公开(公告)号：US20240087850A1

公开(公告)日：2024-03-14

申请号：US17940047

申请日：2022-09-08

Applicant: MKS Instruments, Inc.

Inventor： Aaron BURRY ,  Vladimir KOZITSKY

IPC: H01J37/32 ,  H03K5/00

CPC classification number: H01J37/32183 ,  H03K5/00006 ,  H01J2237/327

Abstract: A power supply system includes a RF power source configured to generate an output signal at an output frequency, a signal source configured to generate a perturbation signal, an extremum seeking frequency controller configured to generate a frequency control signal based on the perturbation signal, and a frequency selector configured to select a perturbation frequency of the perturbation signal that is isolated from at least one frequency tone associated with the power supply system. The frequency control signal varies the output frequency of the RF power source. Other example power supply system, methods for controlling a RF generator, and control systems for controlling a RF generator are also disclosed.

公开(公告)号：US20230223235A1

公开(公告)日：2023-07-13

申请号：US18084696

申请日：2022-12-20

Applicant: MKS Instruments, Inc.

Inventor： Mariusz OLDZIEJ ,  Aaron RADOMSKI ,  Aaron BURRY ,  Michael KIRK

IPC: H01J37/32 ,  H03H11/28

CPC classification number: H01J37/32146 ,  H03H11/28 ,  H01J2237/24507 ,  H01J2237/334

Abstract: A radio frequency (RF) generator includes a RF power source configured to output an RF power signal, and a controller coupled to the RF power source. The controller is configured to generate a pulse to modulate the RF power signal of the RF power source. The pulse includes one or more state transitions. The controller is further configured to receive a sync signal indicative of one or more operating characteristics or parameters of another RF generator, and adjust at least one of the state transitions of the pulse to synchronize the state transition with a defined phase of the received sync signal. Other example RF generators, RF power delivery systems including one or more RF generators, and control methods for adjusting a state transition of a pulse to synchronize the state transition with a defined phase of a sync signal are also disclosed.

公开(公告)号：US20240355585A1

公开(公告)日：2024-10-24

申请号：US18302141

申请日：2023-04-18

Applicant: MKS Instruments, Inc.

Inventor： Aaron BURRY ,  Peter PAUL ,  Aaron RADOMSKI

IPC: H01J37/32

CPC classification number: H01J37/32174 ,  H01J37/32128 ,  H01J2237/334

Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted over a predetermined number of bins. The parameter is adjusted in accordance with a cost function, and the cost function is determined by introducing a perturbation for each bin into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal. The perturbation is determined in accordance with a basis set having fewer dimensions than the number of bins.

公开(公告)号：US20230326721A1

公开(公告)日：2023-10-12

申请号：US18209243

申请日：2023-06-13

Applicant: MKS Instruments, Inc.

Inventor： Jonathan SMYKA ,  Aaron RADOMSKI ,  Peter PAUL ,  Aaron BURRY

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J37/32155 ,  H01J37/32146

Abstract: A power generator includes a power source and a control module coupled to the power source. The control module is configured to generate at least one control signal to vary a respective at least one of an output signal from the power source or an impedance between the power source and a load. The output signal includes a signal modulated by a pulse signal, and the control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the output signal or the impedance between the power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.

公开(公告)号：US20250006478A1

公开(公告)日：2025-01-02

申请号：US18731703

申请日：2024-06-03

Applicant: MKS Instruments, Inc.

Inventor： Aaron BURRY ,  Nicholas NELSON

IPC: H01J37/32 ,  H02M3/04

Abstract: A controller for a generator includes a feedforward control module. The feedforward control module is configured to generate an adjustment profile to control a parameter of a generator in accordance with a desired output signal. The feedforward control module generates a plurality of adjustment values in accordance with sub-regions of the output signal. Each sub-region includes a portion of the desired output signal.

公开(公告)号：US20240079211A1

公开(公告)日：2024-03-07

申请号：US17903749

申请日：2022-09-06

Applicant: MKS Instruments, Inc.

Inventor： Aaron BURRY ,  Vladimir KOZITSKY

IPC: H01J37/32 ,  H03K5/00

CPC classification number: H01J37/32183 ,  H03K5/00006

Abstract: A RF generator includes a RF power source configured to generate an output signal at an output frequency, and an extremum-seeking frequency controller configured to generate a frequency control signal. The frequency control signal varies the output frequency of the RF power source, and the frequency control signal is formed from a gradient signal. The RF generator further includes a gradient estimator configured to generate the gradient signal. A frequency of the frequency control signal is adjusted based on the gradient signal. The gradient estimator is configured to receive frequency values of the frequency control signal and corresponding output response values, and the gradient signal is generated based on the frequency values and the output response values. Other example RF generators, methods for extremum-seeking frequency control of a RF generator, and control systems for controlling a RF generator are also disclosed.

公开(公告)号：US20230049104A1

公开(公告)日：2023-02-16

申请号：US17979129

申请日：2022-11-02

Applicant: MKS Instruments, Inc.

Inventor： Aaron BURRY ,  Aaron RADOMSKI ,  Mariusz OLDZIEJ ,  Peter PAUL ,  Ross REINHARDT

IPC: H01J37/32

Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.