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公开(公告)号：US11724499B2
公开(公告)日：2023-08-15
申请号：US17528524
申请日：2021-11-17
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Ying-Lun Chang , Hsien-Chung Tai , Yung-Lung Han , Chi-Feng Huang , Chun-Yi Kuo
CPC classification number: B41J2/1433 , B41J2/155 , B41J2002/14346
Abstract: A wafer structure is disclosed and includes a chip substrate and a plurality of inkjet chips. The chip substrate is a silicon substrate fabricated by a semiconductor process on a wafer of at least 12 inches. The inkjet chips include at least one first inkjet chip and at least one second inkjet chip directly formed on the chip substrate by the semiconductor process, respectively, and the plurality of inkjet chips are diced into the at least one first inkjet chip and the at least one second inkjet chip for inkjet printing. Each of the first inkjet chip and the second inkjet chip includes a plurality of ink-drop generators produced by a semiconductor process and formed on the chip substrate. Each of the ink-drop generators includes a thermal-barrier layer, a resistance heating layer, a conductive layer, a protective layer, a barrier layer, an ink-supply chamber and a nozzle.
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公开(公告)号：US11536644B2
公开(公告)日：2022-12-27
申请号：US17330769
申请日：2021-05-26
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Ying-Lun Chang , Hsien-Chung Tai , Chin-Chuan Wu , Chi-Feng Huang , Yung-Lung Han , Chin-Wen Hsieh
Abstract: A gas detection device manufactured by a semiconductor process includes a substrate, a microelectromechanical element, a light-emitting element, a particle-sensing element, a gas-sensing element, a driving-chip element and an encapsulation layer. The driving-chip element controls driving operations of the microelectromechanical element, the light-emitting element, the particle-sensing element and the gas-sensing element, respectively. When the microelectromechanical element is enabled to actuate transportation of gas, the gas is introduced into the gas detection device through an inlet aperture of the substrate. Scattered light spots generated by the light beam of the light-emitting element irradiating on suspended particles contained in the gas are received by the particle-sensing element to generate a detection datum of the suspended particles. The gas-sensing element detects the gas passing through and generates a detection datum of hazardous gas contained in the gas. Finally, the gas is discharged from an outlet aperture of the encapsulation layer.
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公开(公告)号：US11536394B2
公开(公告)日：2022-12-27
申请号：US16661060
申请日：2019-10-23
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Hsuan-Kai Chen
Abstract: A micro fluid actuator includes an orifice layer, a flow channel layer, a substrate, a chamber layer, a vibration layer, a lower electrode layer, a piezoelectric actuation layer and an upper electrode layer, which are stacked sequentially. An outflow aperture, a plurality of first inflow apertures and a second inflow aperture are formed in the substrate by an etching process. A storage chamber is formed in the chamber layer by the etching process. An outflow opening and an inflow opening are formed in the orifice layer by the etching process. An outflow channel, an inflow channel and a plurality of columnar structures are formed in the flow channel layer by a lithography process. By providing driving power which have different phases to the upper electrode layer and the lower electrode layer, the vibration layer is driven to displace in a reciprocating manner, so as to achieve fluid transportation.
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公开(公告)号：US20220134751A1
公开(公告)日：2022-05-05
申请号：US17116714
申请日：2020-12-09
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Ying-Lun Chang , Hsien-Chung Tai , Chi-Feng Huang , Yung-Lung Han
Abstract: A wafer structure is disclosed and includes a chip substrate and a plurality of inkjet chips. The chip substrate is a silicon substrate which is fabricated by a semiconductor process on a wafer of at least 12 inches. The plurality of inkjet chips include at least one first inkjet chip and at least one second inkjet chip. The plurality of inkjet chips are directly formed on the chip substrate by the semiconductor process, respectively, and diced into the at least one first inkjet chip and the at least one second inkjet chip, to be implemented for inkjet printing.
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公开(公告)号：US20210343924A1
公开(公告)日：2021-11-04
申请号：US17241506
申请日：2021-04-27
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Hsien-Chung Tai , Lin-Huei Fang , Yung-Lung Han , Chi-Feng Huang , Chun-Yi Kuo , Tsung-I Lin , Chin-Wen Hsieh
Abstract: A heterogeneous integration chip of a micro fluid actuator is disclosed and includes a first substrate, a first insulation layer, a first conductive layer, a piezoelectric layer, a second conductive layer, a second substrate, a control element, a perforated trench and a conductor. The first substrate includes a first chamber. The first insulation layer is disposed on the first substrate. The first conductive layer is disposed on the first insulation layer and includes an electrode pad. The piezoelectric layer and the second conductive layer are stacked on the first conductive layer sequentially. The second substrate is assembled to the first substrate through a bonding layer to define a second chamber and includes an orifice, a fluid flowing channel and a third chamber. The control element is disposed in the second substrate. The perforated trench filled with the conductor is penetrated from the electrode pad to the second substrate.
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Patent Agency Ranking
公开(公告)号：US20210151663A1
公开(公告)日：2021-05-20
申请号：US17072642
申请日：2020-10-16
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Hsien-Chung Tai , Lin-Huei Fang , Yung-Lung Han , Chi-Feng Huang , Chun-Yi Kuo , Tsung-I Lin
IPC: H01L41/09
Abstract: A miniature fluid actuator is disclosed and includes a substrate, a chamber layer, a carrying layer and a piezoelectric assembly. The substrate has an inlet. The chamber layer is formed on the substrate and includes a first chamber in communication with the inlet, a resonance layer and a second chamber. The resonance layer has a central aperture in communication between the first chamber and the second chamber. The carrying layer includes a fixed region formed on the chamber layer, a vibration region, a connection portion and a vacant. The vibration region is located at a center of the fixed region and corresponding to the second chamber. The connection portion is connected between the fixed region and the vibration region. The vacant is formed among the fixed region, the vibration region and the connection portion. The piezoelectric assembly is formed on the vibration region.
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公开(公告)号：US10883487B2
公开(公告)日：2021-01-05
申请号：US16053195
申请日：2018-08-02
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Ta-Wei Hsueh , Ying-Lun Chang , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Yung-Lung Han , Chi-Feng Huang
IPC: F04B43/04 , F04B53/20 , F04B45/047
Abstract: A micro-electromechanical fluid control device includes at least one flow guiding unit. The at least one flow guiding unit includes an inlet plate, a substrate, a resonance membrane, an actuating membrane and an outlet plate sequentially stacked. A first chamber is defined between the resonance membrane and the actuating membrane and a second chamber is defined between the actuating membrane and the outlet plate. While the piezoelectric membrane of the flow guiding unit drives the actuating membrane, a fluid is inhaled into the convergence chamber via the inlet of the inlet plate, transported into the first chamber via the central aperture of the resonance membrane, transported into the second chamber via a vacant space of the actuating membrane, and discharged out from the outlet of the outlet plate, so as to control the fluid to flow.
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公开(公告)号：US20200309111A1
公开(公告)日：2020-10-01
申请号：US16825100
申请日：2020-03-20
Applicant: MICROJET TECHNOLOGY CO., LTD.
Inventor： Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Chun-Yi Kuo
Abstract: A micro-electromechanical systems pump includes a first substrate, a first oxide layer, a second substrate, and a piezoelectric element. The first oxide layer is stacked on the first substrate. The second substrate is combined with the first substrate, and the second substrate includes a silicon wafer layer, a second oxide layer, and a silicon material layer. The silicon wafer layer has an actuation portion. The actuation portion is circular and has a maximum stress value and an actuation stress value. The second oxide layer is formed on the silicon wafer layer. The silicon material layer is located at the second oxide layer and is combined with the first oxide layer. The piezoelectric element is stacked on the actuation portion, and has a piezoelectric stress value. The maximum stress value is greater than the actuation stress value, and the actuation stress value is greater than the piezoelectric stress value.
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公开(公告)号：US20200224791A1
公开(公告)日：2020-07-16
申请号：US16740839
申请日：2020-01-13
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Rong-Ho Yu , Cheng-Ming Chang , Hsien-Chung Tai , Wen-Hsiung Liao , Chi-Feng Huang , Yung-Lung Han , Hsuan-Kai Chen
Abstract: A micro fluid actuator includes a first substrate, a chamber layer, a vibration layer, a first metal layer, a piezoelectric actuation layer, a second metal layer, a second substrate, an inlet layer, a resonance layer and an aperture array plate. The first substrate includes a plurality of first outflow apertures and a plurality of second outflow apertures. The chamber layer includes a storage chamber. The second metal layer includes an upper electrode pad and a lower electrode pad. While driving power having different phase charges is provided to the upper electrode pad and the lower electrode pad to drive and control the vibration layer to displace in a reciprocating manner, the fluid is inhaled from the exterior through the inlet layer, converged to the storage chamber, compressed and pushes out the aperture array plate, and then is discharged out from the micro fluid actuator to achieve fluid transportation.
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公开(公告)号：US11905168B2
公开(公告)日：2024-02-20
申请号：US17072863
申请日：2020-10-16
Applicant: Microjet Technology Co., Ltd.
Inventor： Hao-Jan Mou , Hsien-Chung Tai , Lin-Huei Fang , Yung-Lung Han , Chi-Feng Huang , Chang-Yen Tsai , Wei-Ming Lee
IPC: B81C1/00 , F04B43/04 , H10N30/067 , H10N30/081 , H10N30/082 , F16K99/00
CPC classification number: B81C1/00182 , B81C1/00119 , B81C1/00166 , F04B43/046 , H10N30/067 , H10N30/081 , H10N30/082 , B81C2201/013 , B81C2201/0156 , F16K99/0048 , F16K2099/0074 , F16K2099/0094
Abstract: A manufacturing method of miniature fluid actuator is disclosed and includes the following steps. A flow-channel main body manufactured by a CMOS process is provided, and an actuating unit is formed by a deposition process, a photolithography process and an etching process. Then, at least one flow channel is formed by etching, and a vibration layer and a central through hole are formed by a photolithography process and an etching process. After that, an orifice layer is provided to form at least one outflow opening by an etching process, and then a chamber is formed by rolling a dry film material on the orifice layer. Finally, the orifice layer and the flow-channel main body are flip-chip aligned and hot-pressed, and then the miniature fluid actuator is obtained by a flip-chip alignment process and a hot pressing process.
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