公开(公告)号：US07258520B2

公开(公告)日：2007-08-21

申请号：US10650312

申请日：2003-08-28

申请人： Martin R. Elliott ,  Michael Robert Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt ,  Loy Randall Stuart

发明人： Martin R. Elliott ,  Michael Robert Rice ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt ,  Loy Randall Stuart

IPC分类号： B65B59/00 ,  H01L21/67

CPC分类号： H01L21/67353 ,  H01L21/67373 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67772 ,  Y10S414/139

摘要： A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate transfer location also has an actuator mechanism. The actuator mechanism is positioned relative to the support so as to interact with the opening mechanism of the substrate carrier. The actuator mechanism of the substrate transfer location and the opening mechanism of the substrate carrier are adapted to interface with each other at the substrate transfer location so as to employ movement of the substrate carrier to achieve opening and closing of the substrate carrier.

摘要翻译： 用于打开衬底载体的系统包括具有可打开部分的衬底载体。 衬底托架还具有联接到可打开部分的打开机构。 衬底转移位置具有适于支撑衬底载体的支撑件。 基板转印位置也具有致动器机构。 致动器机构相对于支撑件定位，以便与衬底载体的开启机构相互作用。 衬底传送位置的致动器机构和衬底载体的打开机构适于在衬底传送位置处彼此接合，以便采用衬底载体的移动来实现衬底载体的打开和闭合。