公开(公告)号：US20240291226A1

公开(公告)日：2024-08-29

申请号：US18571826

申请日：2022-06-02

申请人： Cymer, LLC

发明人： Siyu Chen ,  Spencer Ryan Williams

IPC分类号： H01S3/134 ,  G03F7/00 ,  G03F7/20 ,  H01S3/036 ,  H01S3/13 ,  H01S3/225 ,  H01S3/23

CPC分类号： H01S3/134 ,  H01S3/036 ,  H01S3/1305 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2366 ,  G03F7/2004 ,  G03F7/70025

摘要： A gas control apparatus includes a control system in communication with a gas discharge chamber. The control system includes a performance monitoring module configured to, during standard mode of operation of the gas discharge chamber and in between performance of gas recovery schemes on the gas discharge chamber that use a gas recovery setting: compare one or more performance parameters of the gas discharge chamber to respective thresholds; determine whether the gas recovery setting needs to be adjusted based on the comparison; and adjust the value for the gas recovery setting based on the determination. The control system includes a gas recovery module configured to perform the gas recovery scheme, the gas recovery module being configured to access the most recently adjusted value for the gas recovery setting from the performance monitoring module when performing the current gas recovery scheme.

公开(公告)号：US11988966B2

公开(公告)日：2024-05-21

申请号：US15734359

申请日：2019-05-16

申请人： Cymer, LLC

发明人： Andrei Dorobantu ,  Shreyas Bhaban

IPC分类号： G03F7/20 ,  G03F7/00 ,  H01S3/036 ,  H01S3/097 ,  H01S3/10 ,  H01S3/134 ,  H01S3/225 ,  H01S3/23

CPC分类号： G03F7/70025 ,  G03F7/70483 ,  H01S3/036 ,  H01S3/097 ,  H01S3/10069 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2308

摘要： A system includes an optical source configured to emit a pulsed light beam, the optical source comprising one or more chambers, each of the one or more chambers configured to hold a gaseous gain medium, the gaseous gain medium being associated with an assumed gas life; at least one detection module configured to: receive and analyze data related to the pulsed light beam, and produce a beam quality metric based on the data related to the pulsed light beam; and a monitoring module configured to: analyze the beam quality metric, determine a health status of the gaseous gain medium based on the analysis of the beam quality metric, and produce a status signal based on the determined health status, the status signal indicating whether to extend use of the gaseous gain medium beyond the assumed gas life or to end use of the gaseous gain medium.

公开(公告)号：US20190190229A1

公开(公告)日：2019-06-20

申请号：US16232321

申请日：2018-12-26

申请人： Cymer, LLC

发明人： Tanuj Aggarwal

IPC分类号： H01S3/134 ,  H01S3/225 ,  H01S3/13 ,  H01S3/038 ,  H01S3/097 ,  H01S3/104 ,  H01S3/036

CPC分类号： H01S3/134 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/104 ,  H01S3/1305 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2366

摘要： In a method, energy is supplied to a first gas discharge chamber of a first stage until a pulsed amplified light beam is output from the first stage and directed toward a second stage. While the energy is supplied to the first gas discharge chamber: a value of an operating parameter of the first gas discharge chamber is measured; it is determined whether to adjust an operating characteristic of the first gas discharge chamber based on the measured value; and, the operating characteristic of the first gas discharge chamber is adjusted if it is determined that the operating characteristic of the first gas discharge chamber should be adjusted. After it is determined that the operating characteristic of the first gas discharge chamber no longer should be adjusted, then an adjustment procedure is applied to an operating characteristic of a second gas discharge chamber of the second stage.

公开(公告)号：US20180052059A1

公开(公告)日：2018-02-22

申请号：US15800329

申请日：2017-11-01

申请人： Gigaphoton Inc.

发明人： Masato MORIYA ,  Osamu WAKABAYASHI ,  Yoshinobu WATABE

IPC分类号： G01J11/00 ,  G02B27/14 ,  G02B5/30 ,  G01J4/04 ,  H01S3/00 ,  H01S3/134 ,  G01J1/04

CPC分类号： G01J11/00 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/0477 ,  G01J1/4257 ,  G01J4/04 ,  G01J2001/4261 ,  G02B5/3066 ,  G02B27/148 ,  H01S3/0014 ,  H01S3/134 ,  H01S3/2366

摘要： A light beam measurement device includes: a polarization measurement unit including a first measurement beam splitter provided on an optical path of a laser beam and configured to measure a polarization state of the laser beam having been partially reflected by the first measurement beam splitter; a beam profile measurement unit including a second measurement beam splitter provided on the optical path of the laser beam and configured to measure a beam profile of the laser beam having been partially reflected by the second measurement beam splitter; and a laser beam-directional stability measurement unit configured to measure a stability in a traveling direction of the laser beam, while the first measurement beam splitter and the second measurement beam splitter are made of a material containing CaF2.

公开(公告)号：US20170338618A1

公开(公告)日：2017-11-23

申请号：US15671572

申请日：2017-08-08

申请人： National University Corporation Nagaoka University of Technology ,  Gigaphoton Inc.

发明人： Weihua JIANG ,  Hiroshi UMEDA ,  Hakaru MIZOGUCHI ,  Takashi MATSUNAGA ,  Hiroaki TSUSHIMA ,  Tomoyuki OHKUBO

IPC分类号： H01S3/097 ,  H01S3/038 ,  H01S3/225 ,  H01S3/041 ,  H01S3/036

CPC分类号： H01S3/09702 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/0971 ,  H01S3/10069 ,  H01S3/134 ,  H01S3/225

摘要： A high-voltage pulse generator may include a number “n” (n is a natural number of not less than 2) of primary electric circuits connected in parallel to one another on the primary side of a pulse transformer, and a secondary electric circuit of the pulse transformer, which is connected to a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus. The “n” primary electric circuits may include a number “n” of primary coils connected in parallel to one another, a number “n” of capacitors respectively connected in parallel to the “n” primary coils, and a number “n” of switches respectively connected in series to the “n” capacitors. The “n” primary electric circuits may be connected to a number “n” of chargers for charging the “n” capacitors, respectively. The secondary electric circuit may include a number “n” of secondary coils connected in series to one another, and a number “n” of diodes each connected to opposite ends of each of the “n” secondary coils, to prevent a reverse current flowing from the pair of discharge electrodes toward the secondary coils.

公开(公告)号：US09825417B2

公开(公告)日：2017-11-21

申请号：US15144081

申请日：2016-05-02

申请人： GIGAPHOTON INC.

发明人： Akihiko Kurosu ,  Takashi Matsunaga ,  Hiroyuki Masuda ,  Osamu Wakabayashi ,  Hiroaki Tsushima ,  Masanori Yashiro ,  Takeshi Ohta

IPC分类号： H01S3/036 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/104 ,  H01S3/04 ,  H01S3/03 ,  H01S3/08 ,  H01S3/134 ,  H01S3/13 ,  H01S3/225 ,  H01S3/041

CPC分类号： H01S3/036 ,  H01S3/03 ,  H01S3/0404 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/104 ,  H01S3/1306 ,  H01S3/134 ,  H01S3/2258

摘要： There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.

公开(公告)号：US09722385B2

公开(公告)日：2017-08-01

申请号：US15198433

申请日：2016-06-30

申请人： Gigaphoton Inc.

发明人： Hiroyuki Ikeda ,  Kouji Kakizaki ,  Hiroaki Tsushima ,  Hisakazu Katsuumi

IPC分类号： H01S3/038 ,  H01S3/097 ,  H01S3/225 ,  H01S3/036 ,  H01S3/03 ,  H01S3/134

CPC分类号： H01S3/038 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/09702 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2258

摘要： A laser chamber for a discharge excited gas laser apparatus may include: a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; a fan configured to flow laser gas between the first discharge electrode and the second discharge electrode; a first insulating member disposed upstream and downstream of a laser gas flow from the first discharge electrode; a metallic damper member disposed upstream of the laser gas flow from the second discharge electrode; and a second insulating member disposed downstream of the laser gas flow from the second discharge electrode.

公开(公告)号：US09653873B1

公开(公告)日：2017-05-16

申请号：US14139461

申请日：2013-12-23

申请人： Chemled Technologies, LLC

发明人： Radoslaw M. Sobczynski

IPC分类号： H01S5/00 ,  H01S3/22 ,  H01S3/07 ,  H01S5/028 ,  H01S5/022 ,  H01S3/097 ,  H01S3/225 ,  H01S3/134

CPC分类号： H01S3/073 ,  H01S3/07 ,  H01S3/09 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/134 ,  H01S3/2207 ,  H01S3/2222 ,  H01S3/225 ,  H01S3/2375 ,  H01S5/0222 ,  H01S5/02415 ,  H01S5/028 ,  H01S5/0287 ,  H01S5/14

摘要： An intracavity plasma solid state laser with an emission line radiation source of determined wavelength seeding a semiconductor laser gain medium providing a high power laser beam of the determined wavelength. A plasma cell generates a determined wavelength based on an atomic emission line that is received by the semiconductor laser or laser diode having a broadband output encompassing the determined wavelength received from the plasma cell. The laser diode locks on to the determined wavelength and emits a high powered laser beam of the determined wavelength. The intracavity plasma solid state laser creates a laser beam of narrow linewidth comparable to the natural Voight or Doppler linewidth of atomic transition and higher power in a smaller size than previously possible. The intracavity plasma solid state laser is easily manufactured and suitable for placement in an array for targeting a predetermined area.

公开(公告)号：US09634455B1

公开(公告)日：2017-04-25

申请号：US15044677

申请日：2016-02-16

申请人： Cymer, LLC

发明人： Tanuj Aggarwal

IPC分类号： H01S3/036 ,  H01S3/225 ,  H01S3/23 ,  H01S3/11

CPC分类号： H01S3/134 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/104 ,  H01S3/1305 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2366

摘要： One or more operating characteristics of a light source are adjusted by estimating a plurality of extreme values of operating parameters of the light source while operating the light source under a set of extreme test conditions. For each extreme test condition, a group of pulses of energy is supplied to a first gas discharge chamber of the light source while operating the first gas discharge chamber under the extreme test condition to produce a first pulsed amplified light beam; a group of pulses of energy is supplied to a second gas discharge chamber of the light source while operating the second gas discharge chamber under the extreme test condition to produce a second pulsed amplified light beam. An extreme value of an operating parameter for the extreme test condition is measured to thereby estimate the extreme value of the operating parameter.

公开(公告)号：US09601893B2

公开(公告)日：2017-03-21

申请号：US15060148

申请日：2016-03-03

申请人： GIGAPHOTON INC.

发明人： Kouji Kakizaki ,  Takeshi Asayama ,  Osamu Wakabayashi

IPC分类号： H01S3/038 ,  H01S3/134 ,  H01S3/225 ,  H01S3/08

CPC分类号： H01S3/038 ,  H01S3/08009 ,  H01S3/134 ,  H01S3/225

摘要： There may be provided a laser apparatus including: an optical resonator including an output coupler; a laser chamber containing a laser medium and disposed in an optical path inside the optical resonator; a pair of discharge electrodes disposed inside the laser chamber; an electrode gap varying section configured to vary a gap between the discharge electrodes; a laser beam measurement section disposed in an optical path of a laser beam outputted from the output coupler, the laser beam resulting from electric discharge between the discharge electrodes; and a controller configured to control the gap between the discharge electrodes through activating the electrode gap varying section, based on a beam parameter of the laser beam measured by the laser beam measurement section.