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公开(公告)号：US20240226347A9
公开(公告)日：2024-07-11
申请号：US18547604
申请日：2022-02-24
CPC分类号： A61L2/0047 , H01S3/08004 , H01S3/1643 , A61L2202/11
摘要： The present invention relates to a 215- to 222-nm wavelength laser light generating device comprising: an excitation light source part for converting a laser light with a wavelength of 1030 to 1064 nm to a second harmonic, and generating a laser light with a wavelength of 515 to 532 nm; an optical parametric oscillating part for generating a signal light with a wavelength of 858 to 887 nm and an idler light with a wavelength of 1288 to 1330 nm using the laser light with the wavelength of 515 to 532 nm as an excitation light; a separating part for separating the signal light and the idler light; a first wavelength converting part for generating a fourth harmonic from the signal light; a second wavelength converting part for generating a deep ultraviolet light with a wavelength of 215 to 222 nm by sum frequency with a second harmonic of the excitation light from the idler light; and a coupling part for coupling the fourth harmonic from the first wavelength converting part and the deep ultraviolet light from the second wavelength converting part. The present invention provides a laser generating device that enables to generate simply and efficiently a pulse laser light with a wavelength of 215 to 222 nm including a wavelength of 222 nm disinfecting microorganisms.
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公开(公告)号：US20190006814A1
公开(公告)日：2019-01-03
申请号：US16123328
申请日：2018-09-06
申请人： Gigaphoton Inc.
发明人： Hirotaka MIYAMOTO
IPC分类号： H01S3/1055 , H01S3/038 , H01S5/00 , G03F7/20
CPC分类号： H01S3/1055 , G03F7/70025 , G03F7/70575 , H01S3/038 , H01S3/08004 , H01S3/08036 , H01S3/08054 , H01S3/0971 , H01S3/106 , H01S3/2251 , H01S5/0064
摘要： A laser apparatus includes: a laser chamber in which a pair of discharge electrodes is provided; a first beam expander configured to expand a beam width of a beam outputted from the laser chamber at least in a first direction substantially parallel to a direction of electric discharge between the discharge electrodes; and a line narrow optical system including: a second beam expander configured to expand a beam width of the beam outputted from the laser chamber at least in a second direction substantially perpendicular to the first direction, the second beam expander including at least one optical element and a grating configured to perform wavelength dispersion of the beam expanded by the first and second beam expanders, the wavelength dispersion being performed in a plane substantially parallel to the second direction, wherein at least one of the grating and the at least one optical element is arranged so as to compensate for wavelength dispersion caused by the first beam expander.
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公开(公告)号：US20180254600A1
公开(公告)日：2018-09-06
申请号：US15973896
申请日：2018-05-08
申请人： Gigaphoton Inc.
CPC分类号： H01S3/137 , G01J3/0205 , G01J3/0218 , G01J3/027 , G01J3/10 , G01J3/26 , G01J3/28 , G01J2003/2859 , G03F7/70025 , G03F7/70575 , G03F7/70725 , H01S3/005 , H01S3/0078 , H01S3/034 , H01S3/08004 , H01S3/08009 , H01S3/10038 , H01S3/10061 , H01S3/10069 , H01S3/106 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2308
摘要： A narrowband laser apparatus may be provided with a laser resonator including optical elements for narrowing a spectral linewidth, a spectrometer configured to detect spectral intensity distributions of multiple pulses included in a pulsed laser beam output from the laser resonator, a spectral waveform producer configured to produce a spectral waveform by adding up the spectral intensity distributions of the multiple pulses, a device function storage configured to store a device function of the spectrometer, a wavelength frequency function generator configured to generate a wavelength frequency function which represents a frequency distribution of center wavelengths of the multiple pulses, and a deconvolution processor configured to perform deconvolution processing on the spectral waveform with the device function and the wavelength frequency function.
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4.发明申请公开(公告)号：US20180159297A1
公开(公告)日：2018-06-07
申请号：US15372277
申请日：2016-12-07
申请人： Cymer, LLC
发明人： Rahul Ahlawat , Thomas P. Duffey
CPC分类号： H01S3/106 , G03F7/2006 , H01S3/08004 , H01S3/08009 , H01S3/10069 , H01S3/137
摘要： Wafer positioning errors in stepper-scanners contribute to imaging defects. Changing the wavelength of the light source's generated light can compensate for wafer positional errors in the Z-direction. The wafer's real-time z-position is determined and a change in wavelength target to offset this error is communicated to the light source. The light source uses this change in wavelength target in a feed-forward operation and, in an embodiment, in combination with existing feedback operations, on a pulse-by-pulse basis for subsequent pulses in a current burst of pulses in addition to receiving the newly-specified laser wavelength target for a subsequent burst of laser pulses.
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公开(公告)号：US09966725B1
公开(公告)日：2018-05-08
申请号：US15468402
申请日：2017-03-24
申请人： Cymer, LLC
发明人： Kuo-Tai Teng
CPC分类号： G03F7/7055 , G02B26/007 , G03F7/70041 , G03F7/70575 , H01L21/0275 , H01S3/08004 , H01S3/1055 , H01S3/137 , H01S3/139 , H01S3/225 , H01S3/2308
摘要： A spectral feature of a pulsed light beam produced by an optical source is adjusted by receiving an instruction to change a spectral feature of the pulsed light beam from a value in a first target range to a value in a second target range; regulating a first operating characteristic of the optical source; determining an adjustment to a second actuatable apparatus of the optical source; and adjusting the second actuatable apparatus by an amount based on the determined adjustment. The first operating characteristic is regulated by adjusting a first actuatable apparatus of the optical source until it is determined that the first operating characteristic is within an acceptable range of values. The adjustment to the second actuatable apparatus is determined based at least in part on: a relationship between the adjustment of the first actuatable apparatus and a spectral feature of the light beam, and the second target range.
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公开(公告)号：US20180123312A1
公开(公告)日：2018-05-03
申请号：US15857894
申请日：2017-12-29
申请人： Gigaphoton Inc.
CPC分类号： H01S3/11 , H01S3/0078 , H01S3/08004 , H01S3/08009 , H01S3/134 , H01S3/137 , H01S3/1398 , H01S3/225 , H01S2301/04
摘要： The line narrowed laser apparatus configured to perform a plurality of burst oscillations including a first burst oscillation and a second burst oscillation next to the first burst oscillation to output a pulse laser beam. The line narrowed laser apparatus comprises a laser resonator, a chamber provided in the laser resonator, a pair of electrodes provided in the chamber, an electric power source configured to apply pulsed voltage to the pair of electrodes, a wavelength selecting element provided in the laser resonator, a spectral width varying unit provided in the laser resonator, and a controller. The controller is configured to measure a duty in a predetermined period before starting the second burst oscillation and a length of a suspension period from a time of ending the first burst oscillation to a time of starting the second burst oscillation, and perform a first control of the spectral width varying unit based on the duty and the length of the suspension period.
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公开(公告)号：US20170205631A1
公开(公告)日：2017-07-20
申请号：US15478683
申请日：2017-04-04
申请人： Gigaphoton Inc.
发明人： Yoshinobu WATABE , Miwa IGARASHI , Koji ASHIKAWA
CPC分类号： G02B27/1086 , G02B27/0972 , H01S3/005 , H01S3/03 , H01S3/08004 , H01S3/08009 , H01S3/101 , H01S3/105 , H01S3/225
摘要： A narrow band laser apparatus may include: a laser chamber; a line narrow module configured to narrow a band width of a laser beam outputted from the laser chamber and return the laser beam to the laser chamber, the line narrow module including a grating; a housing accommodating the line narrow module; three mounts fixed to the housing; and a housing moving device configured to support the housing and the line narrow module by supporting each of the three mounts and move the line narrow module by moving the housing with respect to the laser chamber in a direction substantially perpendicular to a dispersion plane of the grating.
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公开(公告)号：US20160365696A1
公开(公告)日：2016-12-15
申请号：US15245245
申请日：2016-08-24
申请人： Gigaphoton Inc.
发明人： Hiroaki TSUSHIMA , Kouji KAKIZAKI , Takashi MATSUNAGA , Takeshi ASAYAMA , Hisakazu KATSUUMI , Hiroshi UMEDA , Hiroyuki IKEDA
CPC分类号： H01S3/036 , H01S3/038 , H01S3/0384 , H01S3/0407 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/09702 , H01S3/09713 , H01S3/134 , H01S3/225
摘要： A laser chamber including a first space and a second space in communication with the first space may include: a first discharge electrode disposed in the first space; a second discharge electrode disposed in the first space to face the first discharge electrode; a fan disposed in the first space and configured to flow laser gas between the first discharge electrode and the second discharge electrode; a peaking condenser disposed in the second space; and an electrical insulating member configured to partition the first space and the second space from one another, and disposed to allow the laser gas to pass through between the first space and the second space.
摘要翻译： 包括与第一空间连通的第一空间和第二空间的激光室可以包括：设置在第一空间中的第一放电电极; 设置在所述第一空间中以面对所述第一放电电极的第二放电电极; 风扇，设置在所述第一空间中并且被配置为使所述第一放电电极和所述第二放电电极之间的激光气体流动; 设置在所述第二空间中的峰化冷凝器; 以及电绝缘构件，其被配置为将所述第一空间和所述第二空间彼此分隔开，并且被设置成允许所述激光气体在所述第一空间和所述第二空间之间通过。
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公开(公告)号：US09478933B2
公开(公告)日：2016-10-25
申请号：US13535641
申请日：2012-06-28
申请人： Toru Suzuki , Shinichi Matsumoto
发明人： Toru Suzuki , Shinichi Matsumoto
IPC分类号： H01S3/13 , G01J1/42 , H01S3/137 , H01S3/225 , G01J9/00 , G01J9/02 , H01J47/00 , H01S3/08 , H01S3/10
CPC分类号： H01S3/13 , G01J1/429 , G01J9/00 , G01J9/0246 , H01J47/00 , H01S3/08004 , H01S3/08009 , H01S3/10069 , H01S3/1303 , H01S3/137 , H01S3/225
摘要： The wavelength detector includes a diffusion element that diffuses the laser beam; a light collection optical system provided downstream from the diffusion element; a member, including an aperture, provided downstream from the light collection optical system; a discharge tube that is provided downstream from the member and that includes a cylindrical anode and a cylindrical cathode that each have a through-hole formed therein, and that is configured so that an electrical property between the anode and the cathode changes due to an opto-galvanic effect when a laser beam having a predetermined wavelength passes through the through-hole of the cathode in a state in which a DC voltage is applied to the anode; and a high-voltage DC power source. The discharge tube is disposed so that the laser beam that passes through the aperture passes through the through-hole of the cathode of the discharge tube without directly irradiating the cathode.
摘要翻译： 波长检测器包括扩散激光束的扩散元件; 设置在扩散元件下游的光收集光学系统; 包括孔的构件，设置在所述光收集光学系统的下游; 放电管，其设置在所述构件的下游，并且包括圆柱形阳极和圆柱形阴极，每个具有形成在其中的通孔，并且被配置为使得阳极和阴极之间的电特性由于光电而改变 当具有预定波长的激光束在向阳极施加直流电压的状态下穿过阴极的通孔时， 和高压直流电源。 放电管被布置成使得穿过孔的激光束通过放电管的阴极的通孔而不直接照射阴极。
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公开(公告)号：US20160294149A1
公开(公告)日：2016-10-06
申请号：US15085327
申请日：2016-03-30
CPC分类号： H01S3/094026 , H01S3/0014 , H01S3/0612 , H01S3/08004 , H01S3/0815 , H01S3/0816 , H01S3/1095 , H01S3/1112 , H01S3/1305 , H01S3/162 , H01S3/1623 , H01S3/1628 , H01S3/2308
摘要： A short-pulse mode-locked laser is configured with at least two reflective elements defining a resonant cavity therebetween, a laser gain element (“GE”) placed inside the resonant cavity at normal incidence and selected from transition metal doped II-VI materials; and an optical pump emitting pulsed output to synchronously or quasi-synchronously pump the GE at a pulse repetition rate frequency fpump, the pump being configured so that the fpump substantially matches an inversed round trip time in the resonant cavity flaser:fpump≈flaser=c/2L, where c is the speed of light, L is the length of the resonant cavity. The synchronous or quasi-synchronous pumping triggers and sustains a short-pulse emission of the laser with picosecond or femtosecond pulse durations.
摘要翻译： 短脉冲锁模激光器配置有至少两个在其间限定谐振腔的反射元件，激光增益元件（“GE”）放置在谐振腔内的正常入射并选自掺杂过渡金属的II-VI材料; 并且发射脉冲输出的光泵以脉冲重复频率fpump同步或准同步地泵送所述泵，所述泵被配置成使得所述fpump基本上匹配所述共振腔flaser中的反向往返时间：fpump≈flaser= c / 2L，其中c是光速，L是谐振腔的长度。 同步或准同步泵浦触发并维持具有皮秒或飞秒脉冲持续时间的激光的短脉冲发射。
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