公开(公告)号：US10777446B2

公开(公告)日：2020-09-15

申请号：US16069942

申请日：2017-01-10

Applicant: NITTO DENKO CORPORATION

Inventor： Shotaro Masuda ,  Tomoaki Ichikawa ,  Yohei Maeno

IPC: H01L21/687 ,  H01L21/677 ,  C01B32/158 ,  H01L21/683 ,  B65G49/07 ,  C01B32/16 ,  B82Y30/00 ,  B82Y40/00

Abstract: Provided is a mounting member that is excellent in low dusting property and hardly contaminates an object to be mounted while being excellent in gripping force and heat resistance. The mounting member of the present invention includes an aggregate of carbon nanotubes for forming a mounting surface, wherein when the mounting member is placed on a silicon wafer so that a carbon nanotube aggregate-side surface thereof is brought into contact with the silicon wafer, and the resultant is left to stand for 30 seconds while a load of 100 g is applied from above the mounting member, a number of particles each having a diameter of 0.2 μm or more transferred onto the silicon wafer is 100 particles/cm2 or less.

公开(公告)号：US11420832B2

公开(公告)日：2022-08-23

申请号：US16084628

申请日：2017-03-14

Applicant: NITTO DENKO CORPORATION

Inventor： Shotaro Masuda ,  Tomoaki Ichikawa ,  Yohei Maeno ,  Yoshiharu Hatakeyama

IPC: B32B9/04 ,  B65G49/07 ,  H01L21/673 ,  H01L21/687 ,  B32B5/02 ,  B32B7/12 ,  H01L21/677 ,  H01L21/683

Abstract: Provided is a transport fixing jig that has a high gripping force, hardly contaminates an object to be processed (object to be transported), and is excellent in heat resistance. The transport fixing jig of the present invention includes: a first base material; a carbon nanotube aggregate; and an adhesive layer arranged between the first base material and the carbon nanotube aggregate, wherein the first base material and the carbon nanotube aggregate are bonded to each other via the adhesive layer, and wherein a ratio (adhesive layer/base material) between a linear expansion coefficient of the first base material and a linear expansion coefficient of the adhesive layer is from 0.7 to 1.8.

公开(公告)号：US10796941B2

公开(公告)日：2020-10-06

申请号：US16069923

申请日：2017-01-10

Applicant: NITTO DENKO CORPORATION

Inventor： Shotaro Masuda ,  Tomoaki Ichikawa ,  Yohei Maeno

IPC: C01B32/158 ,  H01L21/687 ,  B82Y30/00 ,  H01L21/677 ,  H01L21/683 ,  C01B32/152 ,  C01B32/16

Abstract: Provided is a mounting member that is excellent in low dusting property and hardly contaminates an object to be mounted while being excellent in gripping force and heat resistance. In one embodiment of the present invention, the mounting member includes an aggregate of carbon nanotubes for forming amounting surface, wherein a standard deviation of diameters of the carbon nanotubes is 3 nm or less. In one embodiment of the present invention, the mounting member includes an aggregate of carbon nanotubes for forming a mounting surface, wherein the aggregate of the carbon nanotubes includes carbon nanotubes each having a multi-walled structure, and wherein a standard deviation of wall numbers of the carbon nanotubes is 3 or less.