公开(公告)号：US20020041615A1

公开(公告)日：2002-04-11

申请号：US09922241

申请日：2001-08-02

Applicant: Lambda Physik AG.

Inventor： Vladimir Mikhailovich Borisov ,  Alexander Yurivich Vinokhodov ,  Vladimir Alexeevich Vodchits

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/038 ,  H01S3/0384 ,  H01S3/0975 ,  H01S3/0977 ,  H01S3/225

Abstract: A device for use with a repetitively pulsed gas laser provides self-initiated UV preliminary ionization of the active volume of a laser, which has extended high-voltage and grounded electrodes disposed parallel to one another, to which peaking capacitors distributed along the length of the electrodes are connected in a low-inductance manner. The low-voltage contacts of the peaking capacitors are either connected directly to the grounded electrode or, if this connection is interrupted, dielectric plates are inserted that are disposed either on one side or on both sides of the grounded electrode. If the capacitors are charged rapidly, a surface discharge which effects UV pre-ionization of the volume of the main discharge and is uniformly distributed over the whole surface of the dielectric plates is produced on the surface of the dielectric plates. The device provides improved output parameters of the laser and increased service life both of the gas mixture and of structural components of the electric discharge system.

Abstract translation: 与重复脉冲气体激光器一起使用的装置提供激光器的有源体积的自发UV预电离，激光器的有源体积具有扩展的彼此平行设置的高电压和接地电极，峰值电容器沿着 电极以低电感方式连接。 峰值电容器的低电压触点直接连接到接地电极，或者如果连接中断，则插入布置在接地电极的一侧或两侧的电介质板。 如果电容器被快速充电，则在电介质板的表面上产生在主放电体积上实现UV预电离并均匀分布在电介质板的整个表面上的表面放电。 该装置提供了改进的激光输出参数，并且提高了气体混合物和放电系统的结构部件的使用寿命。