公开(公告)号：US20160154042A1

公开(公告)日：2016-06-02

申请号：US14905591

申请日：2014-03-13

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Kazuya KIKUNAGA ,  Kazuhiro NONAKA

IPC: G01R29/24 ,  G01R29/14

CPC classification number: G01R29/24 ,  G01H11/06 ,  G01R29/0878 ,  G01R29/14 ,  G01V3/088 ,  G06F1/00 ,  G06T11/206 ,  H01L21/00 ,  H01L2221/00

Abstract: A static electricity distribution measuring apparatus (1) according to the present disclosure measures the static electricity distribution on a measurement surface of a measurement target (200), and is provided with: an array antenna (2) that receives electric fields generated from each of a plurality of areas (211) on the measurement surface through vibration; a vibrator (3) that vibrates the measurement target (200) or the array antenna (2); a measurer (4) that measures at least one from among intensity, frequency and phase of the electric fields in each of the plurality of areas (211) received by the array antenna (2); a calculator (5) that calculates an amount of static electricity for each of the plurality of areas (211) based on measurement results by the measurer (4); and a drawer (6) that draws the static electricity distribution on the measurement surface based on the amount of static electricity in each of the plurality of areas (211). The array antenna (2) has a plurality of antenna elements (21) respectively corresponding to the plurality of areas (211).

Abstract translation: 根据本公开的静电分配测量装置（1）测量测量目标（200）的测量表面上的静电分布，并且设置有：阵列天线（2），其接收从每个 通过振动在所述测量表面上的多个区域（211）; 振动器（3），其使测量对象（200）或阵列天线（2）振动; 测量器（4），其从所述阵列天线（2）接收的所述多个区域（211）中的每一个中测量电场的强度，频率和相位中的至少一个; 计算器（5），其基于测量器（4）的测量结果来计算多个区域（211）中的每一个的静电量; 以及抽屉（6），其基于所述多个区域（211）中的每一个区域中的静电量，在测量表面上绘制静电分布。 阵列天线（2）具有分别对应于多个区域（211）的多个天线元件（21）。

公开(公告)号：US20230384175A1

公开(公告)日：2023-11-30

申请号：US18245329

申请日：2021-10-11

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Yuki FUJIO ,  Kazuma KURIHARA ,  Kazuya KIKUNAGA ,  Kengo MANABE

IPC: G01L1/24

CPC classification number: G01L1/24

Abstract: A light emitting structure light in response to a load applied to an object from a load object. In the light emitting structure are formed contacting portions which are provided on a supporting surface of the object, and which have a predetermined length from the surface of the supporting surface in a direction perpendicular to the surface of the object, wherein a stress-luminescent material is included in at least a portion of the supporting surface and the surface of the contacting portions.

公开(公告)号：US20190241803A1

公开(公告)日：2019-08-08

申请号：US16318545

申请日：2017-07-20

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Nao TERASAKI ,  Kazuya KIKUNAGA

IPC: C09K11/70 ,  C09K11/64 ,  C09K9/00 ,  G01T1/20

CPC classification number: C09K11/70 ,  C09K9/00 ,  C09K11/00 ,  C09K11/64 ,  G01T1/20 ,  G21K4/00

Abstract: [Problem]To provide a charged particle detection material which can detect charged particles due to a discharge phenomenon or the like caused even in a very low voltage which cannot be observed by a prior art, as well as a charged particle detection film and a charged particle detection liquid using the material.[Solution]The charged particle detection material and the charged particle detection film according to the present invention contain at least one of a fluorescent substance, a luminescent substance, an electroluminescent substance, a fractoluminescent substance, a photochromic substance, an afterglow substance, a photostimulated luminescent substance and a mechanoluminescent substance and can easily detect emission or incidence of charged particles in real time.

公开(公告)号：US20190120887A1

公开(公告)日：2019-04-25

申请号：US16092540

申请日：2017-02-27

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Kazuya KIKUNAGA

IPC: G01R29/14 ,  G01R29/24

Abstract: With prior art static electricity distribution measuring devices, there has been the problem that it has not been possible to measure the amount of electrostatic charge over a wide range at high spatial resolution and quickly.In the present invention, there are provided: a detection unit 20 in which a plurality of sensors, provided upon a surface, move relatively along the surface of an electrostatically charged subject 100 to be measured, and detect potential changes generated by the distance to the surface of the measurement subject being changed; a reference distance measuring unit that measures the distance between the surface of the measurement subject and the surface of the detection unit; a distance adjustment unit that adjusts that distance so that it becomes a reference distance that is determined in advance; and a vibrating unit that causes the distance between the surface of the measurement subject and the surface of the detection unit to change upon a predetermined cycle.