METHOD FOR IMPLEMENTING A NEW REACTIVE SYSTEM

    公开(公告)号:US20170131700A1

    公开(公告)日:2017-05-11

    申请号:US14942031

    申请日:2015-11-16

    Abstract: A method for implementing a new reactive system and a new reactive system includes applying at least one input suitable for the new reactive system to an existing reactive system to obtain at least one output produced by the existing reactive system; comparing the at least one output with an expected output representative of an output expected to be obtained by applying the at least one input to the new reactive system; determining if the at least one output would be compatible with the expected output; and using the compatibility between the at least one output and the expected output to generate a supervisory control rule set arranged for supervisory control of the existing reactive system when used as part or whole of the new reactive system.

    Multi cluster tool system and a method of controlling a multi tool cluster system

    公开(公告)号:US10520914B2

    公开(公告)日:2019-12-31

    申请号:US15268851

    申请日:2016-09-19

    Abstract: A system and method of controlling a multi cluster tool system configured to process a semiconductor product includes a plurality of cluster tools arranged adjacent each other, a buffer module positioned between a pair of cluster tools, each cluster tool including a plurality of processing modules and a robot, the method of controlling a multi cluster tool system including receiving a plurality of system parameters from a user interface, wherein the system parameters correspond to one or more processing steps in a system cycle, wherein the system cycle is a cycle of processing the semiconductor product, determining a system schedule for defining the system cycle for processing a semiconductor product, the system schedule providing robot waiting times for each robot of each cluster tool, controlling, via a controller, the operation of each robot of each cluster tool based on the determined schedule.

    Cluster tool apparatus and a method of controlling a cluster tool apparatus

    公开(公告)号:US10134613B2

    公开(公告)日:2018-11-20

    申请号:US15272706

    申请日:2016-09-22

    Abstract: A system and method for a cluster tool apparatus for processing a semiconductor product including processing modules located adjacent each other and configured to process a semiconductor module, loadlocks configured to retain and dispense unprocessed semiconductor products and each positioned adjacent one of the processing modules, a robot configured to load, transfer and unload a semiconductor product to and from the processing modules, a hardware controller in communication with the robot and executing a method to close down the cluster tool apparatus to an idle state, the method including determining a status of the processing modules, determining if a close down process is required based on the status or based on a close down signal, and, if required, determining a schedule for a close down process based on a semiconductor product residency parameter, and controlling the operation of the robot based on the schedule to perform the close down process.

    System for controlling a power transmission system

    公开(公告)号:US10103569B2

    公开(公告)日:2018-10-16

    申请号:US15078367

    申请日:2016-03-23

    Abstract: A power transmission system includes a plurality of electrical substations and a plurality of transmission lines arranged to connect the plurality of electrical substations to form a power transmission network; and a controller system arranged to control a power transmission within the power transmission network. The controller system includes: a detection module arranged to detect an occurrence of a fault in at least one faulty electrical substation of the plurality of electrical substations; and a restoration module arranged to at least temporally maintain an output power of the at least one faulty electrical substation; and wherein at least one of the plurality of electrical substations is operable to facilitate maintaining of the output of the at least one faulty electrical substation upon the detection of the occurrence of the fault.

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