium, selection of the predeterminated spectral components of the spectrally broadened light pulses by using the first spectrally-sensitive optical element, then again follows amplification of the selected light pulses, spectral broadening of the amplified light pulse due to the optical Kerr effect inside the optically transparent medium and selection of the predeterminated spectral components of the spectrally broadened light pulses by using the second spectrally-sensitive optical element, where spectral components of the light pulses selected using the first spectrally-sensitive optical element are different than the spectral components of the light pulses selected using the second spectrally-sensitive optical element.

公开(公告)号：US10014659B2

公开(公告)日：2018-07-03

申请号：US15183559

申请日：2016-06-15

申请人： Oracle International Corporation

发明人： Jock Bovington ,  Xuezhe Zheng ,  Ashok V. Krishnamoorthy

IPC分类号： G02B6/12 ,  H01S5/12 ,  H01S5/125 ,  H01S5/0683 ,  H01S5/00 ,  H01S5/10

CPC分类号： H01S5/1215 ,  G02B6/12004 ,  G02B2006/12121 ,  G02B2006/12142 ,  H01S3/0826 ,  H01S3/106 ,  H01S5/0085 ,  H01S5/06837 ,  H01S5/1071 ,  H01S5/125 ,  H01S5/141 ,  H01S5/142 ,  H01S5/4012 ,  H01S5/4062

摘要： An optical source is described. This optical source includes a set of semiconductor optical amplifiers, with a semiconductor other than silicon, which provides an optical gain medium. In addition, a photonic chip, optically coupled to the set of semiconductor optical amplifiers, includes optical paths. Each of the optical paths includes an optical waveguide and a distributed-Bragg-reflector (DBR) ring resonator. The DBR ring resonator at least partially reflects a given tunable wavelength in an optical signal provided by a given semiconductor optical amplifier. Moreover, the DBR ring resonator includes a different number of grating periods than DBR ring resonators in the remaining optical paths, and the DBR ring resonators in the optical paths have a common radius.

公开(公告)号：US10009136B2

公开(公告)日：2018-06-26

申请号：US15583526

申请日：2017-05-01

申请人： Oplink Communications, LLC

发明人： Zuon-Min Chuang ,  Rang-Chen Yu ,  Domenico DiMola ,  Sung-Ping Huang

IPC分类号： H04B10/27 ,  H04J14/00 ,  H04J14/02 ,  H01S3/08 ,  H01S5/14 ,  H01S3/10 ,  H01S3/106 ,  H01S5/065 ,  H01S5/00 ,  H04Q11/00 ,  H04J14/06 ,  H04B10/2507 ,  H04B10/50

CPC分类号： H04J14/0246 ,  H01S3/08027 ,  H01S3/08054 ,  H01S3/10061 ,  H01S3/106 ,  H01S3/1062 ,  H01S5/0064 ,  H01S5/0078 ,  H01S5/02438 ,  H01S5/0656 ,  H01S5/1021 ,  H01S5/141 ,  H01S5/143 ,  H01S5/146 ,  H01S2301/14 ,  H01S2301/163 ,  H04B10/2572 ,  H04B10/501 ,  H04B10/505 ,  H04B10/572 ,  H04J14/0247 ,  H04J14/025 ,  H04J14/0252 ,  H04J14/0282 ,  H04J14/06 ,  H04Q11/0067 ,  H04Q2011/0009 ,  H04Q2011/0032 ,  H04Q2011/0035

摘要： Methods, systems, and apparatus, for an external cavity FP laser. In one aspect, an apparatus is provided that includes a FP laser diode; a Faraday rotator (FR) coupled to receive an optical output of the FP laser diode and that rotates a polarization of the optical output; an optical fiber coupled at a first end to receive the output of the FR; a WDM filter coupled to a second end of the optical fiber to receive the optical signal from the optical fiber; and a FRM coupled directly or indirectly to an output of the WDM filter, wherein an optical output of the WDM filter is partially reflected by the FRM such that the polarization of a reflected beam is rotated, and wherein the reflected optical signal then passes through the FR with its polarization being rotated by the FR before it is injected back into the FP laser diode.

公开(公告)号：US20180159297A1

公开(公告)日：2018-06-07

申请号：US15372277

申请日：2016-12-07

申请人： Cymer, LLC

发明人： Rahul Ahlawat ,  Thomas P. Duffey

IPC分类号： H01S3/106 ,  H01S3/11 ,  H01S3/08 ,  G03F7/20

CPC分类号： H01S3/106 ,  G03F7/2006 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/10069 ,  H01S3/137

摘要： Wafer positioning errors in stepper-scanners contribute to imaging defects. Changing the wavelength of the light source's generated light can compensate for wafer positional errors in the Z-direction. The wafer's real-time z-position is determined and a change in wavelength target to offset this error is communicated to the light source. The light source uses this change in wavelength target in a feed-forward operation and, in an embodiment, in combination with existing feedback operations, on a pulse-by-pulse basis for subsequent pulses in a current burst of pulses in addition to receiving the newly-specified laser wavelength target for a subsequent burst of laser pulses.

公开(公告)号：US20170310085A1

公开(公告)日：2017-10-26

申请号：US15640978

申请日：2017-07-03

申请人： Applied Optoelectronics, Inc.

发明人： Jun ZHENG ,  Stefan J. MURRY ,  Bujin GUO

IPC分类号： H01S5/14 ,  H04J14/02 ,  H04B10/50 ,  H01S3/105 ,  H01S5/022 ,  H01S3/106 ,  H01S3/08

CPC分类号： H01S5/143 ,  H01S3/08063 ,  H01S3/105 ,  H01S3/106 ,  H01S5/02248 ,  H01S5/02284 ,  H04B10/506 ,  H04J14/02 ,  H04J14/0246 ,  H04J14/025 ,  H04J14/0282

摘要： A wavelength-selectable laser device providing spatially-selectable wavelength(s) may be used to select one or more wavelengths for lasing in a tunable transmitter or transceiver, for example, in a wavelength division multiplexed (WDM) optical system such as a WDM passive optical network (PON). The wavelength-selectable laser device uses a dispersive optical element, such as a diffraction grating, to disperse light emitted from a laser emitter and to direct different wavelengths of the light toward a reflector at different spatial positions such that the wavelengths may be selected by allowing light to be reflected from selected spatial position(s) back into the laser emitter. Thus, the reflected light with a wavelength at the selected spatial position(s) is allowed to complete the laser cavity.

公开(公告)号：US09780524B1

公开(公告)日：2017-10-03

申请号：US15341675

申请日：2016-11-02

申请人： Oracle International Corporation

发明人： Xuezhe Zheng ,  Jin Yao ,  Ying Luo ,  Ashok V. Krishnamoorthy

IPC分类号： H01S5/00 ,  H01S5/06 ,  H01S5/20 ,  H01S5/30 ,  H01S5/068 ,  H01S5/0683 ,  H01S5/125 ,  H01S5/10 ,  H01S5/14 ,  H01S5/50 ,  H01S5/026 ,  H01S5/187

CPC分类号： H01S5/0608 ,  H01S3/105 ,  H01S3/106 ,  H01S5/0268 ,  H01S5/0617 ,  H01S5/06821 ,  H01S5/06837 ,  H01S5/1028 ,  H01S5/1092 ,  H01S5/125 ,  H01S5/141 ,  H01S5/142 ,  H01S5/187 ,  H01S5/20 ,  H01S5/3013 ,  H01S5/5027

摘要： A tunable laser includes a reflective silicon optical amplifier (RSOA) with a reflective end and an interface end and an array of narrow-band reflectors, which each have a different center wavelength. It also includes a silicon-photonic optical switch, having an input port and N output ports that are coupled to a different narrow-band reflector in the array of narrow-band reflectors. The tunable laser also includes an optical waveguide coupled between the interface end of the RSOA and the input of the silicon-photonic optical switch. The frequency of this tunable laser can be tuned in discrete increments by selectively coupling the input port of the silicon-photonic optical switch to one of the N output ports, thereby causing the RSOA to form a lasing cavity with a selected narrow-band reflector coupled to the selected output port. The tunable laser also includes a laser output optically coupled to the lasing cavity.

公开(公告)号：US09726472B1

公开(公告)日：2017-08-08

申请号：US14552016

申请日：2014-11-24

申请人： STC.UNM

发明人： Jean-Claude Diels ,  Ladan Arissian

IPC分类号： G01B9/02 ,  H01S3/106 ,  H01S3/086 ,  H01S3/067

CPC分类号： G01B9/02049 ,  G01B9/02015 ,  G02F1/39 ,  H01S3/0014 ,  H01S3/06712 ,  H01S3/082 ,  H01S3/086 ,  H01S3/106 ,  H01S3/1062 ,  H01S3/1083 ,  H01S3/1118

摘要： Apparatus, systems, and methods of operating a fiber laser having polarization-preserving fibers can be applied as a sensor to detect a physical quantity. In various embodiments, polarization-preserving fibers can provide a laser cavity having an interferometer disposed in the laser cavity. In various embodiments, a fiber optical parametric oscillator can include an interferometer disposed in the cavity of the optical parametric oscillator. Additional apparatus, systems, and methods are disclosed.