公开(公告)号：US20170117874A1

公开(公告)日：2017-04-27

申请号：US15300587

申请日：2015-03-31

Applicant: NAGASE CHEMTEX CORPORATION

Inventor： Takuya ISHIBASHI ,  Masatoshi FUJIMOTO ,  Takayuki HASHIMOTO

IPC: H03H9/64

CPC classification number: H03H9/64 ,  B32B3/02 ,  B32B3/26 ,  B32B5/024 ,  B32B5/026 ,  B32B5/26 ,  B32B7/06 ,  B32B7/12 ,  B32B9/005 ,  B32B9/045 ,  B32B15/08 ,  B32B15/082 ,  B32B15/088 ,  B32B15/09 ,  B32B15/092 ,  B32B15/095 ,  B32B15/098 ,  B32B15/18 ,  B32B15/20 ,  B32B17/00 ,  B32B27/08 ,  B32B27/12 ,  B32B27/281 ,  B32B27/283 ,  B32B27/34 ,  B32B27/36 ,  B32B27/365 ,  B32B27/38 ,  B32B27/40 ,  B32B27/42 ,  B32B2260/023 ,  B32B2260/046 ,  B32B2262/02 ,  B32B2262/0269 ,  B32B2262/101 ,  B32B2262/106 ,  B32B2307/54 ,  B32B2307/748 ,  B32B2457/00 ,  H01L23/04 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73265 ,  H03H9/1014 ,  H03H9/1071 ,  H01L2924/00014

Abstract: A circuit member including: an element having a functional region; a tabular cover disposed opposite to the functional region; and a rib formed to surround the functional region, for providing a space between the functional region and the cover. The cover includes a sheet S having a thickness of 100 μm or less. The sheet S has a tensile elastic modulus Es at 175° C. of 10 GPa or more. The tensile elastic modulus Es at 175° C. of the sheet S is preferably 20 GPa or more.