Hybrid High-Power And Broadband Variable Impedance Modules

    公开(公告)号:US20230050119A1

    公开(公告)日:2023-02-16

    申请号:US17873624

    申请日:2022-07-26

    IPC分类号: H01J37/32 H03H11/28

    摘要: A power supply system includes a RF generator, a matching network, and a control module. The matching network includes at least one mechanically variable impedance element and at least one electrically variable impedance element. The control module is coupled to the matching network and configured to generate one or more signals to adjust at least one of an impedance of the mechanically variable impedance element or an impedance of the electrically variable impedance element to vary an impedance match between the generator and a load. In other examples, a hybrid variable impedance module includes at least one mechanically variable impedance element, at least one electrically variable impedance element, and a control module. The control module is configured to generate one or more signals to adjust at least one of an impedance of the mechanically variable impedance element or an impedance of the electrically variable impedance element.

    IMPEDANCE MATCHING CIRCUIT AND PLASMA SUPPLY SYSTEM AND OPERATING METHOD

    公开(公告)号:US20230043171A1

    公开(公告)日:2023-02-09

    申请号:US17965792

    申请日:2022-10-14

    发明人: Birger Nordmann

    IPC分类号: H01J37/32 H03H11/28

    摘要: An impedance matching circuit includes a radiofrequency terminal and a series circuit connected to the radiofrequency terminal, wherein the series circuit comprises at least one reactance and at least one switching element having a drive input. A drive circuit is connected to the drive input and a coupler is connected to the drive circuit so as to an enable signal input. The impedance matching circuit enables short switching times and low losses in the at least one switching element.

    IMPEDANCE CONTROL CIRCUIT CAPABLE OF CONFIRMING CONNECTION STATUS

    公开(公告)号:US20220337227A1

    公开(公告)日:2022-10-20

    申请号:US17717167

    申请日:2022-04-11

    发明人: Ya-Hsuan Sung

    IPC分类号: H03H11/28

    摘要: An impedance control circuit includes a configuration channel interface, three resistors and two transistors. The configuration channel interface is coupled to a universal serial bus device. The first resistor has a first terminal coupled to the configuration channel interface. The first transistor has a first terminal coupled to a second terminal of the first resistor, and a second terminal coupled to a system voltage terminal. The second transistor has a first terminal coupled to the second terminal of the first resistor, and a second terminal coupled to the system voltage terminal. The second resistor has a first terminal coupled to the second terminal of the first resistor, and a second terminal coupled to a control terminal of the second transistor. The third resistor has a first terminal coupled to the second terminal of the second resistor, and a second terminal coupled to the system voltage terminal.

    METHOD FOR IMPEDANCE PREDICTION OF A VOLTAGE SOURCE CONVERTER UNDER VARIABLE OPERATING POINTS

    公开(公告)号:US20220200579A1

    公开(公告)日:2022-06-23

    申请号:US17212988

    申请日:2021-03-25

    IPC分类号: H03H11/28 H03H11/04

    摘要: A method for predicting impedance of a voltage source converter under variable operating points is disclosed, pertaining to the field of analysis of small signal stability in an electrical power system. When the parameters and topology of the control system are fully unknown, the theoretical expression of impedance cannot be applied to a voltage source converter, and impedance is highly dependent on operating points. A fully decoupled impedance model disclosed is constructed in this disclosure. The fully decoupled impedance model decomposes the impedance into a system parameter vector and an operating point vector, and then identifies parameters through impedance measurement, thereby realizing impedance prediction in a voltage source converter grid-connected system under variable operating points when the parameters and topology of the control system are fully unknown, expanding the scope of application of the impedance method and laying a foundation for using the impedance method to analyze small signal stability in engineering practices.

    ELECTRONICALLY TUNED RF TERMINATION

    公开(公告)号:US20210351765A1

    公开(公告)日:2021-11-11

    申请号:US17380104

    申请日:2021-07-20

    摘要: Systems and methods for a tunable impedance are provided. A tunable impedance includes a transistor assembly having two terminals and a control input. The transistor assembly includes one or more transistors electrically connected between the two terminals to provide a first impedance between the two terminals, based upon a control signal. One or more replica transistors react to the control signal in a similar fashion as the transistor assembly, to provide a replica impedance based upon the control signal. A control circuit is configured to generate the control signal based upon a voltage across the replica transistor(s) and/or a current through the replica transistor(s).