公开(公告)号：US20230223235A1

公开(公告)日：2023-07-13

申请号：US18084696

申请日：2022-12-20

Applicant: MKS Instruments, Inc.

Inventor： Mariusz OLDZIEJ ,  Aaron RADOMSKI ,  Aaron BURRY ,  Michael KIRK

IPC: H01J37/32 ,  H03H11/28

CPC classification number: H01J37/32146 ,  H03H11/28 ,  H01J2237/24507 ,  H01J2237/334

Abstract: A radio frequency (RF) generator includes a RF power source configured to output an RF power signal, and a controller coupled to the RF power source. The controller is configured to generate a pulse to modulate the RF power signal of the RF power source. The pulse includes one or more state transitions. The controller is further configured to receive a sync signal indicative of one or more operating characteristics or parameters of another RF generator, and adjust at least one of the state transitions of the pulse to synchronize the state transition with a defined phase of the received sync signal. Other example RF generators, RF power delivery systems including one or more RF generators, and control methods for adjusting a state transition of a pulse to synchronize the state transition with a defined phase of a sync signal are also disclosed.