公开(公告)号：US20180038960A1

公开(公告)日：2018-02-08

申请号：US15631430

申请日：2017-06-23

Applicant: MITUTOYO CORPORATION

Inventor： Shinichirou YANAKA ,  Masayuki NARA

IPC: G01S17/48 ,  G01S7/491 ,  G01S7/48

CPC classification number: G01S17/48 ,  G01B5/008 ,  G01B11/002 ,  G01B21/047 ,  G01S7/4808 ,  G01S7/4912

Abstract: To inspect a positioning machine by a laser tracking interferometer that tracks a retroreflector using a laser beam, the positioning accuracy of the positioning machine is evaluated by comparing a distance Δdij,C with a distance Δdij,L measured by the laser tracking interferometer, the distance Δdij,C being acquired by orthogonal projection of the position vectors of measurement points pi and pj measured by the positioning machine to the straight line gk passing through the rotation center M of the laser tracking interferometer.