公开(公告)号：US08574927B2

公开(公告)日：2013-11-05

申请号：US13335882

申请日：2011-12-22

申请人： Min-Hwa Chi ,  Xiufeng Han ,  Guoqiang Yu

发明人： Min-Hwa Chi ,  Xiufeng Han ,  Guoqiang Yu

IPC分类号： H01L21/8246

CPC分类号： H01L43/12 ,  G11C11/161 ,  H01L43/08

摘要： Using a damascene process, a cup-shaped MTJ device is formed in an opening within a dielectric layer. A passivation layer is formed on the top surfaces of the sidewalls of the cup-shaped MTJ device to enclose the top of the sidewalls, thereby reducing magnetic flux leakage. Accordingly, the MTJ device may be fabricated using the same equipment that are compatible with and commonly used in CMOS technologies/processes.

摘要翻译： 使用镶嵌工艺，在电介质层内的开口中形成杯形MTJ器件。 在杯形MTJ装置的侧壁的顶表面上形成钝化层以封闭侧壁的顶部，由此减小磁通量泄漏。 因此，可以使用与CMOS技术/工艺中兼容并且通常使用的相同设备来制造MTJ器件。

公开(公告)号：US20130099335A1

公开(公告)日：2013-04-25

申请号：US13335882

申请日：2011-12-22

申请人： Min-Hwa Chi ,  Xiufeng Han ,  Guoqiang Yu

发明人： Min-Hwa Chi ,  Xiufeng Han ,  Guoqiang Yu

IPC分类号： H01L29/82 ,  H01L21/8246

CPC分类号： H01L43/12 ,  G11C11/161 ,  H01L43/08

摘要： Using a damascene process, a cup-shaped MTJ device is formed in an opening within a dielectric layer. A passivation layer is formed on the top surfaces of the sidewalls of the cup-shaped MTJ device to enclose the top of the sidewalls, thereby reducing magnetic flux leakage. Accordingly, the MTJ device may be fabricated using the same equipment that are compatible with and commonly used in CMOS technologies/processes.

摘要翻译： 使用镶嵌工艺，在电介质层内的开口中形成杯形MTJ器件。 在杯形MTJ装置的侧壁的顶表面上形成钝化层以封闭侧壁的顶部，由此减小磁通量泄漏。 因此，可以使用与CMOS技术/工艺中兼容并且通常使用的相同设备来制造MTJ器件。

公开(公告)号：US09484138B2

公开(公告)日：2016-11-01

申请号：US14389972

申请日：2012-07-17

申请人： Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

发明人： Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

IPC分类号： H01F7/20 ,  H01F41/00 ,  G01R33/09 ,  H01L43/12 ,  H01J37/09

CPC分类号： H01J37/09 ,  G01R33/093 ,  G01R33/096 ,  H01F7/202 ,  H01F7/204 ,  H01F41/00 ,  H01J37/141 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/28 ,  H01J2237/31754 ,  H01L43/12

摘要： A nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device. The magnetic-field applying device comprises a power supply, magnetic poles, and a magnetic-field generation device having a magnetic conductive soft iron core and a coil connected to the power supply and wound on the soft iron core to generate a magnetic field. The soft iron core is a semi-closed frame structure and the magnetic poles are respectively disposed at the two ends of the semi-closed frame structure. The sample stage is inside the vacuum chamber. The magnetic poles are opposite one another inside the vacuum chamber with respect to the sample stage. The coil and soft iron core are outside the vacuum chamber. The soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles locate a sample on the sample stage and apply a local magnetic field.

摘要翻译： 纳米图案系统包括真空室，样品台和磁场施加装置。 磁场施加装置包括电源，磁极和具有导电软铁芯的磁场产生装置和连接到电源的线圈并缠绕在软铁芯上以产生磁场的磁场产生装置。 软铁芯是半封闭框架结构，磁极分别设置在半封闭框架结构的两端。 样品台位于真空室内。 磁极相对于样品台在真空室内彼此相对。 线圈和软铁芯在真空室外。 软铁芯将线圈产生的磁场引入真空室。 磁极将样品定位在样品台上并施加局部磁场。

公开(公告)号：US20150123754A1

公开(公告)日：2015-05-07

申请号：US14389972

申请日：2012-07-07

申请人： Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

发明人： Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

IPC分类号： H01F7/20

CPC分类号： H01J37/09 ,  G01R33/093 ,  G01R33/096 ,  H01F7/202 ,  H01F7/204 ,  H01F41/00 ,  H01J37/141 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/28 ,  H01J2237/31754 ,  H01L43/12

摘要： A nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device. The magnetic-field applying device comprises a power supply, magnetic poles, and a magnetic-field generation device having a magnetic conductive soft iron core and a coil connected to the power supply and wound on the soft iron core to generate a magnetic field. The soft iron core is a semi-closed frame structure and the magnetic poles are respectively disposed at the two ends of the semi-closed frame structure. The sample stage is inside the vacuum chamber. The magnetic poles are opposite one another inside the vacuum chamber with respect to the sample stage. The coil and soft iron core are outside the vacuum chamber. The soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles locate a sample on the sample stage and apply a local magnetic field.

摘要翻译： 纳米图案系统包括真空室，样品台和磁场施加装置。 磁场施加装置包括电源，磁极和具有导电软铁芯的磁场产生装置和连接到电源的线圈并缠绕在软铁芯上以产生磁场的磁场产生装置。 软铁芯是半封闭框架结构，磁极分别设置在半封闭框架结构的两端。 样品台位于真空室内。 磁极相对于样品台在真空室内彼此相对。 线圈和软铁芯在真空室外。 软铁芯将线圈产生的磁场引入真空室。 磁极将样品定位在样品台上并施加局部磁场。

公开(公告)号：US08082015B2

公开(公告)日：2011-12-20

申请号：US11106390

申请日：2005-04-13

申请人： Arjun G. Yodh ,  Joel H. Greenberg ,  Guoqiang Yu ,  John A Detre ,  Turgut Durduran ,  Mark G. Burnett ,  Emile R. Mohler, III ,  Harry Quon ,  Stephen M. Hahn

发明人： Arjun G. Yodh ,  Joel H. Greenberg ,  Guoqiang Yu ,  John A Detre ,  Turgut Durduran ,  Mark G. Burnett ,  Emile R. Mohler, III ,  Harry Quon ,  Stephen M. Hahn

IPC分类号： A61B5/00 ,  G01N21/25

CPC分类号： A61B5/14551 ,  A61B5/0059 ,  A61B5/02028 ,  A61B5/0261 ,  A61B5/14553 ,  A61B5/4519 ,  A61B2562/0233 ,  A61B2562/0242 ,  A61B2562/046

摘要： An embodiment of the invention includes a device, system and method for determining the characteristics of deep tissue. The novel method includes measuring blood flow rate and oxygenation characteristics of the tissue, and determining oxygen metabolism of the tissue as a function of the measure blood flow rate and measure oxygenation. The blood flow rate characteristics are measured as a function of light fluctuations caused by the tissue, while the oxygenation characteristics are measured as a function of transmission of light through the tissue with respect to the wavelength of light. The tissue may be layered tissue, for example, a portion of a brain. The tissue characteristics may be measured during times of varying levels of exercise intensity.

摘要翻译： 本发明的实施例包括用于确定深层组织特征的装置，系统和方法。 该新方法包括测量组织的血液流速和氧合特征，以及测定组织的氧代谢作为测量血液流速并测量氧合的函数。 血液流量特性被测量为由组织引起的光波动的函数，而氧合特性被测量为相对于光的波长通过组织的光的透射的函数。 组织可以是层状组织，例如，脑的一部分。 组织特征可以在运动强度不同程度的时间内测量。

公开(公告)号：US20060063995A1

公开(公告)日：2006-03-23

申请号：US11106390

申请日：2005-04-13

申请人： Arjun Yodh ,  Joel Greenberg ,  Guoqiang Yu ,  John Detre ,  Turgut Durduran ,  Mark Burnett ,  Emile Mohler ,  Harry Quon ,  Stephen Hahn

发明人： Arjun Yodh ,  Joel Greenberg ,  Guoqiang Yu ,  John Detre ,  Turgut Durduran ,  Mark Burnett ,  Emile Mohler ,  Harry Quon ,  Stephen Hahn

IPC分类号： A61B5/00 ,  A61B5/02

CPC分类号： A61B5/14551 ,  A61B5/0059 ,  A61B5/02028 ,  A61B5/0261 ,  A61B5/14553 ,  A61B5/4519 ,  A61B2562/0233 ,  A61B2562/0242 ,  A61B2562/046

摘要： An embodiment of the invention includes a device, system and method for determining the characteristics of deep tissue. The novel method includes measuring blood flow rate and oxygenation characteristics of the tissue, and determining oxygen metabolism of the tissue as a function of the measure blood flow rate and measure oxygenation. The blow flow rate characteristics are measured as a function of light fluctuations caused by the tissue, while the oxygenation characteristics are measured as a function of transmission of light through the tissue with respect to the wavelength of light. The tissue may be layered tissue, for example, a portion of a brain. The tissue characteristics may be measured during times of varying levels of exercise intensity.

摘要翻译： 本发明的实施例包括用于确定深层组织特征的装置，系统和方法。 该新方法包括测量组织的血液流速和氧合特征，以及测定组织的氧代谢作为测量血液流速并测量氧合的函数。 吹扫流量特性被测量为由组织引起的光波动的函数，而氧合特性被测量为相对于光的波长通过组织的光的透射的函数。 组织可以是层状组织，例如，脑的一部分。 组织特征可以在运动强度不同程度的时间内测量。