公开(公告)号：US20180038960A1

公开(公告)日：2018-02-08

申请号：US15631430

申请日：2017-06-23

Applicant: MITUTOYO CORPORATION

Inventor： Shinichirou YANAKA ,  Masayuki NARA

IPC: G01S17/48 ,  G01S7/491 ,  G01S7/48

CPC classification number: G01S17/48 ,  G01B5/008 ,  G01B11/002 ,  G01B21/047 ,  G01S7/4808 ,  G01S7/4912

Abstract: To inspect a positioning machine by a laser tracking interferometer that tracks a retroreflector using a laser beam, the positioning accuracy of the positioning machine is evaluated by comparing a distance Δdij,C with a distance Δdij,L measured by the laser tracking interferometer, the distance Δdij,C being acquired by orthogonal projection of the position vectors of measurement points pi and pj measured by the positioning machine to the straight line gk passing through the rotation center M of the laser tracking interferometer.

公开(公告)号：US20200072591A1

公开(公告)日：2020-03-05

申请号：US16558730

申请日：2019-09-03

Applicant: MITUTOYO CORPORATION

Inventor： Takeshi HAGINO ,  Yuto INOUE ,  Masayuki NARA

IPC: G01B5/008

Abstract: A measurement point determination method for determining the number or an arrangement of measurement points for a measurement apparatus that performs measurement processing of a measurement item at a plurality of measurement points, the method comprises the steps of acquiring a minimum value and a maximum value of the number of measurement points, acquiring a target value of uncertainty for the measurement item of the measurement apparatus, estimating uncertainties when the measurement item is measured by the measurement apparatus using two or more of the numbers of measurement points between the minimum value and the maximum value of the number of measurement points, and determining the number of measurement points of the measurement apparatus on the basis of the target value and the estimated uncertainties.

公开(公告)号：US20190187661A1

公开(公告)日：2019-06-20

申请号：US16219033

申请日：2018-12-13

Applicant: MITUTOYO CORPORATION

Inventor： Shinichiro YANAKA ,  Masayuki NARA

IPC: G05B19/401 ,  G01B9/02 ,  G06F17/12

CPC classification number: G05B19/401 ,  G01B9/02071 ,  G01B9/02072 ,  G05B2219/39033 ,  G05B2219/50057 ,  G06F17/12

Abstract: A method that corrects an error in positioning in a positioning mechanism by using a measurable length value measured by a laser interferometer and a measured value for spatial coordinates measured by the positioning mechanism. The method includes a measurement step in which a retroreflector affixed to a displacer is displaced to a plurality of measurement points, and the measured length value and the measured value at each of the measurement points is acquired; and a parameter calculation step in which a correction parameter is calculated based on the measured value, the measured length value, and the coordinates of a rotation center of the tracking-type laser interferometer. A first correction constant is applied to the measured length value for each measurement line, and a second correction constant different from the first correction constant is applied to the coordinates of the rotation center of the interferometer for each measurement line.

公开(公告)号：US20230136366A1

公开(公告)日：2023-05-04

申请号：US17974698

申请日：2022-10-27

Applicant: MITUTOYO CORPORATION

Inventor： Yuto INOUE ,  Masayuki NARA

IPC: G01B5/012 ,  G01B21/04

Abstract: A three-dimensional-measuring-apparatus inspection gauge includes a plurality of targets to be measured with which a tip of a probe of a three-dimensional measuring apparatus comes into contact; and a frame member that supports the plurality of targets. The plurality of targets are arranged in positions corresponding to each vertex of a triangular prism.

公开(公告)号：US20210063139A1

公开(公告)日：2021-03-04

申请号：US16990269

申请日：2020-08-11

Applicant: MITUTOYO CORPORATION

Inventor： Masayuki NARA

IPC: G01B11/00 ,  G01N21/17

Abstract: An inspection method, correction method, and inspection device that include measuring a first spatial position where laser light is emitted at a first region and measuring a first strike position where the inspection device is struck by the laser light in the first region, the measurements being performed by emitting the laser light at the first region of the inspection device; measuring a second spatial position where the laser light is emitted at a second region and measuring a second strike position where the inspection device is struck by the laser light in the second region, the measurements being performed by emitting the laser light at the second region of the inspection device; and comparing measurement results for the first spatial position and the second spatial position with measurement results for the first strike position and the second strike position.

公开(公告)号：US20190187660A1

公开(公告)日：2019-06-20

申请号：US16218902

申请日：2018-12-13

Applicant: MITUTOYO CORPORATION

Inventor： Shinichiro YANAKA ,  Masayuki NARA

IPC: G05B19/401 ,  G01B9/02

CPC classification number: G05B19/401 ,  G01B9/02071 ,  G01B9/02072 ,  G05B2219/39033 ,  G05B2219/50057

Abstract: A spatial accuracy correction apparatus performs a spatial accuracy correction of a positioner displacing a displacer to a predetermined set of spatial coordinates using a measurable length value measured by an interferometer and a measurable value of the set of spatial coordinates of the displacement body that is measured by the positioner. The measured length value and the measured value for each measurement point are acquired by displacing the displacement body to a plurality of measurement points in order, one or more repeated measurements are conducted for at least one of the plurality of measurement points being measured after conducting measurement of the measured length value and the measured value for each of the plurality of measurement points, and the plurality of points are measured again when a repeat error of the measured length value is equal to or greater than a threshold value.

公开(公告)号：US20220333920A1

公开(公告)日：2022-10-20

申请号：US17693845

申请日：2022-03-14

Applicant: MITUTOYO CORPORATION

Inventor： Yuto INOUE ,  Masayuki NARA

IPC: G01B21/04 ,  G01B5/008

Abstract: A calibration method includes: measuring, with a CMM, a ball-to-ball distance of a plurality of edges of an inspection gauge installed in a first posture, a second posture and a third posture, and calculating a calibration value calibrating a ball-to-ball distance between two balls at respective ends of a plurality of edges of the inspection gauge by solving simultaneous equations including the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the first posture, the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the second posture, the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the third posture, and a measurement error of the CMM at the measurement position.

公开(公告)号：US20140347673A1

公开(公告)日：2014-11-27

申请号：US14280743

申请日：2014-05-19

Applicant: MITUTOYO CORPORATION

Inventor： Masayuki NARA ,  Shinichiro YANAKA

IPC: G01B11/14

CPC classification number: G01B11/14 ,  G01B11/002

Abstract: A laser tracking interferometer has a carriage provided with a first displacement gauge outputting a displacement signal associated with a relative displacement from a reference sphere; a second retroreflector provided to the carriage; a laser interferometer provided to the carriage and outputting a displacement signal associated with a relative displacement between the first retroreflector and the second retroreflector; and a data processor calculating a displacement of the first retroreflector with reference to the reference sphere based on the displacement signal output from the first displacement gauge and the displacement signal output from the laser interferometer.

Abstract translation: 激光跟踪干涉仪具有一个滑架，该滑架设置有第一位移量规，输出与参考球相对的位移相关联的位移信号; 提供给车厢的第二个后向反射器; 激光干涉仪，其被提供到所述滑架并输出与所述第一后向反射器和所述第二后向反射器之间的相对位移相关联的位移信号; 以及数据处理器，基于从第一位移计输出的位移信号和从激光干涉仪输出的位移信号，相对于参考球体计算第一后向反射器的位移。