公开(公告)号：US09502149B2

公开(公告)日：2016-11-22

申请号：US14456062

申请日：2014-08-11

Applicant: Nordson Corporation

Inventor： James M. Borsuk ,  Gregory W. Harrell ,  James M. Khoury ,  Edward C. McGhee ,  James C. Smith ,  Hallie Smith-Petee

IPC: G21K5/00 ,  G21K5/04 ,  G21K1/00 ,  H01J65/04 ,  H05B41/24

CPC classification number: G21K5/04 ,  G21K1/00 ,  H01J65/044 ,  H05B41/24 ,  H05B41/2806 ,  Y02B20/22

Abstract: A UV system for irradiating a substrate includes a lamphead having an enclosure with an interior. A UV bulb is positioned in the interior and is capable of emitting UV energy when excited by RF energy. The UV system also includes a solid state RF source capable of generating the RF energy. The RF energy is transmitted to the UV bulb, which causes the UV bulb to ignite and emit the UV energy from the interior of the lamphead.

Abstract translation: 用于照射衬底的UV系统包括具有带有内部的外壳的灯头。 UV灯泡位于内部，并能够通过RF能量激发时发出紫外线能量。 UV系统还包括能够产生RF能量的固态RF源。 RF能量被传输到UV灯泡，这导致UV灯泡点燃并从灯头的内部发射UV能量。

公开(公告)号：US20150083940A1

公开(公告)日：2015-03-26

申请号：US14561397

申请日：2014-12-05

Applicant: Nordson Corporation

Inventor： James M. Borsuk ,  James M. Khoury ,  Edward C. McGhee ,  James C. Smith

IPC: H05G2/00 ,  F21V23/00

CPC classification number: H05G2/00 ,  F21V23/007 ,  H01J9/42 ,  H01J9/50 ,  H01J65/044 ,  H05B41/24 ,  Y02B20/22 ,  Y02W30/828

Abstract: A microwave excited ultraviolet lamp system with a data logging and retrieval circuit and method for operating the same. The data logging and retrieval circuit stores operational data in a cache memory using a FIFO data storage protocol. The contents of the cache memory are periodically copied to a larger removable memory so that the removable memory contains a relatively long historical record of the system operational parameters. The data logging and retrieval circuit includes a data port configured to load the contents of the cache memory into an external device when the device is coupled to the data port. A second data port allows the external device to supply power to the data logging and retrieval circuit so that data may be retrieved when the internal power supply is malfunctioning. Data stored in the removable memory may be protected so that it may only be accessed by authorized personnel.

Abstract translation: 一种具有数据记录和检索电路的微波激发紫外灯系统及其操作方法。 数据记录和检索电路使用FIFO数据存储协议将操作数据存储在高速缓冲存储器中。 高速缓冲存储器的内容被周期地复制到更大的可移动存储器，使得可移动存储器包含系统操作参数的相对较长的历史记录。 数据记录和检索电路包括数据端口，该数据端口被配置为当设备耦合到数据端口时将高速缓冲存储器的内容加载到外部设备中。 第二个数据端口允许外部设备向数据记录和检索电路供电，以便在内部电源出现故障时可以检索数据。 存储在可移动存储器中的数据可以被保护，使得它只能被授权的人员访问。

公开(公告)号：US10410819B2

公开(公告)日：2019-09-10

申请号：US15303010

申请日：2015-04-28

Applicant: NORDSON CORPORATION

Inventor： James M. Borsuk ,  James Khoury ,  Edward C. McGhee ,  James C. Smith

IPC: H01J7/24 ,  H05B41/28 ,  F21V29/67 ,  H05B41/36 ,  H01J61/12 ,  H01J61/18 ,  H01J61/20 ,  H01J61/52 ,  H01J65/04

Abstract: A system, method, and computer program product for optimizing the cooling of a UV bulb during a UV irradiation process is described. A power level in which to operate the UV bulb is received. In addition, a particular type of UV bulb being used in the UV irradiation process is received. Thereafter, at least one optimal UV cooling parameter that corresponds to the power level and the type of UV bulb is retrieved from a UV source parameters database. At least one control signal is then sent to a cooling device that is based on the retrieved optimal UV cooling parameter, and the control signal instructs the cooling device to cool the particular type of UV bulb according to the retrieved optimal UV cooling parameter during the UV irradiation process.

公开(公告)号：US09171747B2

公开(公告)日：2015-10-27

申请号：US14217715

申请日：2014-03-18

Applicant: Nordson Corporation

Inventor： James V. Bachman ,  James M. Borsuk ,  James Khoury ,  Edward C. McGhee

IPC: H01J37/32 ,  H01L21/67 ,  H01J65/04

CPC classification number: H01L21/67115 ,  H01J65/044

Abstract: An apparatus for generating ultraviolet light and irradiating a 450 mm diameter semi-conductor wafer. The apparatus includes a plenum and an array of nine RF irradiator units coupled with the plenum. Each irradiator unit includes a plasma lamp bulb and an RF generator operable to generate a radiation energy field to excite the plasma lamp bulb and emit the ultraviolet light. The nine irradiator units are arranged in three rows with three of the irradiator units in each row.

Abstract translation: 一种用于产生紫外光并照射450mm直径的半导体晶片的装置。 该装置包括一个增压室和与该增压室相连的九个射频辐射器单元阵列。 每个照射器单元包括等离子体灯泡和RF发生器，其可操作以产生辐射能场以激发等离子体灯泡并发射紫外光。 这9个辐射器单元被排列成三行，每排有三个辐照器单元。

公开(公告)号：US11011368B2

公开(公告)日：2021-05-18

申请号：US14561397

申请日：2014-12-05

Applicant: Nordson Corporation

Inventor： James M. Borsuk ,  James M. Khoury ,  Edward C. McGhee ,  James C. Smith

IPC: H01J65/04 ,  H05B41/24 ,  H01J9/50 ,  H01J9/42 ,  F21V23/00 ,  H05G2/00

Abstract: A microwave excited ultraviolet lamp system with a data logging and retrieval circuit and method for operating the same. The data logging and retrieval circuit stores operational data in a cache memory using a FIFO data storage protocol. The contents of the cache memory are periodically copied to a larger removable memory so that the removable memory contains a relatively long historical record of the system operational parameters. The data logging and retrieval circuit includes a data port configured to load the contents of the cache memory into an external device when the device is coupled to the data port. A second data port allows the external device to supply power to the data logging and retrieval circuit so that data may be retrieved when the internal power supply is malfunctioning. Data stored in the removable memory may be protected so that it may only be accessed by authorized personnel.

公开(公告)号：US20160042828A1

公开(公告)日：2016-02-11

申请号：US14456062

申请日：2014-08-11

Applicant: Nordson Corporation

Inventor： James M. Borsuk ,  Gregory W. Harrell ,  James M. Khoury ,  Edward C. McGhee ,  James C. Smith ,  Hallie Smith-Petee

IPC: G21K5/04 ,  G21K1/00

CPC classification number: G21K5/04 ,  G21K1/00 ,  H01J65/044 ,  H05B41/24 ,  H05B41/2806 ,  Y02B20/22

Abstract: A UV system for irradiating a substrate includes a lamphead having an enclosure with an interior. A UV bulb is positioned in the interior and is capable of emitting UV energy when excited by RF energy. The UV system also includes a solid state RF source capable of generating the RF energy. The RF energy is transmitted to the UV bulb, which causes the UV bulb to ignite and emit the UV energy from the interior of the lamphead.

Abstract translation: 用于照射衬底的UV系统包括具有带有内部的外壳的灯头。 UV灯泡位于内部，并能够通过RF能量激发时发出紫外线能量。 UV系统还包括能够产生RF能量的固态RF源。 RF能量被传输到UV灯泡，这导致UV灯泡点燃并从灯头的内部发射UV能量。

公开(公告)号：US20150123015A1

公开(公告)日：2015-05-07

申请号：US14531378

申请日：2014-11-03

Applicant: Nordson Corporation

Inventor： James V. Bachman ,  James M. Borsuk ,  Edward C. McGhee ,  James C. Smith

IPC: H01J65/04

CPC classification number: H01J65/044

Abstract: An apparatus for generating ultraviolet light for irradiating a substrate. The apparatus includes a housing enclosing an interior space. The housing includes an inlet for receiving a cooling air flow, and a window configured to emit ultraviolet light and discharge the cooling air flow. A lamp bulb is mounted within the interior space between the inlet and the window. First and second microwave generators are mounted between the inlet and the lamp bulb. A plate is positioned between the inlet and the first and second microwave generators, the plate at least partially defining a plenum within the housing and including first and second openings generally aligned with the respective first and second microwave generators to direct first and second portions of the cooling air flow at the first and second microwave generators.

Abstract translation: 一种用于产生用于照射基板的紫外光的装置。 该装置包括封闭内部空间的壳体。 壳体包括用于接收冷却空气流的入口和被配置为发射紫外线并排出冷却空气流的窗口。 灯泡安装在入口和窗户之间的内部空间内。 第一和第二微波发生器安装在入口和灯泡之间。 板被定位在入口与第一和第二微波发生器之间，板至少部分地限定壳体内的气室，并且包括通常与相应的第一和第二微波发生器对准的第一和第二开口，以引导第一和第二微波发生器的第一和第二部分 在第一和第二微波发生器处的冷却空气流。

公开(公告)号：US20140306603A1

公开(公告)日：2014-10-16

申请号：US14217715

申请日：2014-03-18

Applicant: NORDSON CORPORATION

Inventor： James V. Bachman ,  James M. Borsuk ,  James Khoury ,  Edward C. McGhee

IPC: H01J37/32

CPC classification number: H01L21/67115 ,  H01J65/044

Abstract: An apparatus for generating ultraviolet light and irradiating a 450 mm diameter semi-conductor wafer. The apparatus includes a plenum and an array of nine RF irradiator units coupled with the plenum. Each irradiator unit includes a plasma lamp bulb and an RF generator operable to generate a radiation energy field to excite the plasma lamp bulb and emit the ultraviolet light. The nine irradiator units are arranged in three rows with three of the irradiator units in each row.

Abstract translation: 一种用于产生紫外光并照射450mm直径的半导体晶片的装置。 该装置包括一个增压室和与该增压室相连的九个射频辐射器单元阵列。 每个照射器单元包括等离子体灯泡和RF发生器，其可操作以产生辐射能场以激发等离子体灯泡并发射紫外光。 这9个辐射器单元被排列成三行，每排有三个辐照器单元。