Color coded nozzle adapter and locator tool

    公开(公告)号:US09914144B2

    公开(公告)日:2018-03-13

    申请号:US14390169

    申请日:2013-04-11

    Abstract: A spray nozzle assembly includes a nozzle tip and a nozzle tip adapter. The nozzle tip adapter may include a visually perceptible indicia that corresponds uniquely to an offset angle value of the nozzle tip adapter. In one embodiment, the visually perceptible indicia may comprise a unique color for each offset angle among a selectable group of nozzle tip adapters. Another feature is a locator tool that includes an adjustable holder that is fixed in position relative to a spray nozzle tip or orifice during an alignment operation, and repositioned away from the nozzle tip during a spraying operation. The adjustable holder may include a measurement member to determine one or more distances between the nozzle tip or orifice and a location on a workpiece that will be coated or sprayed.

    Method and apparatus for irradiating a semi-conductor wafer with ultraviolet light
    3.
    发明授权
    Method and apparatus for irradiating a semi-conductor wafer with ultraviolet light 有权
    用紫外线照射半导体晶片的方法和装置

    公开(公告)号:US09171747B2

    公开(公告)日:2015-10-27

    申请号:US14217715

    申请日:2014-03-18

    CPC classification number: H01L21/67115 H01J65/044

    Abstract: An apparatus for generating ultraviolet light and irradiating a 450 mm diameter semi-conductor wafer. The apparatus includes a plenum and an array of nine RF irradiator units coupled with the plenum. Each irradiator unit includes a plasma lamp bulb and an RF generator operable to generate a radiation energy field to excite the plasma lamp bulb and emit the ultraviolet light. The nine irradiator units are arranged in three rows with three of the irradiator units in each row.

    Abstract translation: 一种用于产生紫外光并照射450mm直径的半导体晶片的装置。 该装置包括一个增压室和与该增压室相连的九个射频辐射器单元阵列。 每个照射器单元包括等离子体灯泡和RF发生器,其可操作以产生辐射能场以激发等离子体灯泡并发射紫外光。 这9个辐射器单元被排列成三行,每排有三个辐照器单元。

    APPARATUS AND METHODS FOR IRRADIATING SUBSTRATES WITH ULTRAVIOLET LIGHT
    4.
    发明申请
    APPARATUS AND METHODS FOR IRRADIATING SUBSTRATES WITH ULTRAVIOLET LIGHT 审中-公开
    用紫外线照射衬底的装置和方法

    公开(公告)号:US20150123015A1

    公开(公告)日:2015-05-07

    申请号:US14531378

    申请日:2014-11-03

    CPC classification number: H01J65/044

    Abstract: An apparatus for generating ultraviolet light for irradiating a substrate. The apparatus includes a housing enclosing an interior space. The housing includes an inlet for receiving a cooling air flow, and a window configured to emit ultraviolet light and discharge the cooling air flow. A lamp bulb is mounted within the interior space between the inlet and the window. First and second microwave generators are mounted between the inlet and the lamp bulb. A plate is positioned between the inlet and the first and second microwave generators, the plate at least partially defining a plenum within the housing and including first and second openings generally aligned with the respective first and second microwave generators to direct first and second portions of the cooling air flow at the first and second microwave generators.

    Abstract translation: 一种用于产生用于照射基板的紫外光的装置。 该装置包括封闭内部空间的壳体。 壳体包括用于接收冷却空气流的入口和被配置为发射紫外线并排出冷却空气流的窗口。 灯泡安装在入口和窗户之间的内部空间内。 第一和第二微波发生器安装在入口和灯泡之间。 板被定位在入口与第一和第二微波发生器之间,板至少部分地限定壳体内的气室,并且包括通常与相应的第一和第二微波发生器对准的第一和第二开口,以引导第一和第二微波发生器的第一和第二部分 在第一和第二微波发生器处的冷却空气流。

    COLOR CODED NOZZLE ADAPTER AND LOCATOR TOOL
    5.
    发明申请
    COLOR CODED NOZZLE ADAPTER AND LOCATOR TOOL 有权
    彩色编码喷嘴适配器和定位器工具

    公开(公告)号:US20150060577A1

    公开(公告)日:2015-03-05

    申请号:US14390169

    申请日:2013-04-11

    Abstract: A spray nozzle assembly includes a nozzle tip and a nozzle tip adapter. The nozzle tip adapter may include a visually perceptible indicia that corresponds uniquely to an off-set angle value of the nozzle tip adapter. In one embodiment, the visually perceptible indicia may comprise a unique color for each offset angle among a selectable group of nozzle tip adapters. Another feature is a locator tool that includes an adjustable holder that is fixed in position relative to a spray nozzle tip or orifice during an alignment operation, and repositioned away from the nozzle tip during a spraying operation. The adjustable holder may include a measurement member to determine one or more distances between the nozzle tip or orifice and a location on a workpiece that will be coated or sprayed.

    Abstract translation: 喷嘴组件包括喷嘴尖端和喷嘴尖端适配器。 喷嘴尖端适配器可以包括视觉上可察觉的标记,其唯一地对应于喷嘴尖端适配器的偏移角值。 在一个实施例中,视觉上可察觉的标记可以包括用于可选择组的喷嘴头适配器之间的每个偏移角的独特颜色。 另一个特征是定位器工具,其包括可调节保持器,其在对准操作期间相对于喷嘴尖端或孔口固定在适当位置,并且在喷射操作期间重新定位成远离喷嘴尖端。 可调节保持器可以包括测量构件,以确定喷嘴尖端或孔口与待涂覆或喷涂的工件上的位置之间的一个或多个距离。

    METHOD AND APPARATUS FOR IRRADIATING A SEMI-CONDUCTOR WAFER WITH ULTRAVIOLET LIGHT
    6.
    发明申请
    METHOD AND APPARATUS FOR IRRADIATING A SEMI-CONDUCTOR WAFER WITH ULTRAVIOLET LIGHT 审中-公开
    用超紫外线照射半导体滤波器的方法和装置

    公开(公告)号:US20140306603A1

    公开(公告)日:2014-10-16

    申请号:US14217715

    申请日:2014-03-18

    CPC classification number: H01L21/67115 H01J65/044

    Abstract: An apparatus for generating ultraviolet light and irradiating a 450 mm diameter semi-conductor wafer. The apparatus includes a plenum and an array of nine RF irradiator units coupled with the plenum. Each irradiator unit includes a plasma lamp bulb and an RF generator operable to generate a radiation energy field to excite the plasma lamp bulb and emit the ultraviolet light. The nine irradiator units are arranged in three rows with three of the irradiator units in each row.

    Abstract translation: 一种用于产生紫外光并照射450mm直径的半导体晶片的装置。 该装置包括一个增压室和与该增压室相连的九个射频辐射器单元阵列。 每个照射器单元包括等离子体灯泡和RF发生器,其可操作以产生辐射能场以激发等离子体灯泡并发射紫外光。 这9个辐射器单元被排列成三行,每排有三个辐照器单元。

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